FR2961899B1 - Procede de fonctionnalisation des veines fluidiques contenues dans un dispositif micromecanique, dispositif micromecanique, dispositif micromecanique comprenant des veines fonctionnalisees et son procede de realisation - Google Patents

Procede de fonctionnalisation des veines fluidiques contenues dans un dispositif micromecanique, dispositif micromecanique, dispositif micromecanique comprenant des veines fonctionnalisees et son procede de realisation

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Publication number
FR2961899B1
FR2961899B1 FR1002706A FR1002706A FR2961899B1 FR 2961899 B1 FR2961899 B1 FR 2961899B1 FR 1002706 A FR1002706 A FR 1002706A FR 1002706 A FR1002706 A FR 1002706A FR 2961899 B1 FR2961899 B1 FR 2961899B1
Authority
FR
France
Prior art keywords
micromechanical device
veins
functionalizing
fluidic
functionalized
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1002706A
Other languages
English (en)
Other versions
FR2961899A1 (fr
Inventor
Vincent Agache
Antoine Hoang
Francoise Vinet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA, Commissariat a lEnergie Atomique et aux Energies Alternatives CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR1002706A priority Critical patent/FR2961899B1/fr
Priority to PCT/IB2011/052865 priority patent/WO2012001642A1/fr
Priority to US13/805,491 priority patent/US8968673B2/en
Priority to EP11738320.8A priority patent/EP2588405A1/fr
Priority to CN201180032552.5A priority patent/CN103025648B/zh
Publication of FR2961899A1 publication Critical patent/FR2961899A1/fr
Application granted granted Critical
Publication of FR2961899B1 publication Critical patent/FR2961899B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/24—Curved surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00206—Processes for functionalising a surface, e.g. provide the surface with specific mechanical, chemical or biological properties
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/006—Micropumps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0214—Biosensors; Chemical sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/05—Microfluidics
    • B81B2201/058—Microfluidics not provided for in B81B2201/051 - B81B2201/054
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/06—Bio-MEMS
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0147—Film patterning
    • B81C2201/0154—Film patterning other processes for film patterning not provided for in B81C2201/0149 - B81C2201/015

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Molecular Biology (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Micromachines (AREA)
FR1002706A 2010-06-29 2010-06-29 Procede de fonctionnalisation des veines fluidiques contenues dans un dispositif micromecanique, dispositif micromecanique, dispositif micromecanique comprenant des veines fonctionnalisees et son procede de realisation Active FR2961899B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR1002706A FR2961899B1 (fr) 2010-06-29 2010-06-29 Procede de fonctionnalisation des veines fluidiques contenues dans un dispositif micromecanique, dispositif micromecanique, dispositif micromecanique comprenant des veines fonctionnalisees et son procede de realisation
PCT/IB2011/052865 WO2012001642A1 (fr) 2010-06-29 2011-06-29 Procede de fonctionnalisation des veines fluidiques contenues dans un dispositif micromecanique, dispositif micromecanique comprenant des veines fonctionnalisees et son procede de realisation
US13/805,491 US8968673B2 (en) 2010-06-29 2011-06-29 Method for functionalising fluid lines contained in a micromechanical device, micromechanical device including functionalised lines, and method for manufacturing same
EP11738320.8A EP2588405A1 (fr) 2010-06-29 2011-06-29 Procede de fonctionnalisation des veines fluidiques contenues dans un dispositif micromecanique, dispositif micromecanique comprenant des veines fonctionnalisees et son procede de realisation
CN201180032552.5A CN103025648B (zh) 2010-06-29 2011-06-29 功能化微机械器件中所含流体管道的方法、含其的微机械器件及其制造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1002706A FR2961899B1 (fr) 2010-06-29 2010-06-29 Procede de fonctionnalisation des veines fluidiques contenues dans un dispositif micromecanique, dispositif micromecanique, dispositif micromecanique comprenant des veines fonctionnalisees et son procede de realisation

Publications (2)

Publication Number Publication Date
FR2961899A1 FR2961899A1 (fr) 2011-12-30
FR2961899B1 true FR2961899B1 (fr) 2013-03-29

Family

ID=43827678

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1002706A Active FR2961899B1 (fr) 2010-06-29 2010-06-29 Procede de fonctionnalisation des veines fluidiques contenues dans un dispositif micromecanique, dispositif micromecanique, dispositif micromecanique comprenant des veines fonctionnalisees et son procede de realisation

Country Status (5)

Country Link
US (1) US8968673B2 (fr)
EP (1) EP2588405A1 (fr)
CN (1) CN103025648B (fr)
FR (1) FR2961899B1 (fr)
WO (1) WO2012001642A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103382016B (zh) * 2012-05-02 2015-11-04 台湾积体电路制造股份有限公司 采用集成封装件的BioMEMS和平面光电路
ITTO20130539A1 (it) 2013-06-28 2014-12-29 Stmicroelectronics International N V Dispositivo mems incorporante un percorso fluidico e relativo procedimento di fabbricazione
WO2017156127A1 (fr) * 2016-03-11 2017-09-14 Qorvo Us, Inc. Dispositif fluidique de capteur baw à plage de mesure dynamique augmentée

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3938982B2 (ja) * 1997-08-29 2007-06-27 オリンパス株式会社 Ｄｎａキャピラリィ
US7148058B2 (en) * 2000-06-05 2006-12-12 Chiron Corporation Protein microarrays on mirrored surfaces for performing proteomic analyses
WO2002089972A1 (fr) * 2001-05-03 2002-11-14 Commissariat A L'energie Atomique Dispositif microfluidique destine a l'analyse d'acides nucleiques et/ou de proteines, ses procedes de preparation et son utilisation
US20030219196A1 (en) * 2002-05-22 2003-11-27 Tsu-Chien Weng Microarray system and method of use thereof
US7332273B2 (en) * 2002-06-20 2008-02-19 Affymetrix, Inc. Antireflective coatings for high-resolution photolithographic synthesis of DNA arrays
FR2873697B1 (fr) 2004-07-28 2006-10-27 Commissariat Energie Atomique Agents de couplage a groupement protecteur photolabile et leurs utilisations, notamment pour la fonctionnalisation de supports solides
US9096953B2 (en) * 2006-09-29 2015-08-04 Intel Corporation Method for high throughput, high volume manufacturing of biomolecule micro arrays
FR2931549B1 (fr) * 2008-05-20 2017-12-08 Commissariat A L'energie Atomique Dispositif pour la detection gravimetrique de particules en milieu fluide, comprenant un oscillateur traverse par une veine fluidique, procede de realisation et methode de mise en oeuvre du dispositif
FR2931550B1 (fr) * 2008-05-20 2012-12-07 Commissariat Energie Atomique Dispositif pour la detection gravimetrique de particules en milieu fluide comprenant un oscillateur entre deux canaux fluidiques, procede de realisation et methode de mise en oeuvre du dispositif

Also Published As

Publication number Publication date
EP2588405A1 (fr) 2013-05-08
CN103025648A (zh) 2013-04-03
WO2012001642A1 (fr) 2012-01-05
CN103025648B (zh) 2015-12-16
US8968673B2 (en) 2015-03-03
US20130149196A1 (en) 2013-06-13
FR2961899A1 (fr) 2011-12-30

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