FR2922325B1 - Homogeneiseur a lame de phase - Google Patents

Homogeneiseur a lame de phase

Info

Publication number
FR2922325B1
FR2922325B1 FR0758288A FR0758288A FR2922325B1 FR 2922325 B1 FR2922325 B1 FR 2922325B1 FR 0758288 A FR0758288 A FR 0758288A FR 0758288 A FR0758288 A FR 0758288A FR 2922325 B1 FR2922325 B1 FR 2922325B1
Authority
FR
France
Prior art keywords
target
laser
delayed
laser beams
subpupils
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0758288A
Other languages
English (en)
Other versions
FR2922325A1 (fr
Inventor
Federico Canova
Jean Paul Chambaret
Stephane Tisserand
Fabien Reversat
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ecole Polytechnique
Silios Technologies SA
Original Assignee
Ecole Polytechnique
Silios Technologies SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR0758288A priority Critical patent/FR2922325B1/fr
Application filed by Ecole Polytechnique, Silios Technologies SA filed Critical Ecole Polytechnique
Priority to JP2010528466A priority patent/JP5425789B2/ja
Priority to PCT/FR2008/051846 priority patent/WO2009053633A1/fr
Priority to EP08843084A priority patent/EP2203779B1/fr
Priority to US12/682,485 priority patent/US8599477B2/en
Priority to AT08843084T priority patent/ATE522840T1/de
Priority to ES08843084T priority patent/ES2373005T3/es
Priority to CN200880119628.6A priority patent/CN101889235B/zh
Publication of FR2922325A1 publication Critical patent/FR2922325A1/fr
Application granted granted Critical
Publication of FR2922325B1 publication Critical patent/FR2922325B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/58—Optics for apodization or superresolution; Optical synthetic aperture systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/32—Holograms used as optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0905—Dividing and/or superposing multiple light beams
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/0944—Diffractive optical elements, e.g. gratings, holograms

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Cleaning Of Streets, Tracks, Or Beaches (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Microscoopes, Condenser (AREA)
  • Laser Beam Processing (AREA)
FR0758288A 2007-10-12 2007-10-12 Homogeneiseur a lame de phase Expired - Fee Related FR2922325B1 (fr)

Priority Applications (8)

Application Number Priority Date Filing Date Title
FR0758288A FR2922325B1 (fr) 2007-10-12 2007-10-12 Homogeneiseur a lame de phase
PCT/FR2008/051846 WO2009053633A1 (fr) 2007-10-12 2008-10-10 Homogeneiseur a lame de phase
EP08843084A EP2203779B1 (fr) 2007-10-12 2008-10-10 Homogeneiseur a lame de phase
US12/682,485 US8599477B2 (en) 2007-10-12 2008-10-10 Homogenizer including a phase plate
JP2010528466A JP5425789B2 (ja) 2007-10-12 2008-10-10 位相板を含むホモジナイザ
AT08843084T ATE522840T1 (de) 2007-10-12 2008-10-10 Homogenisierer mit einer phasenplatte
ES08843084T ES2373005T3 (es) 2007-10-12 2008-10-10 Homogeneizador que incluye un laminado de fase.
CN200880119628.6A CN101889235B (zh) 2007-10-12 2008-10-10 包括相板的均化器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0758288A FR2922325B1 (fr) 2007-10-12 2007-10-12 Homogeneiseur a lame de phase

Publications (2)

Publication Number Publication Date
FR2922325A1 FR2922325A1 (fr) 2009-04-17
FR2922325B1 true FR2922325B1 (fr) 2010-06-11

Family

ID=39262785

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0758288A Expired - Fee Related FR2922325B1 (fr) 2007-10-12 2007-10-12 Homogeneiseur a lame de phase

Country Status (8)

Country Link
US (1) US8599477B2 (fr)
EP (1) EP2203779B1 (fr)
JP (1) JP5425789B2 (fr)
CN (1) CN101889235B (fr)
AT (1) ATE522840T1 (fr)
ES (1) ES2373005T3 (fr)
FR (1) FR2922325B1 (fr)
WO (1) WO2009053633A1 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102375171B (zh) * 2011-11-09 2013-10-02 中国科学院物理研究所 一种衍射光学元件及其设计方法和在太阳能电池中的应用
DE102013005607A1 (de) 2013-03-25 2014-09-25 Friedrich-Schiller-Universität Jena Verfahren und Vorrichtung zum optischen Pumpen von Laserverstärkern für die Erzeugung einer Laserstrahlung mit definierten Strahleigenschaften
EP3732529B1 (fr) * 2017-12-28 2024-02-28 AMS Sensors Singapore Pte. Ltd. Modules optoélectroniques électroluminescents
CN110389451B (zh) * 2018-04-19 2022-04-22 华为技术有限公司 一种光交换装置
US11675114B2 (en) * 2018-07-23 2023-06-13 Ii-Vi Delaware, Inc. Monolithic structured light projector
CN109581682B (zh) * 2019-01-15 2020-07-07 四川大学 惯性约束聚变装置中基于光束动态干涉图样的快速光束匀滑方法
CN111550749A (zh) * 2019-01-23 2020-08-18 奇景光电股份有限公司 照明装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3677616A (en) * 1971-05-03 1972-07-18 Battelle Development Corp Reduced noise high resolution holographic imaging using spatially incoherent reconstructing radiation
US4521075A (en) * 1983-03-07 1985-06-04 Obenschain Stephen P Controllable spatial incoherence echelon for laser
US4619508A (en) * 1984-04-28 1986-10-28 Nippon Kogaku K. K. Illumination optical arrangement
US5328785A (en) * 1992-02-10 1994-07-12 Litel Instruments High power phase masks for imaging systems
JPH07176072A (ja) * 1993-12-20 1995-07-14 Hitachi Ltd 光ヘッド装置
US5657157A (en) * 1995-06-23 1997-08-12 Sdl, Inc. Semiconductor optical amplifying media with reduced self-focusing
US5982806A (en) * 1996-05-10 1999-11-09 Nippon Steel Corporation Laser beam converter for converting a laser beam with a single high-order transverse mode into a laser beam with a desired intensity distribution and laser resonator for producing a laser beam with a single high-order transverse mode
TW523791B (en) * 2000-09-01 2003-03-11 Semiconductor Energy Lab Method of processing beam, laser irradiation apparatus, and method of manufacturing semiconductor device
US6967342B2 (en) * 2003-07-31 2005-11-22 Fusion Uv Systems, Inc. Method and apparatus for improved ultraviolet (UV) treatment of large three-dimensional (3D) objects
US20050286599A1 (en) * 2004-06-29 2005-12-29 Rafac Robert J Method and apparatus for gas discharge laser output light coherency reduction
US20090046757A1 (en) * 2007-08-16 2009-02-19 Semiconductor Energy Laboratory Co., Ltd. Laser irradiation apparatus, laser irradiation method, and manufacturing method of semiconductor device

Also Published As

Publication number Publication date
EP2203779B1 (fr) 2011-08-31
US8599477B2 (en) 2013-12-03
CN101889235B (zh) 2013-06-19
JP5425789B2 (ja) 2014-02-26
WO2009053633A1 (fr) 2009-04-30
JP2011501207A (ja) 2011-01-06
ATE522840T1 (de) 2011-09-15
CN101889235A (zh) 2010-11-17
EP2203779A1 (fr) 2010-07-07
US20110038037A1 (en) 2011-02-17
FR2922325A1 (fr) 2009-04-17
ES2373005T3 (es) 2012-01-30

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20130628