FR3058564B1 - Procede et circuit de polarisation de circuits integres - Google Patents

Procede et circuit de polarisation de circuits integres Download PDF

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Publication number
FR3058564B1
FR3058564B1 FR1660745A FR1660745A FR3058564B1 FR 3058564 B1 FR3058564 B1 FR 3058564B1 FR 1660745 A FR1660745 A FR 1660745A FR 1660745 A FR1660745 A FR 1660745A FR 3058564 B1 FR3058564 B1 FR 3058564B1
Authority
FR
France
Prior art keywords
circuit
type
polarizing
integrated circuits
circuit domain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1660745A
Other languages
English (en)
Other versions
FR3058564A1 (fr
Inventor
Florian Cacho
Vincent Huard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics SA
STMicroelectronics Crolles 2 SAS
Original Assignee
STMicroelectronics SA
STMicroelectronics Crolles 2 SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STMicroelectronics SA, STMicroelectronics Crolles 2 SAS filed Critical STMicroelectronics SA
Priority to FR1660745A priority Critical patent/FR3058564B1/fr
Priority to EP17168139.8A priority patent/EP3319124A1/fr
Priority to CN201720531721.4U priority patent/CN207369003U/zh
Priority to CN201710337951.1A priority patent/CN108075754B/zh
Priority to US15/609,571 priority patent/US10050037B2/en
Publication of FR3058564A1 publication Critical patent/FR3058564A1/fr
Priority to US16/038,705 priority patent/US20180323196A1/en
Application granted granted Critical
Publication of FR3058564B1 publication Critical patent/FR3058564B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
    • H03K17/28—Modifications for introducing a time delay before switching
    • H03K17/284—Modifications for introducing a time delay before switching in field effect transistor switches
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
    • H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
    • H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
    • H01L27/088—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate
    • H01L27/092—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate complementary MIS field-effect transistors
    • H01L27/0928—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate complementary MIS field-effect transistors comprising both N- and P- wells in the substrate, e.g. twin-tub
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/31725—Timing aspects, e.g. clock distribution, skew, propagation delay
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
    • H01L29/107—Substrate region of field-effect devices
    • H01L29/1075—Substrate region of field-effect devices of field-effect transistors
    • H01L29/1079—Substrate region of field-effect devices of field-effect transistors with insulated gate
    • H01L29/1083—Substrate region of field-effect devices of field-effect transistors with insulated gate with an inactive supplementary region, e.g. for preventing punch-through, improving capacity effect or leakage current
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
    • H03K17/51—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the components used
    • H03K17/56—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the components used by the use, as active elements, of semiconductor devices
    • H03K17/687—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the components used by the use, as active elements, of semiconductor devices the devices being field-effect transistors
    • H03K17/693—Switching arrangements with several input- or output-terminals, e.g. multiplexers, distributors
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K19/00—Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits
    • H03K19/003—Modifications for increasing the reliability for protection
    • H03K19/00315—Modifications for increasing the reliability for protection in field-effect transistor circuits
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K19/00—Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits
    • H03K19/02—Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits using specified components
    • H03K19/08—Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits using specified components using semiconductor devices
    • H03K19/094—Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits using specified components using semiconductor devices using field-effect transistors
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K19/00—Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits
    • H03K19/20—Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits characterised by logic function, e.g. AND, OR, NOR, NOT circuits
    • H03K19/21—EXCLUSIVE-OR circuits, i.e. giving output if input signal exists at only one input; COINCIDENCE circuits, i.e. giving output only if all input signals are identical
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K3/00—Circuits for generating electric pulses; Monostable, bistable or multistable circuits
    • H03K3/02—Generators characterised by the type of circuit or by the means used for producing pulses
    • H03K3/027—Generators characterised by the type of circuit or by the means used for producing pulses by the use of logic circuits, with internal or external positive feedback
    • H03K3/037—Bistable circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
    • H01L21/8232—Field-effect technology
    • H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
    • H01L21/8238—Complementary field-effect transistors, e.g. CMOS
    • H01L21/823892—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the wells or tubs, e.g. twin tubs, high energy well implants, buried implanted layers for lateral isolation [BILLI]

