FR2950427B1 - DEFORMATION GAUGE IN SELF-POWERED INTEGRATED CIRCUIT - Google Patents

DEFORMATION GAUGE IN SELF-POWERED INTEGRATED CIRCUIT

Info

Publication number
FR2950427B1
FR2950427B1 FR0956468A FR0956468A FR2950427B1 FR 2950427 B1 FR2950427 B1 FR 2950427B1 FR 0956468 A FR0956468 A FR 0956468A FR 0956468 A FR0956468 A FR 0956468A FR 2950427 B1 FR2950427 B1 FR 2950427B1
Authority
FR
France
Prior art keywords
self
integrated circuit
deformation gauge
powered integrated
powered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0956468A
Other languages
French (fr)
Other versions
FR2950427A1 (en
Inventor
Raymond Buisson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre Technique des Industries Mecaniques CETIM
Original Assignee
Centre Technique des Industries Mecaniques CETIM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre Technique des Industries Mecaniques CETIM filed Critical Centre Technique des Industries Mecaniques CETIM
Priority to FR0956468A priority Critical patent/FR2950427B1/en
Publication of FR2950427A1 publication Critical patent/FR2950427A1/en
Application granted granted Critical
Publication of FR2950427B1 publication Critical patent/FR2950427B1/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • G01B7/18—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in resistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2206—Special supports with preselected places to mount the resistance strain gauges; Mounting of supports
    • G01L1/2243—Special supports with preselected places to mount the resistance strain gauges; Mounting of supports the supports being parallelogram-shaped
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
    • G01L1/2293—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges of the semi-conductor type
FR0956468A 2009-09-21 2009-09-21 DEFORMATION GAUGE IN SELF-POWERED INTEGRATED CIRCUIT Expired - Fee Related FR2950427B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR0956468A FR2950427B1 (en) 2009-09-21 2009-09-21 DEFORMATION GAUGE IN SELF-POWERED INTEGRATED CIRCUIT

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0956468A FR2950427B1 (en) 2009-09-21 2009-09-21 DEFORMATION GAUGE IN SELF-POWERED INTEGRATED CIRCUIT

Publications (2)

Publication Number Publication Date
FR2950427A1 FR2950427A1 (en) 2011-03-25
FR2950427B1 true FR2950427B1 (en) 2012-10-12

Family

ID=42105989

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0956468A Expired - Fee Related FR2950427B1 (en) 2009-09-21 2009-09-21 DEFORMATION GAUGE IN SELF-POWERED INTEGRATED CIRCUIT

Country Status (1)

Country Link
FR (1) FR2950427B1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3450947B1 (en) 2017-09-05 2024-01-17 IMEC vzw Stress sensor for semiconductor components

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56117105A (en) * 1980-02-20 1981-09-14 Hitachi Ltd Displacement transducer
JP4329478B2 (en) * 2003-10-06 2009-09-09 株式会社日立製作所 Mechanical quantity measuring device
US8994528B2 (en) * 2007-06-15 2015-03-31 Board Of Regents, The University Of Texas System Thin flexible sensor

Also Published As

Publication number Publication date
FR2950427A1 (en) 2011-03-25

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Legal Events

Date Code Title Description
PLFP Fee payment

Year of fee payment: 8

PLFP Fee payment

Year of fee payment: 9

PLFP Fee payment

Year of fee payment: 10

ST Notification of lapse

Effective date: 20200914