FR3032899B1 - Dispositif de decoupe par fil comportant un systeme de lubrification par aspersion du fil et un systeme de nettoyage par aspersion du fil - Google Patents

Dispositif de decoupe par fil comportant un systeme de lubrification par aspersion du fil et un systeme de nettoyage par aspersion du fil

Info

Publication number
FR3032899B1
FR3032899B1 FR1551524A FR1551524A FR3032899B1 FR 3032899 B1 FR3032899 B1 FR 3032899B1 FR 1551524 A FR1551524 A FR 1551524A FR 1551524 A FR1551524 A FR 1551524A FR 3032899 B1 FR3032899 B1 FR 3032899B1
Authority
FR
France
Prior art keywords
wire
cutting device
spray lubrication
cleaning system
lubrication system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1551524A
Other languages
English (en)
Other versions
FR3032899A1 (fr
Inventor
Nicolas Velet
Jean-Daniel Penot
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA, Commissariat a lEnergie Atomique et aux Energies Alternatives CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR1551524A priority Critical patent/FR3032899B1/fr
Priority to PCT/EP2016/053681 priority patent/WO2016135102A1/fr
Publication of FR3032899A1 publication Critical patent/FR3032899A1/fr
Application granted granted Critical
Publication of FR3032899B1 publication Critical patent/FR3032899B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0076—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
FR1551524A 2015-02-23 2015-02-23 Dispositif de decoupe par fil comportant un systeme de lubrification par aspersion du fil et un systeme de nettoyage par aspersion du fil Expired - Fee Related FR3032899B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR1551524A FR3032899B1 (fr) 2015-02-23 2015-02-23 Dispositif de decoupe par fil comportant un systeme de lubrification par aspersion du fil et un systeme de nettoyage par aspersion du fil
PCT/EP2016/053681 WO2016135102A1 (fr) 2015-02-23 2016-02-22 Dispositif de découpe par fil comportant un système de lubrification par aspersion du fil et un système de nettoyage par aspersion du fil

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1551524A FR3032899B1 (fr) 2015-02-23 2015-02-23 Dispositif de decoupe par fil comportant un systeme de lubrification par aspersion du fil et un systeme de nettoyage par aspersion du fil

Publications (2)

Publication Number Publication Date
FR3032899A1 FR3032899A1 (fr) 2016-08-26
FR3032899B1 true FR3032899B1 (fr) 2017-03-31

Family

ID=52991800

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1551524A Expired - Fee Related FR3032899B1 (fr) 2015-02-23 2015-02-23 Dispositif de decoupe par fil comportant un systeme de lubrification par aspersion du fil et un systeme de nettoyage par aspersion du fil

Country Status (2)

Country Link
FR (1) FR3032899B1 (fr)
WO (1) WO2016135102A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113601741B (zh) * 2021-08-09 2023-06-23 西安奕斯伟硅片技术有限公司 为切割硅棒的多条切割线供应砂浆的装置及硅棒切割设备
CN116587451B (zh) * 2023-06-21 2024-01-26 苏州博宏源机械制造有限公司 一种半导体晶圆材料加工装置及方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1203966C (zh) * 2001-10-17 2005-06-01 株式会社新王磁材 使用线状锯的切断方法和线状锯装置以及稀土类磁体的制造方法
KR20100093877A (ko) * 2009-02-17 2010-08-26 네오세미테크 주식회사 웨이퍼 절단용 와이어 쏘 시스템에서, 사용 후 와이어 보빈챔버로 회수되는 와이어에 묻은 슬러리 자동 제거용 오일 커튼 방식 시스템
DE102010049472A1 (de) * 2009-10-27 2011-06-09 Meyer Burger Ag Drahtsäge mit Drahtfeld und Abziehleiste
WO2011050945A1 (fr) * 2009-10-28 2011-05-05 Meyer Burger Ag Scie à fil comprenant une zone de fil et des buses de nettoyage
DE102012201938B4 (de) * 2012-02-09 2015-03-05 Siltronic Ag Verfahren zum gleichzeitigen Trennen einer Vielzahl von Scheiben von einem Werkstück

Also Published As

Publication number Publication date
WO2016135102A1 (fr) 2016-09-01
FR3032899A1 (fr) 2016-08-26

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