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Computing Systems (AREA)
  • Mathematical Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Ceramic Engineering (AREA)
  • Semiconductor Integrated Circuits (AREA)

Abstract

L'invention concerne un circuit intégré comprenant : une pluralité de domaines de circuit (102, 104, 106, 108), chaque domaine de circuit comprenant : une pluralité de transistors positionnés sur des caissons de type P et de type N (P, N), les transistors définissant un ou plusieurs trajets de données du domaine de circuit ; un circuit de surveillance (116) adapté à détecter quand le temps de réserve de au moins un des trajets de données du domaine de circuit chute sous un niveau de seuil à générer un signal de sortie basé sur ladite détection sur une ligne sortie ; et un circuit de polarisation (110) adapté à modifier une tension de polarisation d'un caisson de type N et/ou de type P du domaine de circuit.
FR1660745A 2016-11-07 2016-11-07 Procede et circuit de polarisation de circuits integres Expired - Fee Related FR3058564B1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR1660745A FR3058564B1 (fr) 2016-11-07 2016-11-07 Procede et circuit de polarisation de circuits integres
EP17168139.8A EP3319124A1 (fr) 2016-11-07 2017-04-26 Procédé et circuit de polarisation de caissons de circuit intégré
CN201720531721.4U CN207369003U (zh) 2016-11-07 2017-05-15 集成电路
CN201710337951.1A CN108075754B (zh) 2016-11-07 2017-05-15 用于集成电路本体偏置的方法和电路
US15/609,571 US10050037B2 (en) 2016-11-07 2017-05-31 Method and circuit for integrated circuit body biasing
US16/038,705 US20180323196A1 (en) 2016-11-07 2018-07-18 Method and circuit for integrated circuit body biasing

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1660745A FR3058564B1 (fr) 2016-11-07 2016-11-07 Procede et circuit de polarisation de circuits integres
FR1660745 2016-11-07

Publications (2)

Publication Number Publication Date
FR3058564A1 FR3058564A1 (fr) 2018-05-11
FR3058564B1 true FR3058564B1 (fr) 2019-05-31

Family

ID=58213204

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1660745A Expired - Fee Related FR3058564B1 (fr) 2016-11-07 2016-11-07 Procede et circuit de polarisation de circuits integres

Country Status (4)

Country Link
US (2) US10050037B2 (fr)
EP (1) EP3319124A1 (fr)
CN (2) CN108075754B (fr)
FR (1) FR3058564B1 (fr)

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6501313B2 (en) * 2000-12-27 2002-12-31 International Business Machines Corporation Dynamic duty cycle adjuster
JP4090231B2 (ja) * 2001-11-01 2008-05-28 株式会社ルネサステクノロジ 半導体集積回路装置
JP4401621B2 (ja) * 2002-05-07 2010-01-20 株式会社日立製作所 半導体集積回路装置
JP2009147221A (ja) * 2007-12-17 2009-07-02 Renesas Technology Corp 半導体装置
JP2009200739A (ja) * 2008-02-20 2009-09-03 Panasonic Corp 半導体集積回路
EP2382711A4 (fr) * 2009-01-27 2013-10-09 Agere Systems Inc Circuit de chemin critique pour une surveillance de performances
US8185791B2 (en) * 2009-05-22 2012-05-22 Arm Limited Providing tuning limits for operational parameters in data processing apparatus
EP2330624A1 (fr) * 2009-12-01 2011-06-08 Nxp B.V. Structure de puits pour polarisation de substrat, procédé de fabrication et de design.
FR3017466B1 (fr) * 2014-02-07 2017-07-21 Commissariat Energie Atomique Procede de caracterisation du fonctionnement d’un circuit electronique numerique et circuit electronique numerique
US9417657B2 (en) 2014-10-02 2016-08-16 Nxp B.V. Timing control with body-bias

Also Published As

Publication number Publication date
EP3319124A1 (fr) 2018-05-09
CN108075754A (zh) 2018-05-25
CN207369003U (zh) 2018-05-15
US10050037B2 (en) 2018-08-14
FR3058564A1 (fr) 2018-05-11
US20180130803A1 (en) 2018-05-10
CN108075754B (zh) 2021-09-14
US20180323196A1 (en) 2018-11-08

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