FR3031183B1 - METHOD AND DEVICE FOR LASER CHECKING THE CONDITION OF A SURFACE - Google Patents
METHOD AND DEVICE FOR LASER CHECKING THE CONDITION OF A SURFACE Download PDFInfo
- Publication number
- FR3031183B1 FR3031183B1 FR1403056A FR1403056A FR3031183B1 FR 3031183 B1 FR3031183 B1 FR 3031183B1 FR 1403056 A FR1403056 A FR 1403056A FR 1403056 A FR1403056 A FR 1403056A FR 3031183 B1 FR3031183 B1 FR 3031183B1
- Authority
- FR
- France
- Prior art keywords
- condition
- laser checking
- checking
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/88—Lidar systems specially adapted for specific applications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4811—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver
- G01S7/4812—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver transmitted and received beams following a coaxial path
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/10—Scanning
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Computer Networks & Wireless Communication (AREA)
- Electromagnetism (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Signal Processing (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1403056A FR3031183B1 (en) | 2014-12-31 | 2014-12-31 | METHOD AND DEVICE FOR LASER CHECKING THE CONDITION OF A SURFACE |
PCT/FR2015/000241 WO2016107994A1 (en) | 2014-12-31 | 2015-12-23 | Method and device for the laser control of the state of a surface |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1403056 | 2014-12-31 | ||
FR1403056A FR3031183B1 (en) | 2014-12-31 | 2014-12-31 | METHOD AND DEVICE FOR LASER CHECKING THE CONDITION OF A SURFACE |
Publications (2)
Publication Number | Publication Date |
---|---|
FR3031183A1 FR3031183A1 (en) | 2016-07-01 |
FR3031183B1 true FR3031183B1 (en) | 2018-01-26 |
Family
ID=53269528
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1403056A Expired - Fee Related FR3031183B1 (en) | 2014-12-31 | 2014-12-31 | METHOD AND DEVICE FOR LASER CHECKING THE CONDITION OF A SURFACE |
Country Status (2)
Country | Link |
---|---|
FR (1) | FR3031183B1 (en) |
WO (1) | WO2016107994A1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7129067B2 (en) | 2018-03-27 | 2022-09-01 | 国立研究開発法人量子科学技術研究開発機構 | Measuring device, measuring system, moving object, and measuring method |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT1108254B (en) | 1978-10-24 | 1985-12-02 | Fiat Spa | PROCEDURE AND DEVICE FOR THE LEVELING OF SURFACE DEFECTS OF A PIECE WHICH HAS BEEN SUBJECTED TO A MECHANICAL PROCESSING |
JPS6350736A (en) * | 1986-08-21 | 1988-03-03 | Mitsubishi Metal Corp | Apparatus for inspecting surface contamination |
DE19911419A1 (en) * | 1998-03-16 | 1999-10-14 | Cyberoptics Corp | Area sensor for determining dimensions of object having varying profile and degree of reflection |
DE10024687A1 (en) * | 2000-05-18 | 2001-11-22 | Zeiss Carl Jena Gmbh | Autofocus unit for e.g. semiconductor wafer inspection microscope, includes e.g. diaphragms with complementary structures straddling conjugate point of illuminant |
US7136159B2 (en) * | 2000-09-12 | 2006-11-14 | Kla-Tencor Technologies Corporation | Excimer laser inspection system |
US9022037B2 (en) * | 2003-08-11 | 2015-05-05 | Raydiance, Inc. | Laser ablation method and apparatus having a feedback loop and control unit |
US7345757B2 (en) * | 2004-09-28 | 2008-03-18 | Penza G Gregory | Inspection apparatus for pipelines |
US7620209B2 (en) * | 2004-10-14 | 2009-11-17 | Stevick Glen R | Method and apparatus for dynamic space-time imaging system |
US8125627B2 (en) * | 2007-04-27 | 2012-02-28 | Alakai Defense Systems, Inc. | Laser spectroscopy system |
US8681211B2 (en) * | 2009-09-22 | 2014-03-25 | Cyberoptics Corporation | High speed optical inspection system with adaptive focusing |
US20140043469A1 (en) * | 2012-08-07 | 2014-02-13 | Carl Zeiss Industrielle Messtechnik Gmbh | Chromatic sensor and method |
US20140132729A1 (en) * | 2012-11-15 | 2014-05-15 | Cybernet Systems Corporation | Method and apparatus for camera-based 3d flaw tracking system |
-
2014
- 2014-12-31 FR FR1403056A patent/FR3031183B1/en not_active Expired - Fee Related
-
2015
- 2015-12-23 WO PCT/FR2015/000241 patent/WO2016107994A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2016107994A1 (en) | 2016-07-07 |
FR3031183A1 (en) | 2016-07-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PLFP | Fee payment |
Year of fee payment: 2 |
|
PLSC | Search report ready |
Effective date: 20160701 |
|
PLFP | Fee payment |
Year of fee payment: 3 |
|
PLFP | Fee payment |
Year of fee payment: 4 |
|
PLFP | Fee payment |
Year of fee payment: 5 |
|
PLFP | Fee payment |
Year of fee payment: 6 |
|
ST | Notification of lapse |
Effective date: 20210806 |