FR2931261B1 - Dispositif pour holographie electronique - Google Patents

Dispositif pour holographie electronique

Info

Publication number
FR2931261B1
FR2931261B1 FR0802685A FR0802685A FR2931261B1 FR 2931261 B1 FR2931261 B1 FR 2931261B1 FR 0802685 A FR0802685 A FR 0802685A FR 0802685 A FR0802685 A FR 0802685A FR 2931261 B1 FR2931261 B1 FR 2931261B1
Authority
FR
France
Prior art keywords
electronic holography
holography
electronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR0802685A
Other languages
English (en)
Other versions
FR2931261A1 (fr
Inventor
Martin Hytch
Florent Houdellier
Etienne Snoeck
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR0802685A priority Critical patent/FR2931261B1/fr
Priority to PCT/FR2008/001302 priority patent/WO2009068763A2/fr
Priority to US12/680,078 priority patent/US8502143B2/en
Priority to EP08853292.4A priority patent/EP2193360B1/fr
Priority to JP2010525386A priority patent/JP5562243B2/ja
Publication of FR2931261A1 publication Critical patent/FR2931261A1/fr
Application granted granted Critical
Publication of FR2931261B1 publication Critical patent/FR2931261B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/295—Electron or ion diffraction tubes
    • H01J37/2955—Electron or ion diffraction tubes using scanning ray
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/2614—Holography or phase contrast, phase related imaging in general, e.g. phase plates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR0802685A 2007-09-25 2008-05-19 Dispositif pour holographie electronique Active FR2931261B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR0802685A FR2931261B1 (fr) 2008-05-19 2008-05-19 Dispositif pour holographie electronique
PCT/FR2008/001302 WO2009068763A2 (fr) 2007-09-25 2008-09-17 Procede, dispositif et systeme de mesure de deformations a l'echelle nanometrique
US12/680,078 US8502143B2 (en) 2007-09-25 2008-09-17 Method, device and system for measuring nanoscale deformations
EP08853292.4A EP2193360B1 (fr) 2007-09-25 2008-09-17 Procede et systeme de mesure de deformations a l'echelle nanometrique
JP2010525386A JP5562243B2 (ja) 2007-09-25 2008-09-17 ナノスケール変形を測定する方法、デバイス及びシステム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0802685A FR2931261B1 (fr) 2008-05-19 2008-05-19 Dispositif pour holographie electronique

Publications (2)

Publication Number Publication Date
FR2931261A1 FR2931261A1 (fr) 2009-11-20
FR2931261B1 true FR2931261B1 (fr) 2010-09-10

Family

ID=40110990

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0802685A Active FR2931261B1 (fr) 2007-09-25 2008-05-19 Dispositif pour holographie electronique

Country Status (1)

Country Link
FR (1) FR2931261B1 (fr)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5192867A (en) * 1989-01-13 1993-03-09 Hitachi, Ltd. Electron optical measurement apparatus
JP4069545B2 (ja) * 1999-05-19 2008-04-02 株式会社日立製作所 電子顕微方法及びそれを用いた電子顕微鏡並び生体試料検査方法及び生体検査装置
JP2002117800A (ja) * 2000-10-05 2002-04-19 Jeol Ltd 電子線バイプリズム装置を備えた電子顕微鏡
US7015469B2 (en) * 2003-01-09 2006-03-21 Jeol Usa, Inc. Electron holography method
JP2005294085A (ja) * 2004-04-01 2005-10-20 Hitachi Ltd 走査電子線干渉装置
JP4919404B2 (ja) * 2006-06-15 2012-04-18 株式会社リコー 電子顕微鏡、電子線ホログラム作成方法及び位相再生画像作成方法

Also Published As

Publication number Publication date
FR2931261A1 (fr) 2009-11-20

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