FR2900144B1 - Microsysteme piezoelectrique pour l'isolation vibratoire active de composants sensibles aux vibrations - Google Patents

Microsysteme piezoelectrique pour l'isolation vibratoire active de composants sensibles aux vibrations

Info

Publication number
FR2900144B1
FR2900144B1 FR0603494A FR0603494A FR2900144B1 FR 2900144 B1 FR2900144 B1 FR 2900144B1 FR 0603494 A FR0603494 A FR 0603494A FR 0603494 A FR0603494 A FR 0603494A FR 2900144 B1 FR2900144 B1 FR 2900144B1
Authority
FR
France
Prior art keywords
microsystem
piezoelectric
sensitive components
vibration
active
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0603494A
Other languages
English (en)
Other versions
FR2900144A1 (fr
Inventor
Manuel Collet
Patrick Delobelle
Yann Meyer
Vincent Walter
Paul Muralt
Jacek Baborowski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ecole Polytechnique Federale de Lausanne EPFL
Centre National de la Recherche Scientifique CNRS
Universite de Franche-Comte
Original Assignee
Ecole Polytechnique Federale de Lausanne EPFL
Centre National de la Recherche Scientifique CNRS
Universite de Franche-Comte
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ecole Polytechnique Federale de Lausanne EPFL, Centre National de la Recherche Scientifique CNRS, Universite de Franche-Comte filed Critical Ecole Polytechnique Federale de Lausanne EPFL
Priority to FR0603494A priority Critical patent/FR2900144B1/fr
Priority to EP07731337A priority patent/EP2018347A1/fr
Priority to PCT/FR2007/000676 priority patent/WO2007122330A1/fr
Publication of FR2900144A1 publication Critical patent/FR2900144A1/fr
Application granted granted Critical
Publication of FR2900144B1 publication Critical patent/FR2900144B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/005—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion using electro- or magnetostrictive actuation means
FR0603494A 2006-04-20 2006-04-20 Microsysteme piezoelectrique pour l'isolation vibratoire active de composants sensibles aux vibrations Expired - Fee Related FR2900144B1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR0603494A FR2900144B1 (fr) 2006-04-20 2006-04-20 Microsysteme piezoelectrique pour l'isolation vibratoire active de composants sensibles aux vibrations
EP07731337A EP2018347A1 (fr) 2006-04-20 2007-04-20 Microsystème piézoélectrique pour l'isolation vibratoire active de composants sensibles aux vibrations
PCT/FR2007/000676 WO2007122330A1 (fr) 2006-04-20 2007-04-20 Microsystème piézoélectrique pour l'isolation vibratoire active de composants sensibles aux vibrations

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0603494A FR2900144B1 (fr) 2006-04-20 2006-04-20 Microsysteme piezoelectrique pour l'isolation vibratoire active de composants sensibles aux vibrations

Publications (2)

Publication Number Publication Date
FR2900144A1 FR2900144A1 (fr) 2007-10-26
FR2900144B1 true FR2900144B1 (fr) 2008-06-20

Family

ID=37670707

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0603494A Expired - Fee Related FR2900144B1 (fr) 2006-04-20 2006-04-20 Microsysteme piezoelectrique pour l'isolation vibratoire active de composants sensibles aux vibrations

Country Status (3)

Country Link
EP (1) EP2018347A1 (fr)
FR (1) FR2900144B1 (fr)
WO (1) WO2007122330A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011015800A1 (de) * 2011-04-01 2012-10-04 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zur mechanischen Schwingungsentkopplung
US10378934B2 (en) * 2015-02-02 2019-08-13 Goodrich Corporation Sensor systems

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07190782A (ja) * 1993-12-27 1995-07-28 Nikon Corp 振動角速度計
JP3307101B2 (ja) * 1994-08-31 2002-07-24 株式会社村田製作所 角速度センサ

Also Published As

Publication number Publication date
WO2007122330A1 (fr) 2007-11-01
EP2018347A1 (fr) 2009-01-28
FR2900144A1 (fr) 2007-10-26

Similar Documents

Publication Publication Date Title
FR2895051B1 (fr) Suppression et isolation actives de vibrations avec reaction et antereaction pour un bati de moteur d'avion
EP1952665A4 (fr) Moteur a vibrations en tant que transducteur de signaux audio
DE602005001651D1 (de) Gerät zur Dämpfung von Vibrationen
DE602006007194D1 (de) Piezoelektrische Schwingzunge und piezoelektrisches Bauelement
NO20045647D0 (no) Akustiske transdusere for rorledninger
HK1125603A1 (en) Vibration isolation device of container and method of using the same
TWI315642B (en) Auxiliary fastening device for assisting transducer being fastened and isolating vibration induced during operation of transducer
DE502005008008D1 (de) Hybrides Steifigkeitsmodul zur Schwingungsisolation
FR2901163B1 (fr) Dispositif de percage a vibrations axiales auto-entretenues
PL2100054T3 (pl) Urządzenie do kontroli drgań konstrukcji
DE602005010952D1 (de) Optimaler Standort einer aktiven Schwingungsdämpfungssteuerungseinheit
FR2900514B1 (fr) Vibrateur piezoelectrique
GB0817146D0 (en) Vibration damping device and method of manufacturing the same
EP1852631A4 (fr) Dispositif d'isolation des vibrations
GB2435965B (en) Electromagnetic actuator foractive vibration damping device
DE602005006083D1 (de) Aktiver Schwingungsdämpfer
EP2025968A4 (fr) Dispositif d'isolement contre les vibrations
DE602005024085D1 (de) Aktiver Schwingungsisolator
FR2872671B1 (fr) Actionneur multifonction capable d'empecher la vibration
DE602007000754D1 (de) Piezoelektrischer elektroakustischer Wandler
FR2947584B1 (fr) Dispositif d'amortissement de vibrations d'une gache
DE602004022368D1 (de) Aktive Schwingungsdämpfungsvorrichtung eines Schwingungselementes
FR2900144B1 (fr) Microsysteme piezoelectrique pour l'isolation vibratoire active de composants sensibles aux vibrations
FR2921408B1 (fr) Jonc d'etancheite ou d'amortissement des vibrations pour rotor de turbomachine
FR2886567B1 (fr) Timon anti-vibration pour compacteur vibrant

Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20141231