FR2845775B1 - OPTICAL WAVEGUIDE GUIDE WITH HIGH INDEX CONTRAST AND REDUCED RUGOSITY LOSSES, AND METHOD FOR MANUFACTURING THE SAME - Google Patents

OPTICAL WAVEGUIDE GUIDE WITH HIGH INDEX CONTRAST AND REDUCED RUGOSITY LOSSES, AND METHOD FOR MANUFACTURING THE SAME

Info

Publication number
FR2845775B1
FR2845775B1 FR0212592A FR0212592A FR2845775B1 FR 2845775 B1 FR2845775 B1 FR 2845775B1 FR 0212592 A FR0212592 A FR 0212592A FR 0212592 A FR0212592 A FR 0212592A FR 2845775 B1 FR2845775 B1 FR 2845775B1
Authority
FR
France
Prior art keywords
losses
manufacturing
optical waveguide
same
high index
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0212592A
Other languages
French (fr)
Other versions
FR2845775A1 (en
Inventor
Pierre Labeye
Michel Heitzmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR0212592A priority Critical patent/FR2845775B1/en
Priority to PCT/FR2003/050084 priority patent/WO2004034092A2/en
Publication of FR2845775A1 publication Critical patent/FR2845775A1/en
Application granted granted Critical
Publication of FR2845775B1 publication Critical patent/FR2845775B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1223—Basic optical elements, e.g. light-guiding paths high refractive index type, i.e. high-contrast waveguides
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biophysics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optical Integrated Circuits (AREA)
FR0212592A 2002-10-10 2002-10-10 OPTICAL WAVEGUIDE GUIDE WITH HIGH INDEX CONTRAST AND REDUCED RUGOSITY LOSSES, AND METHOD FOR MANUFACTURING THE SAME Expired - Fee Related FR2845775B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR0212592A FR2845775B1 (en) 2002-10-10 2002-10-10 OPTICAL WAVEGUIDE GUIDE WITH HIGH INDEX CONTRAST AND REDUCED RUGOSITY LOSSES, AND METHOD FOR MANUFACTURING THE SAME
PCT/FR2003/050084 WO2004034092A2 (en) 2002-10-10 2003-10-09 Optical waveguide with high index contrast and reduced losses due to roughness, and method of producing same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0212592A FR2845775B1 (en) 2002-10-10 2002-10-10 OPTICAL WAVEGUIDE GUIDE WITH HIGH INDEX CONTRAST AND REDUCED RUGOSITY LOSSES, AND METHOD FOR MANUFACTURING THE SAME

Publications (2)

Publication Number Publication Date
FR2845775A1 FR2845775A1 (en) 2004-04-16
FR2845775B1 true FR2845775B1 (en) 2005-01-07

Family

ID=32039602

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0212592A Expired - Fee Related FR2845775B1 (en) 2002-10-10 2002-10-10 OPTICAL WAVEGUIDE GUIDE WITH HIGH INDEX CONTRAST AND REDUCED RUGOSITY LOSSES, AND METHOD FOR MANUFACTURING THE SAME

Country Status (2)

Country Link
FR (1) FR2845775B1 (en)
WO (1) WO2004034092A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3105455A1 (en) * 2019-12-20 2021-06-25 Commissariat A L'energie Atomique Et Aux Energies Alternatives Waveguide manufacturing process
CN114400504A (en) * 2021-12-07 2022-04-26 中国航空工业集团公司北京长城计量测试技术研究所 Preparation method of low-loss silicon nitride waveguide

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2222465A (en) * 1988-09-03 1990-03-07 Marconi Gec Ltd Optical waveguide having low light loss
US5057022A (en) * 1989-03-20 1991-10-15 Miller Robert O Method of making a silicon integrated circuit waveguide
US5143577A (en) * 1991-02-08 1992-09-01 Hoechst Celanese Corporation Smooth-wall polymeric channel and rib waveguides exhibiting low optical loss
FR2726097B1 (en) * 1994-10-25 1996-11-15 Commissariat Energie Atomique ELECTRO-OPTICAL CELL WITH ELECTRIC TRANSVERSE MODE FOR A MODULATOR AND METHOD FOR MAKING SUCH A CELL
US6157765A (en) * 1998-11-03 2000-12-05 Lucent Technologies Planar waveguide optical amplifier

Also Published As

Publication number Publication date
WO2004034092A3 (en) 2004-07-29
FR2845775A1 (en) 2004-04-16
WO2004034092A2 (en) 2004-04-22

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20060630