FR2857954B1 - Procede de croissance localisee de nanofils ou nanotubes - Google Patents

Procede de croissance localisee de nanofils ou nanotubes

Info

Publication number
FR2857954B1
FR2857954B1 FR0309162A FR0309162A FR2857954B1 FR 2857954 B1 FR2857954 B1 FR 2857954B1 FR 0309162 A FR0309162 A FR 0309162A FR 0309162 A FR0309162 A FR 0309162A FR 2857954 B1 FR2857954 B1 FR 2857954B1
Authority
FR
France
Prior art keywords
nanofils
nanotubes
localized growth
localized
growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0309162A
Other languages
English (en)
Other versions
FR2857954A1 (fr
Inventor
Pierre Legagneux
Pascal Vincent
Jean Philippe Schnell
Luc Piraux
Laurent Vila
Etienne Ferain
Roger Legras
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thales SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thales SA filed Critical Thales SA
Priority to FR0309162A priority Critical patent/FR2857954B1/fr
Priority to PCT/EP2004/051567 priority patent/WO2005015596A2/fr
Publication of FR2857954A1 publication Critical patent/FR2857954A1/fr
Application granted granted Critical
Publication of FR2857954B1 publication Critical patent/FR2857954B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00436Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
    • B81C1/00444Surface micromachining, i.e. structuring layers on the substrate
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00Nanotechnology for materials or surface science, e.g. nanocomposites
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00Manufacture or treatment of nanostructures
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00Carbon; Compounds thereof
    • C01B32/15Nano-sized carbon materials
    • C01B32/158Carbon nanotubes
    • C01B32/16Preparation
    • C01B32/162Preparation characterised by catalysts
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00Carbon; Compounds thereof
    • C01B32/15Nano-sized carbon materials
    • C01B32/18Nanoonions; Nanoscrolls; Nanohorns; Nanocones; Nanowalls
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02Main electrodes
    • H01J1/30Cold cathodes, e.g. field-emissive cathode
    • H01J1/304Field-emissive cathodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02Manufacture of electrodes or electrode systems
    • H01J9/022Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00Basic microelectromechanical structures
    • B81B2203/03Static structures
    • B81B2203/0361Tips, pillars
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00Electrodes common to discharge tubes
    • H01J2201/30Cold cathodes
    • H01J2201/304Field emission cathodes
    • H01J2201/30446Field emission cathodes characterised by the emitter material
    • H01J2201/30453Carbon types
    • H01J2201/30469Carbon nanotubes (CNTs)
FR0309162A 2003-07-25 2003-07-25 Procede de croissance localisee de nanofils ou nanotubes Expired - Fee Related FR2857954B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR0309162A FR2857954B1 (fr) 2003-07-25 2003-07-25 Procede de croissance localisee de nanofils ou nanotubes
PCT/EP2004/051567 WO2005015596A2 (fr) 2003-07-25 2004-07-21 Procede de croissance localisee de nanofils ou nanotubes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0309162A FR2857954B1 (fr) 2003-07-25 2003-07-25 Procede de croissance localisee de nanofils ou nanotubes

Publications (2)

Publication Number Publication Date
FR2857954A1 FR2857954A1 (fr) 2005-01-28
FR2857954B1 true FR2857954B1 (fr) 2005-12-30

Family

ID=33561128

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0309162A Expired - Fee Related FR2857954B1 (fr) 2003-07-25 2003-07-25 Procede de croissance localisee de nanofils ou nanotubes

Country Status (2)

Country Link
FR (1) FR2857954B1 (fr)
WO (1) WO2005015596A2 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2909658B1 (fr) 2006-12-08 2009-01-16 Thales Sa Procece de fabrication de nanotubes de carbone a coeurs metalliques
FR2909801B1 (fr) * 2006-12-08 2009-01-30 Thales Sa Tube electronique a cathode froide
JP2010535541A (ja) 2007-08-03 2010-11-25 ボストン サイエンティフィック リミテッド 広い表面積を有する医療器具用のコーティング
WO2009131911A2 (fr) 2008-04-22 2009-10-29 Boston Scientific Scimed, Inc. Dispositifs médicaux revêtus d’une substance inorganique
WO2009132176A2 (fr) 2008-04-24 2009-10-29 Boston Scientific Scimed, Inc. Dispositifs médicaux comportant des couches de particules inorganiques
US8449603B2 (en) * 2008-06-18 2013-05-28 Boston Scientific Scimed, Inc. Endoprosthesis coating

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9416754D0 (en) * 1994-08-18 1994-10-12 Isis Innovation Field emitter structures
DE19602595A1 (de) * 1996-01-25 1997-07-31 Bosch Gmbh Robert Verfahren zur Herstellung von Feldemissionsspitzen
JP3008852B2 (ja) * 1996-06-21 2000-02-14 日本電気株式会社 電子放出素子およびその製造方法
US6525461B1 (en) * 1997-10-30 2003-02-25 Canon Kabushiki Kaisha Narrow titanium-containing wire, process for producing narrow titanium-containing wire, structure, and electron-emitting device
JP4069532B2 (ja) * 1999-01-11 2008-04-02 松下電器産業株式会社 カーボンインキ、電子放出素子、電子放出素子の製造方法、および画像表示装置
JP2000277003A (ja) * 1999-03-23 2000-10-06 Futaba Corp 電子放出源の製造方法及び電子放出源
EP1061554A1 (fr) * 1999-06-15 2000-12-20 Iljin Nanotech Co., Ltd. Source de lumière blanche à nanotubes de carbone et procédé de fabrication
US6538367B1 (en) * 1999-07-15 2003-03-25 Agere Systems Inc. Field emitting device comprising field-concentrating nanoconductor assembly and method for making the same
EP1225613A4 (fr) * 1999-10-12 2007-10-17 Matsushita Electric Ind Co Ltd Dispositif emetteur d'electrons et source d'electrons le contenant, afficheur d'image a effet de champ, lampe fluorescente et leurs procedes de production
KR100482241B1 (ko) * 2000-02-25 2005-04-13 샤프 가부시키가이샤 카본 나노튜브 및 그 제조 방법, 전자원 및 그 제조 방법및 표시 장치
JP2002025425A (ja) * 2000-07-07 2002-01-25 Hitachi Ltd 電子エミッターとその製造法および電子線装置

Also Published As

Publication number Publication date
FR2857954A1 (fr) 2005-01-28
WO2005015596A2 (fr) 2005-02-17
WO2005015596B1 (fr) 2006-06-01
WO2005015596A3 (fr) 2006-04-06

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