FR3005825B1 - Generateur de plasma etendu comprenant des generateurs elementaires integres - Google Patents

Generateur de plasma etendu comprenant des generateurs elementaires integres

Info

Publication number
FR3005825B1
FR3005825B1 FR1301139A FR1301139A FR3005825B1 FR 3005825 B1 FR3005825 B1 FR 3005825B1 FR 1301139 A FR1301139 A FR 1301139A FR 1301139 A FR1301139 A FR 1301139A FR 3005825 B1 FR3005825 B1 FR 3005825B1
Authority
FR
France
Prior art keywords
plasma generator
extended plasma
elementary generators
integrated elementary
integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1301139A
Other languages
English (en)
Other versions
FR3005825A1 (fr
Inventor
Jacques Pelletier
Pascal Ponard
Ana Lacoste
Alexandre Bes
Guillaume Regnard
Bernard Darges
Delphe Guy Peillex
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Thales SA
Universite Grenoble Alpes
Original Assignee
Centre National de la Recherche Scientifique CNRS
Thales SA
Universite Joseph Fourier Grenoble 1
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS, Thales SA, Universite Joseph Fourier Grenoble 1 filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR1301139A priority Critical patent/FR3005825B1/fr
Priority to PCT/EP2014/060116 priority patent/WO2014184357A1/fr
Publication of FR3005825A1 publication Critical patent/FR3005825A1/fr
Application granted granted Critical
Publication of FR3005825B1 publication Critical patent/FR3005825B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32201—Generating means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32211—Means for coupling power to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32266—Means for controlling power transmitted to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32311—Circuits specially adapted for controlling the microwave discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P5/00—Coupling devices of the waveguide type
    • H01P5/04—Coupling devices of the waveguide type with variable factor of coupling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P7/00—Resonators of the waveguide type
    • H01P7/04—Coaxial resonators
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2242/00—Auxiliary systems
    • H05H2242/20—Power circuits
    • H05H2242/26—Matching networks

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
FR1301139A 2013-05-17 2013-05-17 Generateur de plasma etendu comprenant des generateurs elementaires integres Active FR3005825B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR1301139A FR3005825B1 (fr) 2013-05-17 2013-05-17 Generateur de plasma etendu comprenant des generateurs elementaires integres
PCT/EP2014/060116 WO2014184357A1 (fr) 2013-05-17 2014-05-16 Générateur de plasma étendu comprenant des générateurs élémentaires intégrés

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1301139A FR3005825B1 (fr) 2013-05-17 2013-05-17 Generateur de plasma etendu comprenant des generateurs elementaires integres

Publications (2)

Publication Number Publication Date
FR3005825A1 FR3005825A1 (fr) 2014-11-21
FR3005825B1 true FR3005825B1 (fr) 2015-06-19

Family

ID=49510194

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1301139A Active FR3005825B1 (fr) 2013-05-17 2013-05-17 Generateur de plasma etendu comprenant des generateurs elementaires integres

Country Status (2)

Country Link
FR (1) FR3005825B1 (fr)
WO (1) WO2014184357A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3042091B1 (fr) * 2015-10-05 2017-10-27 Sairem Soc Pour L'application Ind De La Rech En Electronique Et Micro Ondes Dispositif elementaire d’application d’une energie micro-onde avec applicateur coaxial
FR3107801B1 (fr) * 2020-02-27 2022-09-23 Univ Grenoble Alpes Applicateur d’onde haute fréquence, coupleur et dispositif associés pour la production d’un plasma

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR841603A (fr) * 1938-01-27 1939-05-24 Circuit d'accord réglable
US3413577A (en) * 1966-07-28 1968-11-26 Automatic Elect Lab Absorption wavemeter
US3792385A (en) * 1972-11-06 1974-02-12 Rca Corp Coaxial magnetic slug tuner
US5210466A (en) * 1989-10-03 1993-05-11 Applied Materials, Inc. VHF/UHF reactor system
FR2671931A1 (fr) 1991-01-22 1992-07-24 Metal Process Dispositif de repartition d'une energie micro-onde pour l'excitation d'un plasma.
FR2702119B1 (fr) 1993-02-25 1995-07-13 Metal Process Dispositif d'excitation d'un plasma à la résonance cyclotronique électronique par l'intermédiaire d'un applicateur filaire d'un champ micro-onde et d'un champ magnétique statique.
FR2726729B1 (fr) 1994-11-04 1997-01-31 Metal Process Dispositif de production d'un plasma permettant une dissociation entre les zones de propagation et d'absorption des micro-ondes
FR2840451B1 (fr) * 2002-06-04 2004-08-13 Centre Nat Rech Scient Dispositif de production d'une nappe de plasma
WO2008153053A1 (fr) * 2007-06-11 2008-12-18 Tokyo Electron Limited Appareil de traitement par plasma, appareil d'alimentation électrique et procédé pour utiliser l'appareil de traitement par plasma
FR2938150B1 (fr) 2008-10-30 2010-12-17 Centre Nat Rech Scient Dispositif et procede de production et/ou de confinement d'un plasma

Also Published As

Publication number Publication date
FR3005825A1 (fr) 2014-11-21
WO2014184357A1 (fr) 2014-11-20

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Owner name: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE, FR

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Owner name: THALES, FR

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