WO2004034092A3 - Optical waveguide with high index contrast and reduced losses due to roughness, and method of producing same - Google Patents

Optical waveguide with high index contrast and reduced losses due to roughness, and method of producing same Download PDF

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Publication number
WO2004034092A3
WO2004034092A3 PCT/FR2003/050084 FR0350084W WO2004034092A3 WO 2004034092 A3 WO2004034092 A3 WO 2004034092A3 FR 0350084 W FR0350084 W FR 0350084W WO 2004034092 A3 WO2004034092 A3 WO 2004034092A3
Authority
WO
WIPO (PCT)
Prior art keywords
roughness
losses due
optical waveguide
core
high index
Prior art date
Application number
PCT/FR2003/050084
Other languages
French (fr)
Other versions
WO2004034092A2 (en
Inventor
Pierre Labeye
Michel Heitzmann
Original Assignee
Commissariat Energie Atomique
Pierre Labeye
Michel Heitzmann
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat Energie Atomique, Pierre Labeye, Michel Heitzmann filed Critical Commissariat Energie Atomique
Publication of WO2004034092A2 publication Critical patent/WO2004034092A2/en
Publication of WO2004034092A3 publication Critical patent/WO2004034092A3/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1223—Basic optical elements, e.g. light-guiding paths high refractive index type, i.e. high-contrast waveguides
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films

Abstract

The invention relates to an optical waveguide with high index contrast and reduced losses due to roughness and to the method of producing said guide. The invention is particularly suitable for optical telecommunications. The inventive waveguide comprises a core (12) having a refractive index Nc, which is disposed between first and second confinement layers (14, 16) having refractive indices N1 and N2 which are less than Nc. Said waveguide also comprises at least one intermediate layer (18) which extends along at least the length of the sides of the core and which is disposed between the core and the first confinement layer. The refractive index N3 of the intermediate layer is adapted to the refractive index Nc of the core and to the refractive index N1 of the first confinement layer in order to minimise the optical losses, N3 being less than Nc and greater than N1.
PCT/FR2003/050084 2002-10-10 2003-10-09 Optical waveguide with high index contrast and reduced losses due to roughness, and method of producing same WO2004034092A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR02/12592 2002-10-10
FR0212592A FR2845775B1 (en) 2002-10-10 2002-10-10 OPTICAL WAVEGUIDE GUIDE WITH HIGH INDEX CONTRAST AND REDUCED RUGOSITY LOSSES, AND METHOD FOR MANUFACTURING THE SAME

Publications (2)

Publication Number Publication Date
WO2004034092A2 WO2004034092A2 (en) 2004-04-22
WO2004034092A3 true WO2004034092A3 (en) 2004-07-29

Family

ID=32039602

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/FR2003/050084 WO2004034092A2 (en) 2002-10-10 2003-10-09 Optical waveguide with high index contrast and reduced losses due to roughness, and method of producing same

Country Status (2)

Country Link
FR (1) FR2845775B1 (en)
WO (1) WO2004034092A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3105455A1 (en) 2019-12-20 2021-06-25 Commissariat A L'energie Atomique Et Aux Energies Alternatives Waveguide manufacturing process
CN114400504A (en) * 2021-12-07 2022-04-26 中国航空工业集团公司北京长城计量测试技术研究所 Preparation method of low-loss silicon nitride waveguide

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0358414A2 (en) * 1988-09-03 1990-03-14 Gec-Marconi Limited Optical waveguide
US5057022A (en) * 1989-03-20 1991-10-15 Miller Robert O Method of making a silicon integrated circuit waveguide
US5143577A (en) * 1991-02-08 1992-09-01 Hoechst Celanese Corporation Smooth-wall polymeric channel and rib waveguides exhibiting low optical loss
US5825524A (en) * 1994-10-25 1998-10-20 Commissariat A L'energie Atomique Transverse electric mode electro-optic cell for a modulator and process for producing such a cell
US6157765A (en) * 1998-11-03 2000-12-05 Lucent Technologies Planar waveguide optical amplifier

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0358414A2 (en) * 1988-09-03 1990-03-14 Gec-Marconi Limited Optical waveguide
US5057022A (en) * 1989-03-20 1991-10-15 Miller Robert O Method of making a silicon integrated circuit waveguide
US5143577A (en) * 1991-02-08 1992-09-01 Hoechst Celanese Corporation Smooth-wall polymeric channel and rib waveguides exhibiting low optical loss
US5825524A (en) * 1994-10-25 1998-10-20 Commissariat A L'energie Atomique Transverse electric mode electro-optic cell for a modulator and process for producing such a cell
US6157765A (en) * 1998-11-03 2000-12-05 Lucent Technologies Planar waveguide optical amplifier

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
LEE K K ET AL: "Fabrication of ultralow-loss Si/SiO/sub 2/ waveguides by roughness reduction", OPTICS LETTERS, 1 DEC. 2001, OPT. SOC. AMERICA, USA, vol. 26, no. 23, pages 1888 - 1890, XP002244938, ISSN: 0146-9592 *
RIDDER DE R M ET AL: "SILICON OXYNITRIDE PLANAR WAVEGUIDING STRUCTURES FOR APPLICATION IN OPTICAL COMMUNICATION", IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, IEEE SERVICE CENTER, US, vol. 4, no. 6, November 1998 (1998-11-01), pages 930 - 937, XP000801339, ISSN: 1077-260X *

Also Published As

Publication number Publication date
WO2004034092A2 (en) 2004-04-22
FR2845775A1 (en) 2004-04-16
FR2845775B1 (en) 2005-01-07

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