FR3032791B1 - Capteur de pression miniature a membrane metallique et procede de fabrication - Google Patents

Capteur de pression miniature a membrane metallique et procede de fabrication Download PDF

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Publication number
FR3032791B1
FR3032791B1 FR1551368A FR1551368A FR3032791B1 FR 3032791 B1 FR3032791 B1 FR 3032791B1 FR 1551368 A FR1551368 A FR 1551368A FR 1551368 A FR1551368 A FR 1551368A FR 3032791 B1 FR3032791 B1 FR 3032791B1
Authority
FR
France
Prior art keywords
manufacturing
same
pressure sensor
metal membrane
membrane pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1551368A
Other languages
English (en)
Other versions
FR3032791A1 (fr
Inventor
Fabien LEMERY
Stephane Jourdan
David CAYEZ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lessor Francais Electronique
Original Assignee
Lessor Francais Electronique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lessor Francais Electronique filed Critical Lessor Francais Electronique
Priority to FR1551368A priority Critical patent/FR3032791B1/fr
Priority to US15/046,244 priority patent/US10060812B2/en
Publication of FR3032791A1 publication Critical patent/FR3032791A1/fr
Application granted granted Critical
Publication of FR3032791B1 publication Critical patent/FR3032791B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0681—Protection against excessive heat
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/142—Multiple part housings
    • G01L19/143—Two part housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
FR1551368A 2015-02-18 2015-02-18 Capteur de pression miniature a membrane metallique et procede de fabrication Active FR3032791B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR1551368A FR3032791B1 (fr) 2015-02-18 2015-02-18 Capteur de pression miniature a membrane metallique et procede de fabrication
US15/046,244 US10060812B2 (en) 2015-02-18 2016-02-17 Miniature pressure sensor having a metallic membrane for measuring a pressure of a fluid

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1551368 2015-02-18
FR1551368A FR3032791B1 (fr) 2015-02-18 2015-02-18 Capteur de pression miniature a membrane metallique et procede de fabrication

Publications (2)

Publication Number Publication Date
FR3032791A1 FR3032791A1 (fr) 2016-08-19
FR3032791B1 true FR3032791B1 (fr) 2018-09-07

Family

ID=52808052

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1551368A Active FR3032791B1 (fr) 2015-02-18 2015-02-18 Capteur de pression miniature a membrane metallique et procede de fabrication

Country Status (2)

Country Link
US (1) US10060812B2 (fr)
FR (1) FR3032791B1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6340734B2 (ja) * 2015-09-18 2018-06-13 Smc株式会社 圧力センサ
US10959800B2 (en) * 2016-11-08 2021-03-30 Covidien Lp Force sensors for surgical devices to prevent ingress of fluids
DE102017212866A1 (de) * 2017-07-26 2019-01-31 Robert Bosch Gmbh Drucksensoranordnung, Messvorrichtung und Verfahren zu deren Herstellung
IT201700103447A1 (it) * 2017-09-15 2019-03-15 Kolektor Microtel S P A Sensore di pressione ceramico
FR3086058B1 (fr) * 2018-09-18 2021-10-22 Arianegroup Sas Capteur de pression miniaturise
DE102020214384A1 (de) * 2020-11-17 2022-05-19 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren zum Herstellen eines Sensors sowie Sensor

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH455327A (de) * 1967-06-01 1968-06-28 Kistler Instrumente Ag Piezoresistives Druck- und Kraftmesselement
US4295116A (en) * 1979-12-05 1981-10-13 Bofors America, Inc. Pressure transducer
US6387318B1 (en) * 1997-12-05 2002-05-14 Alliedsignal, Inc. Glass-ceramic pressure sensor support base and its fabrication
US7302856B2 (en) * 2003-05-07 2007-12-04 California Institute Of Technology Strain sensors based on nanowire piezoresistor wires and arrays
US7434476B2 (en) * 2003-05-07 2008-10-14 Califronia Institute Of Technology Metallic thin film piezoresistive transduction in micromechanical and nanomechanical devices and its application in self-sensing SPM probes
JP5009505B2 (ja) * 2004-03-03 2012-08-22 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング ダイヤフラムを備えたマイクロマシニング型の構成エレメントおよびこのような構成エレメントを製作するための方法
JP2006030068A (ja) * 2004-07-20 2006-02-02 Denso Corp 圧力センサ
US7201057B2 (en) * 2004-09-30 2007-04-10 Mks Instruments, Inc. High-temperature reduced size manometer
WO2007047762A2 (fr) * 2005-10-14 2007-04-26 P-Inc. Holdings, Llc Capteur sensible a la pression
US7451653B1 (en) * 2005-11-22 2008-11-18 Sippola Clayton B Pressure sensor
FR2897937B1 (fr) * 2006-02-24 2008-05-23 Commissariat Energie Atomique Capteur de pression a jauges resistives
US9562814B2 (en) * 2011-06-07 2017-02-07 Jawaharlal Nehru Centre For Advanced Scientific Research Manufacturing strain sensitive sensors and/or strain resistant conduits from a metal and carbon matrix
JP2013134212A (ja) * 2011-12-27 2013-07-08 Horiba Stec Co Ltd 静電容量型測定装置

Also Published As

Publication number Publication date
US20160238477A1 (en) 2016-08-18
US10060812B2 (en) 2018-08-28
FR3032791A1 (fr) 2016-08-19

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