FR3045153B1 - METHOD AND DEVICE FOR TAKING A SAMPLE OF AN IRRADIANT OBJECT - Google Patents
METHOD AND DEVICE FOR TAKING A SAMPLE OF AN IRRADIANT OBJECT Download PDFInfo
- Publication number
- FR3045153B1 FR3045153B1 FR1562156A FR1562156A FR3045153B1 FR 3045153 B1 FR3045153 B1 FR 3045153B1 FR 1562156 A FR1562156 A FR 1562156A FR 1562156 A FR1562156 A FR 1562156A FR 3045153 B1 FR3045153 B1 FR 3045153B1
- Authority
- FR
- France
- Prior art keywords
- separation means
- separation
- particles
- sample
- taking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title abstract 2
- 238000000926 separation method Methods 0.000 abstract 8
- 239000000463 material Substances 0.000 abstract 5
- 239000002245 particle Substances 0.000 abstract 3
- 230000008021 deposition Effects 0.000 abstract 1
- 230000001678 irradiating effect Effects 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/04—Devices for withdrawing samples in the solid state, e.g. by cutting
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0093—Radioactive materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/02—Details
- H01J2237/022—Avoiding or removing foreign or contaminating particles, debris or deposits on sample or tube
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/317—Processing objects on a microscale
- H01J2237/31749—Focused ion beam
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
L'invention concerne un procédé de prélèvement d'un échantillon de matière à proximité d'une surface d'un objet irradiant, qui comporte les opérations suivantes : - disposer la surface ou l'objet en regard de moyens de séparation aptes à provoquer la séparation de particules de la matière déposée sur la surface - respectivement de la matière superficielle de l'objet - en fonction de signaux de commande délivrés aux moyens de séparation; - disposer au moins un support de collecte de matière à distance de la surface ou objet, le (ou les) support(s) de collecte s'étendant autour des moyens de séparation; et - commander le fonctionnement des moyens de séparation afin de soumettre la surface ou objet aux moyens de séparation, provoquer la séparation de particules de matière de la surface ou objet par les moyens de séparation, et permettre le dépôt de ces particules sur le(s) support(s)de collecte.The invention relates to a method for taking a sample of material near a surface of an irradiating object, which comprises the following operations: placing the surface or the object facing separation means capable of causing the separation of particles from the material deposited on the surface - respectively from the surface material of the object - as a function of control signals delivered to the separation means; - Having at least one material collection support at a distance from the surface or object, the collection support (s) extending around the separation means; and - controlling the operation of the separation means in order to subject the surface or object to the separation means, cause the separation of particles of material from the surface or object by the separation means, and allow the deposition of these particles on the (s) ) collection medium (s).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1562156A FR3045153B1 (en) | 2015-12-10 | 2015-12-10 | METHOD AND DEVICE FOR TAKING A SAMPLE OF AN IRRADIANT OBJECT |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1562156A FR3045153B1 (en) | 2015-12-10 | 2015-12-10 | METHOD AND DEVICE FOR TAKING A SAMPLE OF AN IRRADIANT OBJECT |
Publications (2)
Publication Number | Publication Date |
---|---|
FR3045153A1 FR3045153A1 (en) | 2017-06-16 |
FR3045153B1 true FR3045153B1 (en) | 2021-05-14 |
Family
ID=56683978
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1562156A Active FR3045153B1 (en) | 2015-12-10 | 2015-12-10 | METHOD AND DEVICE FOR TAKING A SAMPLE OF AN IRRADIANT OBJECT |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR3045153B1 (en) |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56125650A (en) * | 1980-03-07 | 1981-10-02 | Hitachi Ltd | Sample holding device |
US4383394A (en) * | 1980-12-29 | 1983-05-17 | General Electric Company | Sample cutting device for irradiated components |
GB2183336A (en) * | 1985-11-22 | 1987-06-03 | Coal Ind | Bulk sampling device |
US20110001041A1 (en) * | 2007-10-11 | 2011-01-06 | Migeon Henri-Noel | Method and apparatus allowing quantitative investigations of organic and inorganic sample by decoupling the sputtering process from the analysis process |
-
2015
- 2015-12-10 FR FR1562156A patent/FR3045153B1/en active Active
Also Published As
Publication number | Publication date |
---|---|
FR3045153A1 (en) | 2017-06-16 |
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PLFP | Fee payment |
Year of fee payment: 2 |
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PLSC | Publication of the preliminary search report |
Effective date: 20170616 |
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RN | Application for restoration |
Effective date: 20181106 |
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PLFP | Fee payment |
Year of fee payment: 5 |
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PLFP | Fee payment |
Year of fee payment: 6 |
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PLFP | Fee payment |
Year of fee payment: 7 |
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PLFP | Fee payment |
Year of fee payment: 8 |
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PLFP | Fee payment |
Year of fee payment: 9 |