FR2869601B1 - MOLD FOR NANO-PRINTING, METHOD OF MANUFACTURING SUCH MOLD AND USE OF SUCH A MOLD - Google Patents

MOLD FOR NANO-PRINTING, METHOD OF MANUFACTURING SUCH MOLD AND USE OF SUCH A MOLD

Info

Publication number
FR2869601B1
FR2869601B1 FR0450809A FR0450809A FR2869601B1 FR 2869601 B1 FR2869601 B1 FR 2869601B1 FR 0450809 A FR0450809 A FR 0450809A FR 0450809 A FR0450809 A FR 0450809A FR 2869601 B1 FR2869601 B1 FR 2869601B1
Authority
FR
France
Prior art keywords
mold
mould
nano
printing
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0450809A
Other languages
French (fr)
Other versions
FR2869601A1 (en
Inventor
Stephan Landis
Laurent Mollard
Cecile Gourgon
Jean Herve Tortai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Centre National de la Recherche Scientifique CNRS
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS, Commissariat a lEnergie Atomique CEA filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR0450809A priority Critical patent/FR2869601B1/en
Priority to US11/111,886 priority patent/US7559758B2/en
Priority to AT05103405T priority patent/ATE365616T1/en
Priority to DE602005001462T priority patent/DE602005001462T2/en
Priority to EP05103405A priority patent/EP1591218B1/en
Priority to JP2005130550A priority patent/JP4851112B2/en
Publication of FR2869601A1 publication Critical patent/FR2869601A1/en
Application granted granted Critical
Publication of FR2869601B1 publication Critical patent/FR2869601B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/42—Moulds or cores; Details thereof or accessories therefor characterised by the shape of the moulding surface, e.g. ribs or grooves
    • B29C33/424—Moulding surfaces provided with means for marking or patterning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/0055—Moulds or cores; Details thereof or accessories therefor with incorporated overflow cavities

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Moulding By Coating Moulds (AREA)
  • Printing Plates And Materials Therefor (AREA)

Abstract

The mould, having a surface pattern (12) produced by a series of recesses (12.1) and projections (12.2), has one or more channels (13) linking the surface pattern to a reservoir zone (14) with one or more reservoirs. The channels connect with the bases of the recesses and have a cross-section that is smaller that the area of the pattern where it emerges; they can have a constant or variable, e.g. conical, crosssection. A duct connects the reservoir(s) to the mould's outer surface. The mould is made by covering a core produced by a lithographic process, using a light- or electron-sensitive resin.
FR0450809A 2004-04-28 2004-04-28 MOLD FOR NANO-PRINTING, METHOD OF MANUFACTURING SUCH MOLD AND USE OF SUCH A MOLD Expired - Fee Related FR2869601B1 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR0450809A FR2869601B1 (en) 2004-04-28 2004-04-28 MOLD FOR NANO-PRINTING, METHOD OF MANUFACTURING SUCH MOLD AND USE OF SUCH A MOLD
US11/111,886 US7559758B2 (en) 2004-04-28 2005-04-22 Mould for nano-printing, process for manufacturing such a mould and use of such a mould
AT05103405T ATE365616T1 (en) 2004-04-28 2005-04-26 MOLD FOR THE NANOIMPRINT PROCESS, AND APPLICATION AND METHOD FOR PRODUCING SUCH A MOLD
DE602005001462T DE602005001462T2 (en) 2004-04-28 2005-04-26 Mold for the nanoimprint process, as well as application and method of making such a mold
EP05103405A EP1591218B1 (en) 2004-04-28 2005-04-26 Mould for nanoimprinting, method of manufacture of such a mould and use of such a mold
JP2005130550A JP4851112B2 (en) 2004-04-28 2005-04-27 Molds for nanoprinting, methods for producing such molds, and methods of using such molds

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0450809A FR2869601B1 (en) 2004-04-28 2004-04-28 MOLD FOR NANO-PRINTING, METHOD OF MANUFACTURING SUCH MOLD AND USE OF SUCH A MOLD

Publications (2)

Publication Number Publication Date
FR2869601A1 FR2869601A1 (en) 2005-11-04
FR2869601B1 true FR2869601B1 (en) 2006-06-09

Family

ID=34939525

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0450809A Expired - Fee Related FR2869601B1 (en) 2004-04-28 2004-04-28 MOLD FOR NANO-PRINTING, METHOD OF MANUFACTURING SUCH MOLD AND USE OF SUCH A MOLD

Country Status (6)

Country Link
US (1) US7559758B2 (en)
EP (1) EP1591218B1 (en)
JP (1) JP4851112B2 (en)
AT (1) ATE365616T1 (en)
DE (1) DE602005001462T2 (en)
FR (1) FR2869601B1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5119579B2 (en) * 2005-08-01 2013-01-16 凸版印刷株式会社 Imprint mold and manufacturing method thereof
FR2893018B1 (en) * 2005-11-09 2008-03-14 Commissariat Energie Atomique METHOD OF FORMING MEDIA HAVING PATTERNS, SUCH AS LITHOGRAPHIC MASKS
US7862756B2 (en) * 2006-03-30 2011-01-04 Asml Netherland B.V. Imprint lithography
JP2008126450A (en) * 2006-11-17 2008-06-05 Fuji Electric Device Technology Co Ltd Mold, manufacturing method therefor and magnetic recording medium
US20100104852A1 (en) * 2008-10-23 2010-04-29 Molecular Imprints, Inc. Fabrication of High-Throughput Nano-Imprint Lithography Templates
US20100251664A1 (en) * 2009-04-06 2010-10-07 Antonio Pinto Wall design imprint tool
US9149958B2 (en) * 2011-11-14 2015-10-06 Massachusetts Institute Of Technology Stamp for microcontact printing

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6020721B2 (en) * 1979-12-27 1985-05-23 富士写真フイルム株式会社 Polychromatic optical filter and its manufacturing method
JPS5862011A (en) * 1981-10-09 1983-04-13 Asahi Chem Ind Co Ltd Mold and manufacture thereof
US6824378B2 (en) * 2002-05-31 2004-11-30 3M Innovative Properties Company Microreplication tool with gas release features
JP3848303B2 (en) * 2002-06-07 2006-11-22 キヤノン株式会社 Structure, functional structure, and method of manufacturing magnetic recording medium
FR2849221B1 (en) 2002-12-23 2005-10-07 Commissariat Energie Atomique METHOD FOR PRESSING LITHOGRAPHY OF A SUBSTRATE EMPLOYING A NANO-PRINTING
US7636999B2 (en) * 2005-01-31 2009-12-29 Molecular Imprints, Inc. Method of retaining a substrate to a wafer chuck
JP2006245072A (en) * 2005-02-28 2006-09-14 Canon Inc Mold for transferring pattern and transfer device

Also Published As

Publication number Publication date
ATE365616T1 (en) 2007-07-15
FR2869601A1 (en) 2005-11-04
JP4851112B2 (en) 2012-01-11
EP1591218A1 (en) 2005-11-02
US7559758B2 (en) 2009-07-14
US20050253296A1 (en) 2005-11-17
EP1591218B1 (en) 2007-06-27
DE602005001462D1 (en) 2007-08-09
DE602005001462T2 (en) 2008-03-06
JP2005313647A (en) 2005-11-10

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Year of fee payment: 12

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Effective date: 20161230