FR3044019B1 - COATING DEPOSITION METHOD ON A SUBSTRATE - Google Patents
COATING DEPOSITION METHOD ON A SUBSTRATEInfo
- Publication number
- FR3044019B1 FR3044019B1 FR1561146A FR1561146A FR3044019B1 FR 3044019 B1 FR3044019 B1 FR 3044019B1 FR 1561146 A FR1561146 A FR 1561146A FR 1561146 A FR1561146 A FR 1561146A FR 3044019 B1 FR3044019 B1 FR 3044019B1
- Authority
- FR
- France
- Prior art keywords
- substrate
- plasma
- deposition method
- coating deposition
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
- C23C4/134—Plasma spraying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
- B05B7/16—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed
- B05B7/22—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed electrically, magnetically or electromagnetically, e.g. by arc
- B05B7/222—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed electrically, magnetically or electromagnetically, e.g. by arc using an arc
- B05B7/226—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed electrically, magnetically or electromagnetically, e.g. by arc using an arc the material being originally a particulate material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
- C23C4/10—Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
- C23C4/11—Oxides
Abstract
L'invention concerne un procédé de dépôt de revêtement sur un substrat (10), le procédé comprenant une étape de: - écoulement d'un plasma le long d'une direction de déplacement (Z), - injection d'intrants liquides dans le plasma, pour obtenir un jet de plasma (JP) présentant une température, et - introduction d'un flux de gaz sur le jet de plasma (JP), le flux de gaz étant à une température inférieure à la température du mélange plasma.The invention relates to a method for depositing a coating on a substrate (10), the method comprising a step of: - flowing a plasma along a direction of movement (Z), - injection of liquid inputs into the plasma, to obtain a plasma jet (JP) having a temperature, and - introduction of a gas flow on the plasma jet (JP), the gas flow being at a temperature below the temperature of the plasma mixture.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1561146A FR3044019B1 (en) | 2015-11-19 | 2015-11-19 | COATING DEPOSITION METHOD ON A SUBSTRATE |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1561146A FR3044019B1 (en) | 2015-11-19 | 2015-11-19 | COATING DEPOSITION METHOD ON A SUBSTRATE |
Publications (2)
Publication Number | Publication Date |
---|---|
FR3044019A1 FR3044019A1 (en) | 2017-05-26 |
FR3044019B1 true FR3044019B1 (en) | 2017-12-29 |
Family
ID=55752374
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1561146A Active FR3044019B1 (en) | 2015-11-19 | 2015-11-19 | COATING DEPOSITION METHOD ON A SUBSTRATE |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR3044019B1 (en) |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2545400B1 (en) * | 1983-05-05 | 1986-09-12 | United Technologies Corp | METHOD FOR DEPOSITING AN ABRASIVE POWDER COATING ON A SUBSTRATE |
JPH07110986B2 (en) * | 1991-08-26 | 1995-11-29 | 秩父小野田株式会社 | Plasma spraying method and apparatus |
-
2015
- 2015-11-19 FR FR1561146A patent/FR3044019B1/en active Active
Also Published As
Publication number | Publication date |
---|---|
FR3044019A1 (en) | 2017-05-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US9837250B2 (en) | Hot wall reactor with cooled vacuum containment | |
WO2019158995A3 (en) | A method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus | |
FR3033554B1 (en) | PROCESS FOR FORMING A GRAPHENE DEVICE | |
US10480077B2 (en) | PEALD apparatus to enable rapid cycling | |
SG10201908874UA (en) | Chamber components for epitaxial growth apparatus | |
GB2563520A (en) | Method providing for a storage element | |
US10745806B2 (en) | Showerhead with air-gapped plenums and overhead isolation gas distributor | |
TW201500184A (en) | Corrosion resistant aluminum coating on plasma chamber components | |
KR20120120245A (en) | Gas distribution showerhead with coating material for semiconductor processing | |
US20120321788A1 (en) | Rotation system for thin film formation | |
FR3013061B1 (en) | METHOD OF MANUFACTURING ALIGNED NANOSTRUCTURES ON A SCREW AND CONTINUOUSLY AND ASSOCIATED DEVICE | |
TW201612346A (en) | Film-forming device and manufacturing method for a film-forming substrate | |
FR3045673B1 (en) | METHOD FOR DEPOSITING A DLI-MOCVD COATING WITH RECYCLING OF THE PRECURSOR COMPOUND | |
WO2018212882A3 (en) | Cvd thin film stress control method for display application | |
EP3827110A4 (en) | Axisymmetric material deposition from plasma assisted by angled gas flow | |
FR3044019B1 (en) | COATING DEPOSITION METHOD ON A SUBSTRATE | |
FR3058391B1 (en) | PROCESS FOR CONTROLLING THE PURITY TORQUE / FLOW OF AN INERT GAS INJECTED IN A FUEL TANK, INTEGRATION SYSTEM FOR IMPLEMENTING THE PROCESS | |
IL284079A (en) | System for controlled deposition of a fluid on a substrate | |
MX2020000757A (en) | Heat exchange element with microstructured coating and process for production. | |
FR3075829B1 (en) | METHOD AND DEVICE FOR DEPOSITING A COATING ON A CONTINUOUS FIBER | |
KR102017962B1 (en) | Shower head and deposition system | |
TW201614096A (en) | Apparatus for MOCVD | |
US20180036752A1 (en) | High Velocity Spray (HVS) Dispense Arm Assemblies including a Gas Shield Nozzle | |
KR102112130B1 (en) | A shower head apparatus | |
FR3057475B1 (en) | METHOD FOR GENERATION OF A JET OF NANOPARTICLES |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PLFP | Fee payment |
Year of fee payment: 2 |
|
PLSC | Publication of the preliminary search report |
Effective date: 20170526 |
|
PLFP | Fee payment |
Year of fee payment: 3 |
|
PLFP | Fee payment |
Year of fee payment: 5 |
|
PLFP | Fee payment |
Year of fee payment: 6 |
|
PLFP | Fee payment |
Year of fee payment: 7 |
|
PLFP | Fee payment |
Year of fee payment: 8 |
|
PLFP | Fee payment |
Year of fee payment: 9 |