FR2872571B1 - Dispositif optique reflecteur et dispositifs spectroscopiques comportant ces dispositifs optiques reflecteurs - Google Patents

Dispositif optique reflecteur et dispositifs spectroscopiques comportant ces dispositifs optiques reflecteurs

Info

Publication number
FR2872571B1
FR2872571B1 FR0451441A FR0451441A FR2872571B1 FR 2872571 B1 FR2872571 B1 FR 2872571B1 FR 0451441 A FR0451441 A FR 0451441A FR 0451441 A FR0451441 A FR 0451441A FR 2872571 B1 FR2872571 B1 FR 2872571B1
Authority
FR
France
Prior art keywords
reflective optical
devices
spectroscopic
optical device
spectroscopic devices
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0451441A
Other languages
English (en)
Other versions
FR2872571A1 (fr
Inventor
Emmanuel Fretel
Pascal Faucher
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Jobin Yvon SAS
Original Assignee
Horiba Jobin Yvon SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horiba Jobin Yvon SAS filed Critical Horiba Jobin Yvon SAS
Priority to FR0451441A priority Critical patent/FR2872571B1/fr
Publication of FR2872571A1 publication Critical patent/FR2872571A1/fr
Application granted granted Critical
Publication of FR2872571B1 publication Critical patent/FR2872571B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
FR0451441A 2004-07-05 2004-07-05 Dispositif optique reflecteur et dispositifs spectroscopiques comportant ces dispositifs optiques reflecteurs Expired - Fee Related FR2872571B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR0451441A FR2872571B1 (fr) 2004-07-05 2004-07-05 Dispositif optique reflecteur et dispositifs spectroscopiques comportant ces dispositifs optiques reflecteurs

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0451441A FR2872571B1 (fr) 2004-07-05 2004-07-05 Dispositif optique reflecteur et dispositifs spectroscopiques comportant ces dispositifs optiques reflecteurs

Publications (2)

Publication Number Publication Date
FR2872571A1 FR2872571A1 (fr) 2006-01-06
FR2872571B1 true FR2872571B1 (fr) 2006-09-22

Family

ID=34949993

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0451441A Expired - Fee Related FR2872571B1 (fr) 2004-07-05 2004-07-05 Dispositif optique reflecteur et dispositifs spectroscopiques comportant ces dispositifs optiques reflecteurs

Country Status (1)

Country Link
FR (1) FR2872571B1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN118032126A (zh) * 2024-01-22 2024-05-14 上海纪光光电科技有限公司 立体光谱仪

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5442439A (en) * 1993-04-21 1995-08-15 Kaiser Optical Systems, Inc. Spectrograph with multiplexing of different wavelength regions onto a single opto-electric detector array
JPH11230828A (ja) * 1998-02-12 1999-08-27 Shimadzu Corp エシェル分光器
US6381008B1 (en) * 1998-06-20 2002-04-30 Sd Acquisition Inc. Method and system for identifying etch end points in semiconductor circuit fabrication
US6373567B1 (en) * 1999-12-17 2002-04-16 Micron Optical Systems Dispersive near-IR Raman spectrometer

Also Published As

Publication number Publication date
FR2872571A1 (fr) 2006-01-06

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20120330