FR3039647B1 - PROCESS FOR ANALYSIS OF ORGANIC IMPURITIES PRESENT ON THE SURFACE OF A SUBSTRATE, AND DEVICE FOR COLLECTING ORGANIC IMPURITIES ON THE SURFACE OF A SUBSTRATE - Google Patents

PROCESS FOR ANALYSIS OF ORGANIC IMPURITIES PRESENT ON THE SURFACE OF A SUBSTRATE, AND DEVICE FOR COLLECTING ORGANIC IMPURITIES ON THE SURFACE OF A SUBSTRATE Download PDF

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Publication number
FR3039647B1
FR3039647B1 FR1557434A FR1557434A FR3039647B1 FR 3039647 B1 FR3039647 B1 FR 3039647B1 FR 1557434 A FR1557434 A FR 1557434A FR 1557434 A FR1557434 A FR 1557434A FR 3039647 B1 FR3039647 B1 FR 3039647B1
Authority
FR
France
Prior art keywords
substrate
organic impurities
polymer film
analysis
present
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1557434A
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French (fr)
Other versions
FR3039647A1 (en
Inventor
Helene Lignier
Julien Gaume
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
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Publication date
Application filed by Commissariat a lEnergie Atomique CEA, Commissariat a lEnergie Atomique et aux Energies Alternatives CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR1557434A priority Critical patent/FR3039647B1/en
Priority to PCT/FR2016/051856 priority patent/WO2017021611A1/en
Publication of FR3039647A1 publication Critical patent/FR3039647A1/en
Application granted granted Critical
Publication of FR3039647B1 publication Critical patent/FR3039647B1/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N2001/028—Sampling from a surface, swabbing, vaporising
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
    • G01N2021/945—Liquid or solid deposits of macroscopic size on surfaces, e.g. drops, films, or clustered contaminants

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

L'invention concerne une méthode d'analyse d'impuretés organiques (3) à la surface d'un substrat, comprenant les étapes suivantes : • fournir un substrat comportant une première face principale, • fournir un film polymère (2) ayant un module d'Young inférieur à 3GPa, • appliquer le film polymère (2) contre la première face principale du substrat pour récupérer des impuretés organiques (3) présentes sur la première face principale, • analyser le film polymère par Spectroscopie Infrarouge à Transformée de Fourier, de sorte à obtenir un spectre de Fourier, • déterminer la composition chimique des impuretés organiques (3) présentes à la surface du film polymère (2) à partir de la comparaison entre le spectre de Fourier et un spectre de Fourier de référence. L'invention concerne également un dispositif de collecte (10) d'impuretés organiques (3) à la surface d'un substrat.The invention relates to a method for analyzing organic impurities (3) on the surface of a substrate, comprising the following steps: • providing a substrate having a first main face, • providing a polymer film (2) having a modulus Young's lower than 3GPa, • apply the polymer film (2) against the first main face of the substrate to recover organic impurities (3) present on the first main face, • analyze the polymer film by Fourier Transform Infrared Spectroscopy, so as to obtain a Fourier spectrum, • determine the chemical composition of the organic impurities (3) present at the surface of the polymer film (2) from the comparison between the Fourier spectrum and a reference Fourier spectrum. The invention also relates to a device (10) for collecting organic impurities (3) from the surface of a substrate.

FR1557434A 2015-07-31 2015-07-31 PROCESS FOR ANALYSIS OF ORGANIC IMPURITIES PRESENT ON THE SURFACE OF A SUBSTRATE, AND DEVICE FOR COLLECTING ORGANIC IMPURITIES ON THE SURFACE OF A SUBSTRATE Expired - Fee Related FR3039647B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR1557434A FR3039647B1 (en) 2015-07-31 2015-07-31 PROCESS FOR ANALYSIS OF ORGANIC IMPURITIES PRESENT ON THE SURFACE OF A SUBSTRATE, AND DEVICE FOR COLLECTING ORGANIC IMPURITIES ON THE SURFACE OF A SUBSTRATE
PCT/FR2016/051856 WO2017021611A1 (en) 2015-07-31 2016-07-19 Method for analysing organic impurities on the surface of a substrate, and system for analysing organic impurities on the surface of a substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1557434A FR3039647B1 (en) 2015-07-31 2015-07-31 PROCESS FOR ANALYSIS OF ORGANIC IMPURITIES PRESENT ON THE SURFACE OF A SUBSTRATE, AND DEVICE FOR COLLECTING ORGANIC IMPURITIES ON THE SURFACE OF A SUBSTRATE

Publications (2)

Publication Number Publication Date
FR3039647A1 FR3039647A1 (en) 2017-02-03
FR3039647B1 true FR3039647B1 (en) 2020-11-13

Family

ID=54707908

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1557434A Expired - Fee Related FR3039647B1 (en) 2015-07-31 2015-07-31 PROCESS FOR ANALYSIS OF ORGANIC IMPURITIES PRESENT ON THE SURFACE OF A SUBSTRATE, AND DEVICE FOR COLLECTING ORGANIC IMPURITIES ON THE SURFACE OF A SUBSTRATE

Country Status (2)

Country Link
FR (1) FR3039647B1 (en)
WO (1) WO2017021611A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10157801B2 (en) * 2016-01-04 2018-12-18 Taiwan Semiconductor Manufacturing Company, Ltd. Detecting the cleanness of wafer after post-CMP cleaning
CN109540915B (en) * 2018-11-19 2021-03-23 温州大学 Cleaning machine cleaning detection method based on laser ranging
AT523187A1 (en) 2019-11-28 2021-06-15 Anton Paar Gmbh Determination of an impairment of an optical surface for IR spectroscopy

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5902678A (en) * 1997-04-01 1999-05-11 Nitto Denko Corporation Pressure-sensitive adhesive or pressure-sensitive adhesive tape for foreign-matter removal
US6507393B2 (en) * 1999-05-12 2003-01-14 John Samuel Batchelder Surface cleaning and particle counting
US6449035B1 (en) * 1999-05-12 2002-09-10 John Samuel Batchelder Method and apparatus for surface particle detection
US6697152B2 (en) * 1999-05-12 2004-02-24 John Samuel Batchelder Surface cleaning and particle counting
US6397690B1 (en) * 2000-09-26 2002-06-04 General Electric Company Tools for measuring surface cleanliness
US6908773B2 (en) * 2002-03-19 2005-06-21 Taiwan Semiconductor Manufacturing Co., Ltd. ATR-FTIR metal surface cleanliness monitoring
US7514268B2 (en) * 2003-11-24 2009-04-07 The Boeing Company Method for identifying contaminants
DE102010040069A1 (en) * 2010-08-31 2012-03-01 GLOBALFOUNDRIES Dresden Module One Ltd. Liability Company & Co. KG Method and system for extracting samples after structuring of microstructure devices
CN104204954B (en) * 2012-04-02 2016-05-11 Asml荷兰有限公司 Fume measuring method and device

Also Published As

Publication number Publication date
WO2017021611A1 (en) 2017-02-09
FR3039647A1 (en) 2017-02-03

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