FR2849277B1 - Procede de protection de la surface d'un plot de connexion d'une cellule de capteur d'image couleur a semi-conducteur lors d'un processus de colorisation - Google Patents

Procede de protection de la surface d'un plot de connexion d'une cellule de capteur d'image couleur a semi-conducteur lors d'un processus de colorisation

Info

Publication number
FR2849277B1
FR2849277B1 FR0216118A FR0216118A FR2849277B1 FR 2849277 B1 FR2849277 B1 FR 2849277B1 FR 0216118 A FR0216118 A FR 0216118A FR 0216118 A FR0216118 A FR 0216118A FR 2849277 B1 FR2849277 B1 FR 2849277B1
Authority
FR
France
Prior art keywords
plot
protecting
image sensor
color image
sensor cell
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0216118A
Other languages
English (en)
Other versions
FR2849277A1 (fr
Inventor
Baudouin Lecohier
Brendan Dunne
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics SA
Original Assignee
STMicroelectronics SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STMicroelectronics SA filed Critical STMicroelectronics SA
Priority to FR0216118A priority Critical patent/FR2849277B1/fr
Priority to US10/739,871 priority patent/US6951772B2/en
Publication of FR2849277A1 publication Critical patent/FR2849277A1/fr
Application granted granted Critical
Publication of FR2849277B1 publication Critical patent/FR2849277B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0216—Coatings
    • H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02162—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0232—Optical elements or arrangements associated with the device
    • H01L31/02327—Optical elements or arrangements associated with the device the optical elements being integrated or being directly associated to the device, e.g. back reflectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
FR0216118A 2002-12-18 2002-12-18 Procede de protection de la surface d'un plot de connexion d'une cellule de capteur d'image couleur a semi-conducteur lors d'un processus de colorisation Expired - Fee Related FR2849277B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR0216118A FR2849277B1 (fr) 2002-12-18 2002-12-18 Procede de protection de la surface d'un plot de connexion d'une cellule de capteur d'image couleur a semi-conducteur lors d'un processus de colorisation
US10/739,871 US6951772B2 (en) 2002-12-18 2003-12-18 Process for protection of the surface of a fixed contact for a semiconductor color image sensor cell during a coloring process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0216118A FR2849277B1 (fr) 2002-12-18 2002-12-18 Procede de protection de la surface d'un plot de connexion d'une cellule de capteur d'image couleur a semi-conducteur lors d'un processus de colorisation

Publications (2)

Publication Number Publication Date
FR2849277A1 FR2849277A1 (fr) 2004-06-25
FR2849277B1 true FR2849277B1 (fr) 2005-10-28

Family

ID=32406170

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0216118A Expired - Fee Related FR2849277B1 (fr) 2002-12-18 2002-12-18 Procede de protection de la surface d'un plot de connexion d'une cellule de capteur d'image couleur a semi-conducteur lors d'un processus de colorisation

Country Status (2)

Country Link
US (1) US6951772B2 (fr)
FR (1) FR2849277B1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100672698B1 (ko) * 2004-12-24 2007-01-24 동부일렉트로닉스 주식회사 씨모스 이미지 센서 및 그의 제조방법
KR100595329B1 (ko) * 2005-02-17 2006-07-03 동부일렉트로닉스 주식회사 씨모스 이미지 센서의 제조방법
US7295374B2 (en) * 2005-02-25 2007-11-13 Taiwan Semiconductor Manufacturing Co. Ltd. Micro-lens and micro-lens fabrication method
US7285079B2 (en) * 2005-03-16 2007-10-23 Steven T. Mandell Exercise device and methods
US7326503B2 (en) * 2005-08-22 2008-02-05 Micron Technology, Inc. Process for color filter array residual pigment removal
KR100769126B1 (ko) * 2005-12-29 2007-10-22 동부일렉트로닉스 주식회사 Ｃｍｏｓ 이미지 센서의 제조방법

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100215878B1 (ko) * 1996-12-28 1999-08-16 구본준 컬러 고체 촬상 소자의 제조 방법
US6396089B1 (en) * 1999-04-15 2002-05-28 United Microelectronics Corp. Semiconductor image sensor

Also Published As

Publication number Publication date
US6951772B2 (en) 2005-10-04
FR2849277A1 (fr) 2004-06-25
US20040185598A1 (en) 2004-09-23

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Legal Events

Date Code Title Description
TP Transmission of property
ST Notification of lapse

Effective date: 20070831