FR3011712B1 - Source plasma radio­frequence a couplage inductif - Google Patents

Source plasma radio­frequence a couplage inductif Download PDF

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Publication number
FR3011712B1
FR3011712B1 FR1359719A FR1359719A FR3011712B1 FR 3011712 B1 FR3011712 B1 FR 3011712B1 FR 1359719 A FR1359719 A FR 1359719A FR 1359719 A FR1359719 A FR 1359719A FR 3011712 B1 FR3011712 B1 FR 3011712B1
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France
Prior art keywords
plasma source
diffuser
generator
cavity
characteristic
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FR1359719A
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English (en)
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FR3011712A1 (fr
Inventor
Pierre Bouchaib
Phannara Aing
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Riber SA
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Riber SA
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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H05H1/4645—Radiofrequency discharges
    • H05H1/4652—Radiofrequency discharges using inductive coupling means, e.g. coils

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Chemical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

La présente invention concerne une source plasma (120) radio-fréquence à couplage inductif comportant un générateur (124) radio-fréquence adapté à délivrer une puissance (PRF) radio-fréquence à une bobine (126) inductive alimentée par ledit générateur grâce à des moyens d'amenée de courant, ladite bobine étant enroulée autour d'une cavité (127) à plasma de forme sensiblement cylindrique qui contient un gaz à ioniser et qui présente, selon une direction parallèle à une génératrice, une dimension longitudinale (L) caractéristique, et dans sa section, une dimension transversale (D) caractéristique, ladite cavité à plasma comprenant, d'une part, des moyens d'alimentation en gaz, et, d'autre part, un diffuseur (123A) percé d'une pluralité de trous traversants (123B) et destiné à générer un flux (120A) d'espèces atomiques ou moléculaires réactives. Selon l'invention, la source plasma est caractérisée en ce que : - le rapport dimensionnel (R) de ladite cavité à plasma, à savoir le rapport entre ladite dimension transversale caractéristique et ladite dimension longitudinale caractéristique de la cavité, est compris entre 0,45 et 2, et - la transparence (T) du diffuseur, à savoir le rapport entre la surface totale (STH) desdits trous traversants et la surface utile (Su) du diffuseur, est supérieure à 4%.
FR1359719A 2013-10-07 2013-10-07 Source plasma radio­frequence a couplage inductif Active FR3011712B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR1359719A FR3011712B1 (fr) 2013-10-07 2013-10-07 Source plasma radio­frequence a couplage inductif

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1359719A FR3011712B1 (fr) 2013-10-07 2013-10-07 Source plasma radio­frequence a couplage inductif

Publications (2)

Publication Number Publication Date
FR3011712A1 FR3011712A1 (fr) 2015-04-10
FR3011712B1 true FR3011712B1 (fr) 2023-09-01

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ID=49998408

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1359719A Active FR3011712B1 (fr) 2013-10-07 2013-10-07 Source plasma radio­frequence a couplage inductif

Country Status (1)

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FR (1) FR3011712B1 (fr)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR910016054A (ko) * 1990-02-23 1991-09-30 미다 가쓰시게 마이크로 전자 장치용 표면 처리 장치 및 그 방법
JP3328498B2 (ja) * 1996-02-16 2002-09-24 株式会社荏原製作所 高速原子線源
JP3948857B2 (ja) * 1999-07-14 2007-07-25 株式会社荏原製作所 ビーム源
US20080156631A1 (en) * 2006-12-27 2008-07-03 Novellus Systems, Inc. Methods of Producing Plasma in a Container
US9591738B2 (en) * 2008-04-03 2017-03-07 Novellus Systems, Inc. Plasma generator systems and methods of forming plasma

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Publication number Publication date
FR3011712A1 (fr) 2015-04-10

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