FR2813205B1 - Procede d'epuration des effluents gazeux fluores - Google Patents
Procede d'epuration des effluents gazeux fluoresInfo
- Publication number
- FR2813205B1 FR2813205B1 FR0010905A FR0010905A FR2813205B1 FR 2813205 B1 FR2813205 B1 FR 2813205B1 FR 0010905 A FR0010905 A FR 0010905A FR 0010905 A FR0010905 A FR 0010905A FR 2813205 B1 FR2813205 B1 FR 2813205B1
- Authority
- FR
- France
- Prior art keywords
- purification
- gaseous effluents
- fluorinated gaseous
- fluorinated
- effluents
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/68—Halogens or halogen compounds
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0010905A FR2813205B1 (fr) | 2000-08-24 | 2000-08-24 | Procede d'epuration des effluents gazeux fluores |
PCT/FR2001/002667 WO2002016012A1 (fr) | 2000-08-24 | 2001-08-24 | Procede d'epuration des effluents gazeux fluores |
AU2001286010A AU2001286010A1 (en) | 2000-08-24 | 2001-08-24 | Method for purifying fluorinated gas effluents |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0010905A FR2813205B1 (fr) | 2000-08-24 | 2000-08-24 | Procede d'epuration des effluents gazeux fluores |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2813205A1 FR2813205A1 (fr) | 2002-03-01 |
FR2813205B1 true FR2813205B1 (fr) | 2003-07-25 |
Family
ID=8853714
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR0010905A Expired - Fee Related FR2813205B1 (fr) | 2000-08-24 | 2000-08-24 | Procede d'epuration des effluents gazeux fluores |
Country Status (3)
Country | Link |
---|---|
AU (1) | AU2001286010A1 (fr) |
FR (1) | FR2813205B1 (fr) |
WO (1) | WO2002016012A1 (fr) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012035000A1 (fr) * | 2010-09-15 | 2012-03-22 | Solvay Sa | Procédé pour l'élimination de f2 et/ou of2 d'un gaz |
DE102015101728A1 (de) * | 2015-02-06 | 2016-08-11 | Das Environmental Expert Gmbh | Verfahren zum Entfernen von Fluor aus fluorhaltigen Abgasen |
CN107890758B (zh) * | 2017-11-09 | 2020-11-24 | 中海油天津化工研究设计院有限公司 | 一种外循环式电化学污水处理厂除臭系统及方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62136230A (ja) * | 1985-12-10 | 1987-06-19 | Showa Denko Kk | ドライエツチング排ガスの処理方法 |
DE3915604A1 (de) * | 1989-05-12 | 1990-11-15 | Basf Ag | Verfahren zur reduktion von hypohalogeniten in alkalischen prozessloesungen |
US20010009652A1 (en) * | 1998-05-28 | 2001-07-26 | Jose I. Arno | Apparatus and method for point-of-use abatement of fluorocompounds |
-
2000
- 2000-08-24 FR FR0010905A patent/FR2813205B1/fr not_active Expired - Fee Related
-
2001
- 2001-08-24 WO PCT/FR2001/002667 patent/WO2002016012A1/fr active Application Filing
- 2001-08-24 AU AU2001286010A patent/AU2001286010A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
FR2813205A1 (fr) | 2002-03-01 |
WO2002016012A1 (fr) | 2002-02-28 |
AU2001286010A1 (en) | 2002-03-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |
Effective date: 20060428 |