FR2786316B1 - Detection de particules chargees en mode double - Google Patents

Detection de particules chargees en mode double

Info

Publication number
FR2786316B1
FR2786316B1 FR9913789A FR9913789A FR2786316B1 FR 2786316 B1 FR2786316 B1 FR 2786316B1 FR 9913789 A FR9913789 A FR 9913789A FR 9913789 A FR9913789 A FR 9913789A FR 2786316 B1 FR2786316 B1 FR 2786316B1
Authority
FR
France
Prior art keywords
detection
dual mode
loaded particles
loaded
particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9913789A
Other languages
English (en)
Other versions
FR2786316A1 (fr
Inventor
Stephen Into
Paul Duval
Ira Rosenberg
Neil Casa
Kennet Braun
Vladimir Vayner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Schlumberger Technologies Inc
Original Assignee
Schlumberger Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schlumberger Technologies Inc filed Critical Schlumberger Technologies Inc
Publication of FR2786316A1 publication Critical patent/FR2786316A1/fr
Application granted granted Critical
Publication of FR2786316B1 publication Critical patent/FR2786316B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Radiation (AREA)
FR9913789A 1998-11-19 1999-11-04 Detection de particules chargees en mode double Expired - Fee Related FR2786316B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US19645698A 1998-11-19 1998-11-19

Publications (2)

Publication Number Publication Date
FR2786316A1 FR2786316A1 (fr) 2000-05-26
FR2786316B1 true FR2786316B1 (fr) 2003-11-07

Family

ID=22725495

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9913789A Expired - Fee Related FR2786316B1 (fr) 1998-11-19 1999-11-04 Detection de particules chargees en mode double

Country Status (4)

Country Link
JP (1) JP2000164167A (fr)
KR (1) KR20000034962A (fr)
DE (1) DE19953300A1 (fr)
FR (1) FR2786316B1 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10156275B4 (de) * 2001-11-16 2006-08-03 Leo Elektronenmikroskopie Gmbh Detektoranordnung und Detektionsverfahren
GB0226715D0 (en) * 2002-11-15 2002-12-24 Micromass Ltd Mass spectrometer
US7427752B2 (en) 2002-11-15 2008-09-23 Micromass Uk Limited Mass spectrometer
DE602005006967D1 (de) * 2005-03-17 2008-07-03 Integrated Circuit Testing Analyse-System und Teilchenstrahlgerät
DE602005010969D1 (de) 2005-03-17 2008-12-24 Integrated Circuit Testing Teilchenstrahlgerät für hohe räumliche Auflösung und verschiedene für perspektivische Abbildungsmethoden
JP4790393B2 (ja) * 2005-11-30 2011-10-12 日本電子株式会社 電子検出器及びそれを備えたビーム装置
JP2012199052A (ja) * 2011-03-22 2012-10-18 Jeol Ltd 電子検出機構及びそれを備えた荷電粒子線装置
US10777382B2 (en) * 2017-11-21 2020-09-15 Focus-Ebeam Technology (Beijing) Co., Ltd. Low voltage scanning electron microscope and method for specimen observation
KR102592510B1 (ko) * 2018-07-31 2023-10-20 삼성전자주식회사 라만 프로브 및 이를 이용한 생체 성분 분석 장치

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8602177A (nl) * 1986-08-27 1988-03-16 Philips Nv Electronen detectie met energie discriminatie.
US4958079A (en) * 1989-02-21 1990-09-18 Galileo Electro-Optics Corps. Detector for scanning electron microscopy apparatus
JP3291880B2 (ja) * 1993-12-28 2002-06-17 株式会社日立製作所 走査形電子顕微鏡
JP3434165B2 (ja) * 1997-04-18 2003-08-04 株式会社日立製作所 走査電子顕微鏡

Also Published As

Publication number Publication date
FR2786316A1 (fr) 2000-05-26
KR20000034962A (ko) 2000-06-26
DE19953300A1 (de) 2000-05-25
JP2000164167A (ja) 2000-06-16

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Legal Events

Date Code Title Description
ST Notification of lapse