FR2787923B1 - Element piezoelectrique, procede de fabrication de celui-ci et utilisation d'un tel element - Google Patents

Element piezoelectrique, procede de fabrication de celui-ci et utilisation d'un tel element

Info

Publication number
FR2787923B1
FR2787923B1 FR9916377A FR9916377A FR2787923B1 FR 2787923 B1 FR2787923 B1 FR 2787923B1 FR 9916377 A FR9916377 A FR 9916377A FR 9916377 A FR9916377 A FR 9916377A FR 2787923 B1 FR2787923 B1 FR 2787923B1
Authority
FR
France
Prior art keywords
manufacturing
same
piezoelectric element
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR9916377A
Other languages
English (en)
Other versions
FR2787923A1 (fr
Inventor
Carsten Schuh
Karl Lubitz
Dieter Cramer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of FR2787923A1 publication Critical patent/FR2787923A1/fr
Application granted granted Critical
Publication of FR2787923B1 publication Critical patent/FR2787923B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
    • H10N30/085—Shaping or machining of piezoelectric or electrostrictive bodies by machining
    • H10N30/086—Shaping or machining of piezoelectric or electrostrictive bodies by machining by polishing or grinding
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/503—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view
    • H10N30/505—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view the cross-section being annular

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Fuel-Injection Apparatus (AREA)
FR9916377A 1998-12-23 1999-12-23 Element piezoelectrique, procede de fabrication de celui-ci et utilisation d'un tel element Expired - Lifetime FR2787923B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19860001A DE19860001C2 (de) 1998-12-23 1998-12-23 Piezoelektrisches Bauelement, Verfahren zu dessen Herstellung und Verwendung eines derartigen Bauelements

Publications (2)

Publication Number Publication Date
FR2787923A1 FR2787923A1 (fr) 2000-06-30
FR2787923B1 true FR2787923B1 (fr) 2005-08-19

Family

ID=7892632

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9916377A Expired - Lifetime FR2787923B1 (fr) 1998-12-23 1999-12-23 Element piezoelectrique, procede de fabrication de celui-ci et utilisation d'un tel element

Country Status (3)

Country Link
US (1) US6232701B1 (fr)
DE (1) DE19860001C2 (fr)
FR (1) FR2787923B1 (fr)

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CN1246914C (zh) * 1999-12-16 2006-03-22 埃普科斯股份有限公司 压电元件及其制造方法
DE10006352A1 (de) * 2000-02-12 2001-08-30 Bosch Gmbh Robert Piezoelektrischer Keramikkörper mit silberhaltigen Innenelektroden
US6586889B1 (en) 2000-06-21 2003-07-01 Si Diamond Technology, Inc. MEMS field emission device
DE10041338A1 (de) * 2000-08-23 2002-03-14 Epcos Ag Verfahren zum Herstellen eines keramischen Vielschichtbauelements sowie Grünkörper für ein keramisches Vielschichtbauelement
DE10044481A1 (de) * 2000-09-08 2001-07-19 Bosch Gmbh Robert Schwingungsaufnehmer mit einstückigem Schwingungsaufnahmeelement sowie Verfahren zur Herstellung eines Schwingungsaufnahmeelements
DE10152490A1 (de) * 2000-11-06 2002-05-08 Ceramtec Ag Außenelektroden an piezokeramischen Vielschichtaktoren
US6734607B2 (en) * 2000-12-28 2004-05-11 Denso Corporation Integrally fired, laminated electromechanical transducing element
WO2002096647A1 (fr) * 2001-05-25 2002-12-05 Advanced Ceramics Research, Inc. Composants ceramiques a architectures multicouches et leurs procedes de fabrication
DE10141820A1 (de) * 2001-08-27 2003-03-20 Elliptec Resonant Actuator Ag Piezomotor mit Kupferelektroden
DE10144919A1 (de) 2001-09-12 2003-05-22 Siemens Ag Vorrichtung umfassend einen piezoelektrischen Aktor
WO2003038495A2 (fr) * 2001-10-22 2003-05-08 Siemens Aktiengesellschaft Dispositif de deplacement d'une pluralite d'objets, procede de realisation du dispositif de deplacement, et dispositif d'epissure d'une pluralite de guides d'ondes optiques
DE10207292B4 (de) * 2002-02-21 2005-08-11 Siemens Ag Piezostack und Verfahren zur Herstellung eines Piezostacks
US7304414B2 (en) 2002-05-06 2007-12-04 Epcos Ag Piezoactuator and method for the production thereof
US7122801B2 (en) * 2002-08-28 2006-10-17 Wayne State University System and method for generating chaotic sound for sonic infrared imaging of defects in materials
AU2003293826A1 (en) * 2002-08-28 2004-03-19 Siemens Westinghouse Power Company System for infrared imaging by inducing acoustic chaos
DE102004005226A1 (de) * 2004-02-03 2005-08-18 Robert Bosch Gmbh Piezoaktor mit einer Isolierschicht
BRPI0816948B1 (pt) * 2007-09-20 2018-01-23 Basf Se Composição fungicida, seus usos, agente fungicida, método para controlar fungos nocivos fitopatogênicos, e semente resistente a fungos nocivos fitopatogênicos
WO2009041476A1 (fr) * 2007-09-27 2009-04-02 Kyocera Corporation Elément piézoélectrique multicouche, injecteur équipé de cet élément et système d'injection de carburant
DE102008051932A1 (de) * 2008-10-16 2010-04-29 Continental Automotive Gmbh Verfahren und Vorrichtung zur Herstellung eines Piezokörpers
DE102010005906A1 (de) * 2010-01-27 2011-07-28 Epcos Ag, 81669 Piezoelektrisches Bauelement
DE102010063050B4 (de) * 2010-12-14 2021-02-11 Robert Bosch Gmbh Verfahren zur Herstellung von piezoelektrischen akustischen Wandlern
KR101659127B1 (ko) 2013-09-25 2016-09-22 삼성전기주식회사 압전 액추에이터 모듈의 제조방법
DE102013017350B4 (de) * 2013-10-17 2020-07-09 Tdk Electronics Ag Vielschichtbauelement und Verfahren zur Herstellung eines Vielschichtbauelements
US9496085B2 (en) 2014-01-03 2016-11-15 Hamilton Sundstrand Corporation Method of manufacturing an inductor coil
DE102020102028A1 (de) 2020-01-28 2021-07-29 Vega Grieshaber Kg Piezoelektrisch angetriebener Vibrationssensor

