FR2910825B1 - INDUSTRIAL ULTRASONIC SPUTTERING DEVICE. - Google Patents

INDUSTRIAL ULTRASONIC SPUTTERING DEVICE.

Info

Publication number
FR2910825B1
FR2910825B1 FR0752501A FR0752501A FR2910825B1 FR 2910825 B1 FR2910825 B1 FR 2910825B1 FR 0752501 A FR0752501 A FR 0752501A FR 0752501 A FR0752501 A FR 0752501A FR 2910825 B1 FR2910825 B1 FR 2910825B1
Authority
FR
France
Prior art keywords
sputtering device
industrial ultrasonic
ultrasonic sputtering
industrial
ultrasonic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR0752501A
Other languages
French (fr)
Other versions
FR2910825A1 (en
Inventor
Gilles Boursier
Philippe Vaxelaire
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SODEVA SA
Original Assignee
SODEVA SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SODEVA SA filed Critical SODEVA SA
Priority to FR0752501A priority Critical patent/FR2910825B1/en
Priority to PCT/EP2007/064388 priority patent/WO2008080887A1/en
Priority to TW96151054A priority patent/TWI421129B/en
Publication of FR2910825A1 publication Critical patent/FR2910825A1/en
Application granted granted Critical
Publication of FR2910825B1 publication Critical patent/FR2910825B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B3/00—Methods or apparatus specially adapted for transmitting mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
    • B05B17/0623—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers coupled with a vibrating horn
FR0752501A 2007-01-02 2007-01-02 INDUSTRIAL ULTRASONIC SPUTTERING DEVICE. Active FR2910825B1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR0752501A FR2910825B1 (en) 2007-01-02 2007-01-02 INDUSTRIAL ULTRASONIC SPUTTERING DEVICE.
PCT/EP2007/064388 WO2008080887A1 (en) 2007-01-02 2007-12-20 Industrial ultrasonic spraying device
TW96151054A TWI421129B (en) 2007-01-02 2007-12-31 Industrial ultrasonic spraying device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0752501A FR2910825B1 (en) 2007-01-02 2007-01-02 INDUSTRIAL ULTRASONIC SPUTTERING DEVICE.

Publications (2)

Publication Number Publication Date
FR2910825A1 FR2910825A1 (en) 2008-07-04
FR2910825B1 true FR2910825B1 (en) 2009-02-27

Family

ID=38800828

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0752501A Active FR2910825B1 (en) 2007-01-02 2007-01-02 INDUSTRIAL ULTRASONIC SPUTTERING DEVICE.

Country Status (3)

Country Link
FR (1) FR2910825B1 (en)
TW (1) TWI421129B (en)
WO (1) WO2008080887A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI489396B (en) * 2013-03-01 2015-06-21 First Optotech Co Ltd Image structure analysis method
EP3843888A4 (en) * 2018-08-30 2022-05-18 Ranganathan Gopalakrishnan System and methods for dispersion of dry powders

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE342154B (en) * 1967-12-25 1972-01-31 Nippon Kokan Kk
FR2669561B1 (en) * 1990-11-22 1995-03-03 Dominique Dubruque ULTRASONIC FLUID SPRAYING DEVICE.
FR2859650B1 (en) * 2003-09-12 2006-02-24 Gloster Sante Europ APPARATUS FOR BRUSTING A LIQUID COMPOSITION

Also Published As

Publication number Publication date
WO2008080887A1 (en) 2008-07-10
TWI421129B (en) 2014-01-01
FR2910825A1 (en) 2008-07-04
TW200841936A (en) 2008-11-01

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