FR3033063B1 - Procede de calcul numerique de la diffraction d'une structure - Google Patents

Procede de calcul numerique de la diffraction d'une structure

Info

Publication number
FR3033063B1
FR3033063B1 FR1551589A FR1551589A FR3033063B1 FR 3033063 B1 FR3033063 B1 FR 3033063B1 FR 1551589 A FR1551589 A FR 1551589A FR 1551589 A FR1551589 A FR 1551589A FR 3033063 B1 FR3033063 B1 FR 3033063B1
Authority
FR
France
Prior art keywords
diffraction
digital calculation
calculation
digital
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1551589A
Other languages
English (en)
Other versions
FR3033063A1 (fr
Inventor
Alexandre Tishchenko
Wolfgang Iff
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Universite Jean Monnet Saint Etienne
Original Assignee
Centre National de la Recherche Scientifique CNRS
Universite Jean Monnet Saint Etienne
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS, Universite Jean Monnet Saint Etienne filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR1551589A priority Critical patent/FR3033063B1/fr
Priority to US15/552,951 priority patent/US20180046087A1/en
Priority to PCT/FR2016/050408 priority patent/WO2016135406A1/fr
Priority to EP16714972.3A priority patent/EP3262466A1/fr
Publication of FR3033063A1 publication Critical patent/FR3033063A1/fr
Application granted granted Critical
Publication of FR3033063B1 publication Critical patent/FR3033063B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/7015—Details of optical elements
    • G03F7/70158—Diffractive optical elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70316—Details of optical elements, e.g. of Bragg reflectors, extreme ultraviolet [EUV] multilayer or bilayer mirrors or diffractive optical elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
    • G03F7/705—Modelling or simulating from physical phenomena up to complete wafer processes or whole workflow in wafer productions
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F17/00—Digital computing or data processing equipment or methods, specially adapted for specific functions
    • G06F17/10—Complex mathematical operations
    • G06F17/11—Complex mathematical operations for solving equations, e.g. nonlinear equations, general mathematical optimization problems
    • G06F17/12—Simultaneous equations, e.g. systems of linear equations
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/7095—Materials, e.g. materials for housing, stage or other support having particular properties, e.g. weight, strength, conductivity, thermal expansion coefficient
    • G03F7/70958—Optical materials or coatings, e.g. with particular transmittance, reflectance or anti-reflection properties

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Computational Mathematics (AREA)
  • Mathematical Analysis (AREA)
  • Mathematical Optimization (AREA)
  • Pure & Applied Mathematics (AREA)
  • Data Mining & Analysis (AREA)
  • Theoretical Computer Science (AREA)
  • Operations Research (AREA)
  • Databases & Information Systems (AREA)
  • Software Systems (AREA)
  • General Engineering & Computer Science (AREA)
  • Algebra (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
FR1551589A 2015-02-24 2015-02-24 Procede de calcul numerique de la diffraction d'une structure Expired - Fee Related FR3033063B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR1551589A FR3033063B1 (fr) 2015-02-24 2015-02-24 Procede de calcul numerique de la diffraction d'une structure
US15/552,951 US20180046087A1 (en) 2015-02-24 2016-02-22 Numerical calculation of the diffraction of a structure
PCT/FR2016/050408 WO2016135406A1 (fr) 2015-02-24 2016-02-22 Procédé de calcul numérique de la diffraction d'une structure
EP16714972.3A EP3262466A1 (fr) 2015-02-24 2016-02-22 Procédé de calcul numérique de la diffraction d'une structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1551589A FR3033063B1 (fr) 2015-02-24 2015-02-24 Procede de calcul numerique de la diffraction d'une structure

Publications (2)

Publication Number Publication Date
FR3033063A1 FR3033063A1 (fr) 2016-08-26
FR3033063B1 true FR3033063B1 (fr) 2017-03-10

Family

ID=53776692

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1551589A Expired - Fee Related FR3033063B1 (fr) 2015-02-24 2015-02-24 Procede de calcul numerique de la diffraction d'une structure

Country Status (4)

Country Link
US (1) US20180046087A1 (fr)
EP (1) EP3262466A1 (fr)
FR (1) FR3033063B1 (fr)
WO (1) WO2016135406A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018213127A1 (de) * 2018-08-06 2020-02-06 Carl Zeiss Smt Gmbh Anordnung und Verfahren zur Charakterisierung einer Maske oder eines Wafers für die Mikrolithographie
CN113343182B (zh) * 2021-06-30 2024-04-02 上海精测半导体技术有限公司 理论光谱数据的优化方法、系统、电子设备及测量方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6898537B1 (en) * 2001-04-27 2005-05-24 Nanometrics Incorporated Measurement of diffracting structures using one-half of the non-zero diffracted orders
US20070153274A1 (en) * 2005-12-30 2007-07-05 Asml Netherlands B.V. Optical metrology system and metrology mark characterization device
US8731882B2 (en) 2009-09-24 2014-05-20 Asml Netherlands B.V. Methods and apparatus for modeling electromagnetic scattering properties of microscopic structures and methods and apparatus for reconstruction of microscopic structures

Also Published As

Publication number Publication date
WO2016135406A1 (fr) 2016-09-01
FR3033063A1 (fr) 2016-08-26
EP3262466A1 (fr) 2018-01-03
US20180046087A1 (en) 2018-02-15

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