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US3564463A (en) * 1966-04-11 1971-02-16 Bell Telephone Labor Inc Monolithic piezoelectric filter having mass loaded electrodes for resonation regions acoustically coupled together
US4356421A (en) * 1980-03-25 1982-10-26 Tohoku Metal Industries, Ltd. Piezoelectric resonators of an energy-trapping type of a width extensional vibratory mode
JP2790178B2 (ja) * 1987-06-26 1998-08-27 株式会社村田製作所 電歪共振装置
DE69014954T2 (de) * 1989-04-07 1995-05-24 Mitsui Petrochemical Ind Geschichtete Keramikanordnung und Verfahren zu deren Herstellung.
US4903166A (en) * 1989-06-09 1990-02-20 Avx Corporation Electrostrictive actuators
EP0427901B1 (fr) * 1989-11-14 1996-04-03 Battelle Memorial Institute Procédé de fabrication d'un actionneur à couches piézoélectriques empilées
JPH04340778A (ja) * 1991-01-30 1992-11-27 Nec Corp 積層圧電アクチュエータ素子
US5168189A (en) * 1991-09-18 1992-12-01 Caterpillar Inc. Solderless connector for a solid state motor stack
US5218259A (en) * 1992-02-18 1993-06-08 Caterpillar Inc. Coating surrounding a piezoelectric solid state motor stack
JPH05267743A (ja) * 1992-03-23 1993-10-15 Sumitomo Metal Ind Ltd 積層型圧電アクチュエータの製造方法
JPH06334236A (ja) * 1993-05-20 1994-12-02 Fujitsu Ltd 積層型圧電・電歪アクチュエータの製造方法
DE19605214A1 (de) * 1995-02-23 1996-08-29 Bosch Gmbh Robert Ultraschallantriebselement
DE19615694C1 (de) * 1996-04-19 1997-07-03 Siemens Ag Monolithischer Vielschicht-Piezoaktor und Verfahren zur Herstellung
DE19715487C2 (de) * 1997-04-14 2002-06-13 Siemens Ag Piezoelektrischer Aktor mit einem Hohlprofil

Also Published As

Publication number Publication date
DE19860001C2 (de) 2001-10-04
US6232701B1 (en) 2001-05-15
FR2787923A1 (fr) 2000-06-30
DE19860001A1 (de) 2000-07-06

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