FR2950430B1 - METHOD AND SYSTEM FOR INSPECTING THE SURFACE CONDITION OF AN OPTICAL SURFACE - Google Patents

METHOD AND SYSTEM FOR INSPECTING THE SURFACE CONDITION OF AN OPTICAL SURFACE Download PDF

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Publication number
FR2950430B1
FR2950430B1 FR0956480A FR0956480A FR2950430B1 FR 2950430 B1 FR2950430 B1 FR 2950430B1 FR 0956480 A FR0956480 A FR 0956480A FR 0956480 A FR0956480 A FR 0956480A FR 2950430 B1 FR2950430 B1 FR 2950430B1
Authority
FR
France
Prior art keywords
inspecting
optical surface
source
illuminated
focus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0956480A
Other languages
French (fr)
Other versions
FR2950430A1 (en
Inventor
Lionel Roucayrol
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National dEtudes Spatiales CNES
Original Assignee
Centre National dEtudes Spatiales CNES
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National dEtudes Spatiales CNES filed Critical Centre National dEtudes Spatiales CNES
Priority to FR0956480A priority Critical patent/FR2950430B1/en
Priority to PCT/EP2010/063854 priority patent/WO2011033117A1/en
Publication of FR2950430A1 publication Critical patent/FR2950430A1/en
Application granted granted Critical
Publication of FR2950430B1 publication Critical patent/FR2950430B1/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/93—Detection standards; Calibrating baseline adjustment, drift correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/005—Testing of reflective surfaces, e.g. mirrors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/4738—Diffuse reflection, e.g. also for testing fluids, fibrous materials
    • G01N21/474—Details of optical heads therefor, e.g. using optical fibres
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9511—Optical elements other than lenses, e.g. mirrors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0633—Directed, collimated illumination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0634—Diffuse illumination

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

L'invention concerne selon un premier aspect un procédé d'inspection de l'état d'une surface optique réfléchissante mis en oeuvre à l'aide d'un appareil de prise de vue positionné à distance de la surface, caractérisé par une étape de calibrage de l'appareil au cours de laquelle la mise au point de l'appareil est établie au niveau de défauts présents sur la surface optique alors que la surface est éclairée par une source de lumière collimatée. Selon un second aspect, l'invention concerne un système comprenant une source collimatée et un appareil de prise de vue calibré avec une mise au point établie au niveau de défauts présents sur la surface éclairée par la source de lumière collimatée.The invention relates according to a first aspect to a method for inspecting the state of a reflective optical surface implemented with the aid of a camera positioned at a distance from the surface, characterized by a step of Device calibration in which the device's focus is established at defects present on the optical surface while the surface is illuminated by a collimated light source. According to a second aspect, the invention relates to a system comprising a collimated source and a camera calibrated with a focus established at the level of defects present on the surface illuminated by the source of collimated light.

FR0956480A 2009-09-21 2009-09-21 METHOD AND SYSTEM FOR INSPECTING THE SURFACE CONDITION OF AN OPTICAL SURFACE Expired - Fee Related FR2950430B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR0956480A FR2950430B1 (en) 2009-09-21 2009-09-21 METHOD AND SYSTEM FOR INSPECTING THE SURFACE CONDITION OF AN OPTICAL SURFACE
PCT/EP2010/063854 WO2011033117A1 (en) 2009-09-21 2010-09-21 Method and system for inspecting the surface condition of an optical surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0956480A FR2950430B1 (en) 2009-09-21 2009-09-21 METHOD AND SYSTEM FOR INSPECTING THE SURFACE CONDITION OF AN OPTICAL SURFACE

Publications (2)

Publication Number Publication Date
FR2950430A1 FR2950430A1 (en) 2011-03-25
FR2950430B1 true FR2950430B1 (en) 2020-10-09

Family

ID=41531702

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0956480A Expired - Fee Related FR2950430B1 (en) 2009-09-21 2009-09-21 METHOD AND SYSTEM FOR INSPECTING THE SURFACE CONDITION OF AN OPTICAL SURFACE

Country Status (2)

Country Link
FR (1) FR2950430B1 (en)
WO (1) WO2011033117A1 (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2526947A1 (en) * 1982-05-11 1983-11-18 Hamamatsu Systems Inc Automatic particle detector for inspecting integrated circuit slice - uses lamp which is reflected by collimating mirror onto slice held by vacuum clamp, TV camera and processor
US5155558A (en) * 1990-09-19 1992-10-13 E. I. Du Pont De Nemours And Company Method and apparatus for analyzing the appearance features of a surface
US6797975B2 (en) * 2000-09-21 2004-09-28 Hitachi, Ltd. Method and its apparatus for inspecting particles or defects of a semiconductor device
US6597446B2 (en) * 2001-03-22 2003-07-22 Sentec Corporation Holographic scatterometer for detection and analysis of wafer surface deposits

Also Published As

Publication number Publication date
FR2950430A1 (en) 2011-03-25
WO2011033117A1 (en) 2011-03-24

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