CH455327A - Piezoresistives Druck- und Kraftmesselement - Google Patents

Piezoresistives Druck- und Kraftmesselement

Info

Publication number
CH455327A
CH455327A CH778467A CH778467A CH455327A CH 455327 A CH455327 A CH 455327A CH 778467 A CH778467 A CH 778467A CH 778467 A CH778467 A CH 778467A CH 455327 A CH455327 A CH 455327A
Authority
CH
Switzerland
Prior art keywords
measuring element
force measuring
piezoresistive pressure
piezoresistive
pressure
Prior art date
Application number
CH778467A
Other languages
English (en)
Inventor
Conrad Dipl-Ing Sonderegg Hans
W Huegli Hans
Original Assignee
Kistler Instrumente Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kistler Instrumente Ag filed Critical Kistler Instrumente Ag
Priority to CH778467A priority Critical patent/CH455327A/de
Priority to DE19681773365 priority patent/DE1773365B1/de
Priority to AT481568A priority patent/AT279213B/de
Priority to GB25448/68A priority patent/GB1195502A/en
Priority to US734646A priority patent/US3568124A/en
Publication of CH455327A publication Critical patent/CH455327A/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/142—Multiple part housings
    • G01L19/143—Two part housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
CH778467A 1967-06-01 1967-06-01 Piezoresistives Druck- und Kraftmesselement CH455327A (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CH778467A CH455327A (de) 1967-06-01 1967-06-01 Piezoresistives Druck- und Kraftmesselement
DE19681773365 DE1773365B1 (de) 1967-06-01 1968-05-07 Piezoresistive einbauelemente fuer druck und kraftmessung
AT481568A AT279213B (de) 1967-06-01 1968-05-20 Druckempfindliches elektrisches Widerstandselement für Druck- und Kraftmessung
GB25448/68A GB1195502A (en) 1967-06-01 1968-05-28 Piezo-Resistive Force- and Pressure Measuring Element
US734646A US3568124A (en) 1967-06-01 1968-05-31 Piezoresistive force- and pressure-measuring element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH778467A CH455327A (de) 1967-06-01 1967-06-01 Piezoresistives Druck- und Kraftmesselement

Publications (1)

Publication Number Publication Date
CH455327A true CH455327A (de) 1968-06-28

Family

ID=4330410

Family Applications (1)

Application Number Title Priority Date Filing Date
CH778467A CH455327A (de) 1967-06-01 1967-06-01 Piezoresistives Druck- und Kraftmesselement

Country Status (5)

Country Link
US (1) US3568124A (de)
AT (1) AT279213B (de)
CH (1) CH455327A (de)
DE (1) DE1773365B1 (de)
GB (1) GB1195502A (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1208382A (en) * 1968-03-23 1970-10-14 Ferranti Ltd Improvements relating to semiconductor strain transducers
US3697917A (en) * 1971-08-02 1972-10-10 Gen Electric Semiconductor strain gage pressure transducer
US3758830A (en) * 1972-04-10 1973-09-11 Hewlett Packard Co Transducer formed in peripherally supported thin semiconductor web
NL7415668A (nl) * 1974-12-02 1976-06-04 Philips Nv Drukopnemer.
US4063209A (en) * 1975-05-01 1977-12-13 Kulite Semiconductor Products, Inc. Integral transducer assemblies employing built-in pressure limiting
US4093933A (en) * 1976-05-14 1978-06-06 Becton, Dickinson Electronics Company Sculptured pressure diaphragm
US4064758A (en) * 1976-10-13 1977-12-27 Micron Instruments Pressure transducer structure
US4376929A (en) * 1976-12-27 1983-03-15 Myhre Kjell E Optimized stress and strain distribution diaphragms
US4216404A (en) * 1979-04-12 1980-08-05 Kulite Semiconductor Products Inc. Housing and lead arrangements for electromechanical transducers
US4412203A (en) * 1981-09-10 1983-10-25 Kulite Semiconductor Products, Inc. Housing and interconnection assembly for a pressure transducer
EP1099095A4 (de) * 1998-07-22 2004-07-28 Ssi Technologies Inc Sensoranordnung mit schwimmender verbinder
US7536919B2 (en) * 2003-12-05 2009-05-26 The Commonwealth Of Australia - Department Of Defence Strain gauge
EP2013597B1 (de) * 2006-05-04 2010-04-21 Kistler Holding AG Piezoelektrisches messelement mit transversaleffekt und sensor, umfassend ein solches messelement
CN102023065B (zh) * 2009-09-11 2016-04-13 北京京东方光电科技有限公司 用于检测液晶面板生产中毛刷压入量的接触力测量基板
FR3016038B1 (fr) * 2013-12-31 2016-11-04 Valeo Systemes De Controle Moteur Dispositif de mesure de pression
FR3032791B1 (fr) 2015-02-18 2018-09-07 L'essor Francais Electronique Capteur de pression miniature a membrane metallique et procede de fabrication

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3389362A (en) * 1965-10-22 1968-06-18 Electro Optical Systems Inc Low pressure transducer
US3417361A (en) * 1966-03-07 1968-12-17 Conrac Corp Semiconductive pressure transducer
US3457536A (en) * 1967-04-28 1969-07-22 Us Navy Subminiature pressure transducer

Also Published As

Publication number Publication date
AT279213B (de) 1970-02-25
US3568124A (en) 1971-03-02
GB1195502A (en) 1970-06-17
DE1773365B1 (de) 1972-03-16

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