FR3031183B1 - METHOD AND DEVICE FOR LASER CHECKING THE CONDITION OF A SURFACE - Google Patents

METHOD AND DEVICE FOR LASER CHECKING THE CONDITION OF A SURFACE Download PDF

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Publication number
FR3031183B1
FR3031183B1 FR1403056A FR1403056A FR3031183B1 FR 3031183 B1 FR3031183 B1 FR 3031183B1 FR 1403056 A FR1403056 A FR 1403056A FR 1403056 A FR1403056 A FR 1403056A FR 3031183 B1 FR3031183 B1 FR 3031183B1
Authority
FR
France
Prior art keywords
condition
laser checking
checking
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1403056A
Other languages
French (fr)
Other versions
FR3031183A1 (en
Inventor
Herve Haag
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Airbus Defence and Space SAS
ArianeGroup SAS
Original Assignee
Airbus Defence and Space SAS
ArianeGroup SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Airbus Defence and Space SAS, ArianeGroup SAS filed Critical Airbus Defence and Space SAS
Priority to FR1403056A priority Critical patent/FR3031183B1/en
Priority to PCT/FR2015/000241 priority patent/WO2016107994A1/en
Publication of FR3031183A1 publication Critical patent/FR3031183A1/en
Application granted granted Critical
Publication of FR3031183B1 publication Critical patent/FR3031183B1/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06Systems determining position data of a target
    • G01S17/08Systems determining position data of a target for measuring distance only
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8806Specially adapted optical and illumination features
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8851Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88Lidar systems specially adapted for specific applications
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481Constructional features, e.g. arrangements of optical elements
    • G01S7/4811Constructional features, e.g. arrangements of optical elements common to transmitter and receiver
    • G01S7/4812Constructional features, e.g. arrangements of optical elements common to transmitter and receiver transmitted and received beams following a coaxial path
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00Features of devices classified in G01N21/00
    • G01N2201/10Scanning

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Electromagnetism (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Signal Processing (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Length Measuring Devices By Optical Means (AREA)
FR1403056A 2014-12-31 2014-12-31 METHOD AND DEVICE FOR LASER CHECKING THE CONDITION OF A SURFACE Expired - Fee Related FR3031183B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR1403056A FR3031183B1 (en) 2014-12-31 2014-12-31 METHOD AND DEVICE FOR LASER CHECKING THE CONDITION OF A SURFACE
PCT/FR2015/000241 WO2016107994A1 (en) 2014-12-31 2015-12-23 Method and device for the laser control of the state of a surface

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1403056 2014-12-31
FR1403056A FR3031183B1 (en) 2014-12-31 2014-12-31 METHOD AND DEVICE FOR LASER CHECKING THE CONDITION OF A SURFACE

Publications (2)

Publication Number Publication Date
FR3031183A1 FR3031183A1 (en) 2016-07-01
FR3031183B1 true FR3031183B1 (en) 2018-01-26

Family

ID=53269528

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1403056A Expired - Fee Related FR3031183B1 (en) 2014-12-31 2014-12-31 METHOD AND DEVICE FOR LASER CHECKING THE CONDITION OF A SURFACE

Country Status (2)

Country Link
FR (1) FR3031183B1 (en)
WO (1) WO2016107994A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7129067B2 (en) 2018-03-27 2022-09-01 国立研究開発法人量子科学技術研究開発機構 Measuring device, measuring system, moving object, and measuring method

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1108254B (en) 1978-10-24 1985-12-02 Fiat Spa PROCEDURE AND DEVICE FOR THE LEVELING OF SURFACE DEFECTS OF A PIECE WHICH HAS BEEN SUBJECTED TO A MECHANICAL PROCESSING
JPS6350736A (en) * 1986-08-21 1988-03-03 Mitsubishi Metal Corp Apparatus for inspecting surface contamination
DE19911419A1 (en) * 1998-03-16 1999-10-14 Cyberoptics Corp Area sensor for determining dimensions of object having varying profile and degree of reflection
DE10024687A1 (en) * 2000-05-18 2001-11-22 Zeiss Carl Jena Gmbh Autofocus unit for e.g. semiconductor wafer inspection microscope, includes e.g. diaphragms with complementary structures straddling conjugate point of illuminant
US7136159B2 (en) * 2000-09-12 2006-11-14 Kla-Tencor Technologies Corporation Excimer laser inspection system
US9022037B2 (en) * 2003-08-11 2015-05-05 Raydiance, Inc. Laser ablation method and apparatus having a feedback loop and control unit
US7345757B2 (en) * 2004-09-28 2008-03-18 Penza G Gregory Inspection apparatus for pipelines
US7620209B2 (en) * 2004-10-14 2009-11-17 Stevick Glen R Method and apparatus for dynamic space-time imaging system
US8125627B2 (en) * 2007-04-27 2012-02-28 Alakai Defense Systems, Inc. Laser spectroscopy system
US8681211B2 (en) * 2009-09-22 2014-03-25 Cyberoptics Corporation High speed optical inspection system with adaptive focusing
US20140043469A1 (en) * 2012-08-07 2014-02-13 Carl Zeiss Industrielle Messtechnik Gmbh Chromatic sensor and method
US20140132729A1 (en) * 2012-11-15 2014-05-15 Cybernet Systems Corporation Method and apparatus for camera-based 3d flaw tracking system

Also Published As

Publication number Publication date
WO2016107994A1 (en) 2016-07-07
FR3031183A1 (en) 2016-07-01

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