FR2820825B1 - PROBE CARD - Google Patents

PROBE CARD

Info

Publication number
FR2820825B1
FR2820825B1 FR0109992A FR0109992A FR2820825B1 FR 2820825 B1 FR2820825 B1 FR 2820825B1 FR 0109992 A FR0109992 A FR 0109992A FR 0109992 A FR0109992 A FR 0109992A FR 2820825 B1 FR2820825 B1 FR 2820825B1
Authority
FR
France
Prior art keywords
probe card
probe
card
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0109992A
Other languages
French (fr)
Other versions
FR2820825A1 (en
Inventor
Yukoh Iwasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/782,110 external-priority patent/US6558168B2/en
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of FR2820825A1 publication Critical patent/FR2820825A1/en
Application granted granted Critical
Publication of FR2820825B1 publication Critical patent/FR2820825B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
FR0109992A 2001-02-13 2001-07-26 PROBE CARD Expired - Fee Related FR2820825B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/782,110 US6558168B2 (en) 2000-02-15 2001-02-13 Probe card

Publications (2)

Publication Number Publication Date
FR2820825A1 FR2820825A1 (en) 2002-08-16
FR2820825B1 true FR2820825B1 (en) 2006-08-04

Family

ID=25124982

Family Applications (2)

Application Number Title Priority Date Filing Date
FR0109992A Expired - Fee Related FR2820825B1 (en) 2001-02-13 2001-07-26 PROBE CARD
FR0603892A Withdrawn FR2882824A1 (en) 2001-02-13 2006-05-02 PROBE CARD

Family Applications After (1)

Application Number Title Priority Date Filing Date
FR0603892A Withdrawn FR2882824A1 (en) 2001-02-13 2006-05-02 PROBE CARD

Country Status (1)

Country Link
FR (2) FR2820825B1 (en)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2197081A (en) * 1986-11-07 1988-05-11 Plessey Co Plc Coplanar waveguide probe
US4983907A (en) * 1987-05-14 1991-01-08 Intel Corporation Driven guard probe card
US5729150A (en) * 1995-12-01 1998-03-17 Cascade Microtech, Inc. Low-current probe card with reduced triboelectric current generating cables

Also Published As

Publication number Publication date
FR2820825A1 (en) 2002-08-16
FR2882824A1 (en) 2006-09-08

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20080331