FR3015026B1 - Capteur de mesure - Google Patents

Capteur de mesure

Info

Publication number
FR3015026B1
FR3015026B1 FR1362501A FR1362501A FR3015026B1 FR 3015026 B1 FR3015026 B1 FR 3015026B1 FR 1362501 A FR1362501 A FR 1362501A FR 1362501 A FR1362501 A FR 1362501A FR 3015026 B1 FR3015026 B1 FR 3015026B1
Authority
FR
France
Prior art keywords
measurement sensor
measurement
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1362501A
Other languages
English (en)
Other versions
FR3015026A1 (fr
Inventor
Olivier Gueguen
Mathieu Gronier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SC2N SAS
Original Assignee
SC2N SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR1362501A priority Critical patent/FR3015026B1/fr
Application filed by SC2N SAS filed Critical SC2N SAS
Priority to PCT/FR2014/053275 priority patent/WO2015087002A1/fr
Priority to BR112016013603A priority patent/BR112016013603A2/pt
Priority to EP14835706.4A priority patent/EP3080557B1/fr
Priority to US15/104,019 priority patent/US20170045383A1/en
Priority to CN201480075436.5A priority patent/CN106415212B/zh
Priority to JP2016539222A priority patent/JP2016540226A/ja
Publication of FR3015026A1 publication Critical patent/FR3015026A1/fr
Application granted granted Critical
Publication of FR3015026B1 publication Critical patent/FR3015026B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00261—Processes for packaging MEMS devices
    • B81C1/00309—Processes for packaging MEMS devices suitable for fluid transfer from the MEMS out of the package or vice versa, e.g. transfer of liquid, gas, sound
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
    • G01D11/24—Housings ; Casings for instruments
    • G01D11/245—Housings for sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/08—Protective devices, e.g. casings
    • G01K1/12—Protective devices, e.g. casings for preventing damage due to heat overloading
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/141—Monolithic housings, e.g. molded or one-piece housings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0264—Pressure sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K2205/00—Application of thermometers in motors, e.g. of a vehicle
    • G01K2205/04—Application of thermometers in motors, e.g. of a vehicle for measuring exhaust gas temperature

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Measuring Fluid Pressure (AREA)
FR1362501A 2013-12-12 2013-12-12 Capteur de mesure Active FR3015026B1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FR1362501A FR3015026B1 (fr) 2013-12-12 2013-12-12 Capteur de mesure
BR112016013603A BR112016013603A2 (pt) 2013-12-12 2014-12-11 Sensor de medição
EP14835706.4A EP3080557B1 (fr) 2013-12-12 2014-12-11 Capteur de mesure
US15/104,019 US20170045383A1 (en) 2013-12-12 2014-12-11 Measurement sensor
PCT/FR2014/053275 WO2015087002A1 (fr) 2013-12-12 2014-12-11 Capteur de mesure
CN201480075436.5A CN106415212B (zh) 2013-12-12 2014-12-11 测量传感器
JP2016539222A JP2016540226A (ja) 2013-12-12 2014-12-11 測定センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1362501A FR3015026B1 (fr) 2013-12-12 2013-12-12 Capteur de mesure

Publications (2)

Publication Number Publication Date
FR3015026A1 FR3015026A1 (fr) 2015-06-19
FR3015026B1 true FR3015026B1 (fr) 2016-01-29

Family

ID=50069213

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1362501A Active FR3015026B1 (fr) 2013-12-12 2013-12-12 Capteur de mesure

Country Status (1)

Country Link
FR (1) FR3015026B1 (fr)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57147027A (en) * 1981-03-06 1982-09-10 Nippon Denso Co Ltd Semiconductor pressure detector
US5948991A (en) * 1996-12-09 1999-09-07 Denso Corporation Semiconductor physical quantity sensor device having semiconductor sensor chip integrated with semiconductor circuit chip
JP2003243577A (ja) * 2002-02-18 2003-08-29 Shinko Electric Ind Co Ltd 半導体装置及びその製造方法
DE102006043323A1 (de) * 2006-09-15 2008-03-27 Robert Bosch Gmbh Drucksensor für eine Seitenaufprallsensierung und Verfahren zur Ausbildung einer Oberfläche eines Schutzmaterials für einen Drucksensor

Also Published As

Publication number Publication date
FR3015026A1 (fr) 2015-06-19

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