FR2855530B3 - STENCIL MASKING METHOD FOR PRODUCING VACUUM DEPOSITS ON A SUBSTRATE - Google Patents

STENCIL MASKING METHOD FOR PRODUCING VACUUM DEPOSITS ON A SUBSTRATE

Info

Publication number
FR2855530B3
FR2855530B3 FR0306758A FR0306758A FR2855530B3 FR 2855530 B3 FR2855530 B3 FR 2855530B3 FR 0306758 A FR0306758 A FR 0306758A FR 0306758 A FR0306758 A FR 0306758A FR 2855530 B3 FR2855530 B3 FR 2855530B3
Authority
FR
France
Prior art keywords
substrate
masking method
producing vacuum
vacuum deposits
stencil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR0306758A
Other languages
French (fr)
Other versions
FR2855530A3 (en
Inventor
Michel Martin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tecmachine SA
Original Assignee
Tecmachine SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tecmachine SA filed Critical Tecmachine SA
Priority to FR0306758A priority Critical patent/FR2855530B3/en
Publication of FR2855530A3 publication Critical patent/FR2855530A3/en
Application granted granted Critical
Publication of FR2855530B3 publication Critical patent/FR2855530B3/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Secondary Cells (AREA)
FR0306758A 2003-05-28 2003-05-28 STENCIL MASKING METHOD FOR PRODUCING VACUUM DEPOSITS ON A SUBSTRATE Expired - Lifetime FR2855530B3 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR0306758A FR2855530B3 (en) 2003-05-28 2003-05-28 STENCIL MASKING METHOD FOR PRODUCING VACUUM DEPOSITS ON A SUBSTRATE

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0306758A FR2855530B3 (en) 2003-05-28 2003-05-28 STENCIL MASKING METHOD FOR PRODUCING VACUUM DEPOSITS ON A SUBSTRATE

Publications (2)

Publication Number Publication Date
FR2855530A3 FR2855530A3 (en) 2004-12-03
FR2855530B3 true FR2855530B3 (en) 2005-04-15

Family

ID=33427622

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0306758A Expired - Lifetime FR2855530B3 (en) 2003-05-28 2003-05-28 STENCIL MASKING METHOD FOR PRODUCING VACUUM DEPOSITS ON A SUBSTRATE

Country Status (1)

Country Link
FR (1) FR2855530B3 (en)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2247579C3 (en) * 1972-09-28 1980-08-07 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Method for attaching vapor deposition masks on semiconductor wafers for solar cells
DE3139069A1 (en) * 1981-10-01 1983-04-14 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Method of producing patterned layers on the surface of a semiconductor
JPH01242768A (en) * 1988-03-24 1989-09-27 Fujitsu Ltd Mask vapor deposition method

Also Published As

Publication number Publication date
FR2855530A3 (en) 2004-12-03

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