FR2767489B1 - Piege refroidi et procede de piegage de vapeur d'eau avec un tel piege - Google Patents

Piege refroidi et procede de piegage de vapeur d'eau avec un tel piege

Info

Publication number
FR2767489B1
FR2767489B1 FR9810545A FR9810545A FR2767489B1 FR 2767489 B1 FR2767489 B1 FR 2767489B1 FR 9810545 A FR9810545 A FR 9810545A FR 9810545 A FR9810545 A FR 9810545A FR 2767489 B1 FR2767489 B1 FR 2767489B1
Authority
FR
France
Prior art keywords
trap
water vapor
cooled
trapping water
trapping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9810545A
Other languages
English (en)
Other versions
FR2767489A1 (fr
Inventor
Alan L Weeks
Stephen R Matte
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azenta Inc
Original Assignee
Helix Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Helix Technology Corp filed Critical Helix Technology Corp
Publication of FR2767489A1 publication Critical patent/FR2767489A1/fr
Application granted granted Critical
Publication of FR2767489B1 publication Critical patent/FR2767489B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps
    • Y10S417/901—Cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
FR9810545A 1997-08-20 1998-08-19 Piege refroidi et procede de piegage de vapeur d'eau avec un tel piege Expired - Fee Related FR2767489B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/915,035 US5901558A (en) 1997-08-20 1997-08-20 Water pump with integral gate valve

Publications (2)

Publication Number Publication Date
FR2767489A1 FR2767489A1 (fr) 1999-02-26
FR2767489B1 true FR2767489B1 (fr) 1999-10-29

Family

ID=25435107

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9810545A Expired - Fee Related FR2767489B1 (fr) 1997-08-20 1998-08-19 Piege refroidi et procede de piegage de vapeur d'eau avec un tel piege

Country Status (7)

Country Link
US (1) US5901558A (fr)
JP (1) JP4102856B2 (fr)
KR (1) KR100557708B1 (fr)
DE (1) DE19882618B4 (fr)
FR (1) FR2767489B1 (fr)
GB (1) GB2342698B (fr)
WO (1) WO1999009317A1 (fr)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6161576A (en) * 1999-06-23 2000-12-19 Mks Instruments, Inc. Integrated turbo pump and control valve system
US6263679B1 (en) 2000-04-05 2001-07-24 Helix Technology Corporation Particulate dam for cryopump flange
US6327863B1 (en) 2000-05-05 2001-12-11 Helix Technology Corporation Cryopump with gate valve control
SG105459A1 (en) * 2000-07-24 2004-08-27 Micron Technology Inc Mems heat pumps for integrated circuit heat dissipation
US6571821B2 (en) * 2001-07-13 2003-06-03 Varian, Inc. Energy conserving gate valve
US7194867B2 (en) * 2004-03-19 2007-03-27 Brooks Automation, Inc. Integrated rough/purge/vent (RPV) valve
CN100344872C (zh) * 2004-06-11 2007-10-24 中国科学院理化技术研究所 高真空深冷水汽捕集器
TW201107639A (en) * 2007-04-27 2011-03-01 Edwards Japan Ltd Plate rotating device, exhaust path opening degree changing device, exhausted device, transfer device, beam device, and gate valve
WO2010011403A2 (fr) * 2008-05-21 2010-01-28 Brooks Automation, Inc. Réfrigérateur cryogénique à entraînement linéaire
US20100011784A1 (en) * 2008-07-17 2010-01-21 Sumitomo Heavy Industries, Ltd. Cryopump louver extension
EP2598814A2 (fr) * 2010-07-30 2013-06-05 Brooks Automation, Inc. Cryopompe à haute vitesse pour réfrigérateurs multiples

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3485054A (en) * 1966-10-27 1969-12-23 Cryogenic Technology Inc Rapid pump-down vacuum chambers incorporating cryopumps
US3464223A (en) * 1967-12-28 1969-09-02 Us Army Trap pump for vacuum system
FR1584067A (fr) * 1968-07-30 1969-12-12
US4214853A (en) * 1978-05-15 1980-07-29 Cha Industries Evacuation apparatus with cryogenic pump and trap assembly
US4311018A (en) * 1979-12-17 1982-01-19 Varian Associates, Inc. Cryogenic pump
US4449373A (en) * 1983-02-28 1984-05-22 Helix Technology Corporation Reduced vacuum cryopump
DE3512614A1 (de) * 1985-04-06 1986-10-16 Leybold-Heraeus GmbH, 5000 Köln Verfahren zur inbetriebnahme und/oder regenerierung einer kryopumpe und fuer dieses verfahren geeignete kryopumpe
US4873833A (en) * 1988-11-23 1989-10-17 American Telephone Telegraph Company, At&T Bell Laboratories Apparatus comprising a high-vacuum chamber
JP2538796B2 (ja) * 1989-05-09 1996-10-02 株式会社東芝 真空排気装置および真空排気方法
US5261244A (en) * 1992-05-21 1993-11-16 Helix Technology Corporation Cryogenic waterpump
EP0610666B1 (fr) * 1993-01-11 1998-04-15 Applied Materials, Inc. Pompe turbomoléculaire
US5483803A (en) * 1993-06-16 1996-01-16 Helix Technology Corporation High conductance water pump
JP2719298B2 (ja) * 1993-07-29 1998-02-25 アプライド マテリアルズ インコーポレイテッド 真空装置の冷却構造

Also Published As

Publication number Publication date
US5901558A (en) 1999-05-11
KR20010023133A (ko) 2001-03-26
JP2001515181A (ja) 2001-09-18
DE19882618B4 (de) 2008-08-14
GB0002962D0 (en) 2000-03-29
KR100557708B1 (ko) 2006-03-07
JP4102856B2 (ja) 2008-06-18
GB2342698B (en) 2001-04-11
DE19882618T1 (de) 2000-08-10
WO1999009317A1 (fr) 1999-02-25
GB2342698A (en) 2000-04-19
FR2767489A1 (fr) 1999-02-26

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20090430