FR2832022B1 - Procede et dispositif d'application in situ d'un champ electrique intense a puissance variable pour des traitements localises - Google Patents

Procede et dispositif d'application in situ d'un champ electrique intense a puissance variable pour des traitements localises

Info

Publication number
FR2832022B1
FR2832022B1 FR0114327A FR0114327A FR2832022B1 FR 2832022 B1 FR2832022 B1 FR 2832022B1 FR 0114327 A FR0114327 A FR 0114327A FR 0114327 A FR0114327 A FR 0114327A FR 2832022 B1 FR2832022 B1 FR 2832022B1
Authority
FR
France
Prior art keywords
electric field
variable power
intense electric
situ application
localized treatments
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0114327A
Other languages
English (en)
Other versions
FR2832022A1 (fr
Inventor
Christian Lincot
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to FR0114327A priority Critical patent/FR2832022B1/fr
Publication of FR2832022A1 publication Critical patent/FR2832022A1/fr
Application granted granted Critical
Publication of FR2832022B1 publication Critical patent/FR2832022B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32201—Generating means
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H05H1/461—Microwave discharges
    • H05H1/4622—Microwave discharges using waveguides

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
FR0114327A 2001-11-06 2001-11-06 Procede et dispositif d'application in situ d'un champ electrique intense a puissance variable pour des traitements localises Expired - Fee Related FR2832022B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR0114327A FR2832022B1 (fr) 2001-11-06 2001-11-06 Procede et dispositif d'application in situ d'un champ electrique intense a puissance variable pour des traitements localises

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0114327A FR2832022B1 (fr) 2001-11-06 2001-11-06 Procede et dispositif d'application in situ d'un champ electrique intense a puissance variable pour des traitements localises

Publications (2)

Publication Number Publication Date
FR2832022A1 FR2832022A1 (fr) 2003-05-09
FR2832022B1 true FR2832022B1 (fr) 2003-12-19

Family

ID=8869101

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0114327A Expired - Fee Related FR2832022B1 (fr) 2001-11-06 2001-11-06 Procede et dispositif d'application in situ d'un champ electrique intense a puissance variable pour des traitements localises

Country Status (1)

Country Link
FR (1) FR2832022B1 (fr)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0288468B1 (fr) * 1985-12-24 1992-11-11 ALTHAUS, John Edmund Appareil et procede de vidange de conteneurs
US5825485A (en) * 1995-11-03 1998-10-20 Cohn; Daniel R. Compact trace element sensor which utilizes microwave generated plasma and which is portable by an individual
IT1298891B1 (it) * 1998-02-06 2000-02-07 Ca Te V Centro Tecnologie Del Impianto da vuoto portatile provvisto di precamera per la deposizione di film sottili su superfici anche inamovibili.
FI103917B (fi) * 1998-06-25 1999-10-15 Elmatec Oy Kannettava mikroaaltokuivauslaite
RU2171554C2 (ru) * 1999-04-07 2001-07-27 Корчагин Юрий Владимирович Способ генерации плазмы и устройство для его осуществления

Also Published As

Publication number Publication date
FR2832022A1 (fr) 2003-05-09

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20080930