FR2921477B1 - Procede et systeme de mesure de deformations a l'echelle nanometrique - Google Patents

Procede et systeme de mesure de deformations a l'echelle nanometrique

Info

Publication number
FR2921477B1
FR2921477B1 FR0706711A FR0706711A FR2921477B1 FR 2921477 B1 FR2921477 B1 FR 2921477B1 FR 0706711 A FR0706711 A FR 0706711A FR 0706711 A FR0706711 A FR 0706711A FR 2921477 B1 FR2921477 B1 FR 2921477B1
Authority
FR
France
Prior art keywords
nanometer scale
scale deformation
measuring nanometer
measuring
deformation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR0706711A
Other languages
English (en)
Other versions
FR2921477A1 (fr
Inventor
Martin Hytch
Etienne Snoeck
Florent Houdellier
Florian Hue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR0706711A priority Critical patent/FR2921477B1/fr
Priority to US12/680,078 priority patent/US8502143B2/en
Priority to JP2010525386A priority patent/JP5562243B2/ja
Priority to EP08853292.4A priority patent/EP2193360B1/fr
Priority to PCT/FR2008/001302 priority patent/WO2009068763A2/fr
Publication of FR2921477A1 publication Critical patent/FR2921477A1/fr
Application granted granted Critical
Publication of FR2921477B1 publication Critical patent/FR2921477B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
    • G01B11/161—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
FR0706711A 2007-09-25 2007-09-25 Procede et systeme de mesure de deformations a l'echelle nanometrique Active FR2921477B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR0706711A FR2921477B1 (fr) 2007-09-25 2007-09-25 Procede et systeme de mesure de deformations a l'echelle nanometrique
US12/680,078 US8502143B2 (en) 2007-09-25 2008-09-17 Method, device and system for measuring nanoscale deformations
JP2010525386A JP5562243B2 (ja) 2007-09-25 2008-09-17 ナノスケール変形を測定する方法、デバイス及びシステム
EP08853292.4A EP2193360B1 (fr) 2007-09-25 2008-09-17 Procede et systeme de mesure de deformations a l'echelle nanometrique
PCT/FR2008/001302 WO2009068763A2 (fr) 2007-09-25 2008-09-17 Procede, dispositif et systeme de mesure de deformations a l'echelle nanometrique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0706711A FR2921477B1 (fr) 2007-09-25 2007-09-25 Procede et systeme de mesure de deformations a l'echelle nanometrique

Publications (2)

Publication Number Publication Date
FR2921477A1 FR2921477A1 (fr) 2009-03-27
FR2921477B1 true FR2921477B1 (fr) 2009-12-04

Family

ID=39462154

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0706711A Active FR2921477B1 (fr) 2007-09-25 2007-09-25 Procede et systeme de mesure de deformations a l'echelle nanometrique

Country Status (1)

Country Link
FR (1) FR2921477B1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107388980B (zh) * 2017-08-31 2019-10-29 中南大学 一种双影像单目视觉变形监测系统与方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5828724A (en) * 1997-03-25 1998-10-27 Advanced Technology Materials, Inc. Photo-sensor fiber-optic stress analysis system
RU2239178C1 (ru) * 2003-08-22 2004-10-27 Общество с ограниченной ответственностью "Институт рентгеновской оптики" Способ определения наличия упругих деформаций в монокристаллических пластинах и устройство для его осуществления

Also Published As

Publication number Publication date
FR2921477A1 (fr) 2009-03-27

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