FR2997555B1 - Reseau de connexion pour nems a agencement ameliore - Google Patents

Reseau de connexion pour nems a agencement ameliore

Info

Publication number
FR2997555B1
FR2997555B1 FR1260216A FR1260216A FR2997555B1 FR 2997555 B1 FR2997555 B1 FR 2997555B1 FR 1260216 A FR1260216 A FR 1260216A FR 1260216 A FR1260216 A FR 1260216A FR 2997555 B1 FR2997555 B1 FR 2997555B1
Authority
FR
France
Prior art keywords
nems
connection network
improved arrangement
arrangement
improved
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1260216A
Other languages
English (en)
Other versions
FR2997555A1 (fr
Inventor
Gerard Billiot
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA, Commissariat a lEnergie Atomique et aux Energies Alternatives CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR1260216A priority Critical patent/FR2997555B1/fr
Priority to US14/437,591 priority patent/US20150288301A1/en
Priority to EP13798589.1A priority patent/EP2912771A1/fr
Priority to PCT/EP2013/072443 priority patent/WO2014064273A1/fr
Publication of FR2997555A1 publication Critical patent/FR2997555A1/fr
Application granted granted Critical
Publication of FR2997555B1 publication Critical patent/FR2997555B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02259—Driving or detection means
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N11/00—Generators or motors not provided for elsewhere; Alleged perpetua mobilia obtained by electric or magnetic means
    • H02N11/002—Generators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02433—Means for compensation or elimination of undesired effects
    • H03H2009/02456—Parasitic elements or effects, e.g. parasitic capacitive coupling between input and output

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Gyroscopes (AREA)
  • Micromachines (AREA)
FR1260216A 2012-10-26 2012-10-26 Reseau de connexion pour nems a agencement ameliore Expired - Fee Related FR2997555B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR1260216A FR2997555B1 (fr) 2012-10-26 2012-10-26 Reseau de connexion pour nems a agencement ameliore
US14/437,591 US20150288301A1 (en) 2012-10-26 2013-10-25 Connection network for nems, having an improved arrangement
EP13798589.1A EP2912771A1 (fr) 2012-10-26 2013-10-25 Reseau de connexion pour nems a agencement ameliore
PCT/EP2013/072443 WO2014064273A1 (fr) 2012-10-26 2013-10-25 Reseau de connexion pour nems a agencement ameliore

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1260216A FR2997555B1 (fr) 2012-10-26 2012-10-26 Reseau de connexion pour nems a agencement ameliore

Publications (2)

Publication Number Publication Date
FR2997555A1 FR2997555A1 (fr) 2014-05-02
FR2997555B1 true FR2997555B1 (fr) 2015-01-16

Family

ID=48692526

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1260216A Expired - Fee Related FR2997555B1 (fr) 2012-10-26 2012-10-26 Reseau de connexion pour nems a agencement ameliore

Country Status (4)

Country Link
US (1) US20150288301A1 (fr)
EP (1) EP2912771A1 (fr)
FR (1) FR2997555B1 (fr)
WO (1) WO2014064273A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3030942A1 (fr) * 2014-12-22 2016-06-24 Commissariat Energie Atomique Oscillateur multi-mode permettant un suivi simultane des variations de plusieurs frequences de resonance d'un resonateur

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITTO20010157A1 (it) * 2001-02-21 2002-08-21 St Microelectronics Srl Metodo e circuito di rilevamento di spostamenti tramite sensori micro-elettro-meccanici con compensazione di capacita' parassite e di movime
US7615845B1 (en) * 2008-06-25 2009-11-10 Infineon Technologies Sensonor As Active shielding of conductors in MEMS devices
JP2012528335A (ja) * 2009-05-27 2012-11-12 キング アブドゥーラ ユニバーシティ オブ サイエンス アンド テクノロジー 面外サスペンション方式を使用するｍｅｍｓ質量−バネ−ダンパシステム

Also Published As

Publication number Publication date
EP2912771A1 (fr) 2015-09-02
US20150288301A1 (en) 2015-10-08
FR2997555A1 (fr) 2014-05-02
WO2014064273A1 (fr) 2014-05-01

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Legal Events

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Year of fee payment: 4

ST Notification of lapse

Effective date: 20170630