FR2765400B1 - Procede pour fabriquer une structure en materiau semi-conducteur et structure en materiau semi-conducteur absorbant les infrarouges, a bande interdite variable - Google Patents
Procede pour fabriquer une structure en materiau semi-conducteur et structure en materiau semi-conducteur absorbant les infrarouges, a bande interdite variableInfo
- Publication number
- FR2765400B1 FR2765400B1 FR9803477A FR9803477A FR2765400B1 FR 2765400 B1 FR2765400 B1 FR 2765400B1 FR 9803477 A FR9803477 A FR 9803477A FR 9803477 A FR9803477 A FR 9803477A FR 2765400 B1 FR2765400 B1 FR 2765400B1
- Authority
- FR
- France
- Prior art keywords
- semiconductor material
- variable
- manufacturing
- infrared absorbent
- prohibited band
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000463 material Substances 0.000 title 2
- 239000004065 semiconductor Substances 0.000 title 2
- 230000002745 absorbent Effects 0.000 title 1
- 239000002250 absorbent Substances 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1828—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIBVI compounds, e.g. CdS, ZnS, CdTe
- H01L31/1832—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIBVI compounds, e.g. CdS, ZnS, CdTe comprising ternary compounds, e.g. Hg Cd Te
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/0296—Inorganic materials including, apart from doping material or other impurities, only AIIBVI compounds, e.g. CdS, ZnS, HgCdTe
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Light Receiving Elements (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/882,881 US5998235A (en) | 1997-06-26 | 1997-06-26 | Method of fabrication for mercury-based quaternary alloys of infrared sensitive materials |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2765400A1 FR2765400A1 (fr) | 1998-12-31 |
FR2765400B1 true FR2765400B1 (fr) | 1999-09-10 |
Family
ID=25381532
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR9803477A Expired - Lifetime FR2765400B1 (fr) | 1997-06-26 | 1998-03-20 | Procede pour fabriquer une structure en materiau semi-conducteur et structure en materiau semi-conducteur absorbant les infrarouges, a bande interdite variable |
Country Status (6)
Country | Link |
---|---|
US (2) | US5998235A (fr) |
JP (1) | JPH1126781A (fr) |
FR (1) | FR2765400B1 (fr) |
GB (1) | GB2326762B (fr) |
IL (1) | IL125108A (fr) |
NO (1) | NO982962L (fr) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4211153B2 (ja) * | 1999-09-17 | 2009-01-21 | ソニー株式会社 | 記録装置および方法 |
US6429103B1 (en) * | 2000-04-13 | 2002-08-06 | Motorola, Inc. | MOCVD-grown emode HIGFET buffer |
DE10149265A1 (de) * | 2001-10-05 | 2003-04-17 | Giesecke & Devrient Gmbh | Gegenstand mit Sicherheitsmarkierung |
US7041983B2 (en) * | 2001-10-12 | 2006-05-09 | Lockheed Martin Corporation | Planar geometry buried junction infrared detector and focal plane array |
EP1588406B1 (fr) * | 2003-01-27 | 2019-07-10 | Taiwan Semiconductor Manufacturing Company, Ltd. | Structures a semi-conducteur a homogeneite structurelle |
JP2007535129A (ja) * | 2003-12-01 | 2007-11-29 | ザ レジェンツ オブ ザ ユニバーシティー オブ カリフォルニア | 光起電装置用の多重帯域半導体組成物 |
US7518207B1 (en) * | 2004-03-19 | 2009-04-14 | The United States Of America As Represented By The Secretary Of The Navy | Molecular beam epitaxy growth of ternary and quaternary metal chalcogenide films |
CN100508220C (zh) * | 2004-04-13 | 2009-07-01 | 中国科学院福建物质结构研究所 | 系列类碲镉汞红外材料及其制备方法和用途 |
CN1332429C (zh) * | 2004-07-22 | 2007-08-15 | 中芯国际集成电路制造(上海)有限公司 | 除去半导体器件的焊盘区中的晶格缺陷的方法 |
CN1298022C (zh) * | 2004-07-27 | 2007-01-31 | 中国科学院上海技术物理研究所 | 用于碲镉汞外延生长的数字合金复合衬底及制备方法 |
US7865944B1 (en) * | 2004-09-10 | 2011-01-04 | Juniper Networks, Inc. | Intercepting GPRS data |
US8664524B2 (en) | 2008-07-17 | 2014-03-04 | Uriel Solar, Inc. | High power efficiency, large substrate, polycrystalline CdTe thin film semiconductor photovoltaic cell structures grown by molecular beam epitaxy at high deposition rate for use in solar electricity generation |
FR2977372B1 (fr) * | 2011-06-30 | 2015-12-18 | Soc Fr Detecteurs Infrarouges Sofradir | Procede pour la realisation d'un detecteur de rayonnement electro-magnetique et detecteur obtenu par ce procede |
RU2529457C1 (ru) * | 2013-07-17 | 2014-09-27 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Национальный исследовательский Томский государственный университет" (ТГУ) | Фоточувствительная к инфракрасному излучению структура и способ ее изготовления |
Family Cites Families (40)
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---|---|---|---|---|
US4213797A (en) * | 1978-03-23 | 1980-07-22 | Arden Sher | Radiant energy to electric energy converter |
DE3168017D1 (en) * | 1980-05-27 | 1985-02-14 | Secr Defence Brit | Manufacture of cadmium mercury telluride |
US4376659A (en) * | 1981-06-01 | 1983-03-15 | Texas Instruments Incorporated | Process for forming semiconductor alloys having a desired bandgap |
US4343881A (en) * | 1981-07-06 | 1982-08-10 | Savin Corporation | Multilayer photoconductive assembly with intermediate heterojunction |
JPS59195881A (ja) * | 1983-04-20 | 1984-11-07 | Fujitsu Ltd | 半導体装置の製造方法 |
US4779004A (en) * | 1983-08-31 | 1988-10-18 | Texas Instruments Incorporated | Infrared imager |
GB8324531D0 (en) * | 1983-09-13 | 1983-10-12 | Secr Defence | Cadmium mercury telluride |
US4697202A (en) * | 1984-02-02 | 1987-09-29 | Sri International | Integrated circuit having dislocation free substrate |
US4589192A (en) * | 1984-11-02 | 1986-05-20 | The United States Of America As Represented By The Secretary Of The Army | Hybrid epitaxial growth process |
US4603258A (en) * | 1984-11-16 | 1986-07-29 | Sri International | Photocapacitive detector array |
US4689650A (en) * | 1985-10-03 | 1987-08-25 | The United States Of America As Represented By The Secretary Of The Army | Infrared epitaxial detector structure and method of making same |
US4731640A (en) * | 1986-05-20 | 1988-03-15 | Westinghouse Electric Corp. | High resistance photoconductor structure for multi-element infrared detector arrays |
US4719124A (en) * | 1986-07-28 | 1988-01-12 | American Telephone And Telegraph Company At&T Bell Laboratories | Low temperature deposition utilizing organometallic compounds |
US4753684A (en) * | 1986-10-31 | 1988-06-28 | The Standard Oil Company | Photovoltaic heterojunction structures |
US4764261A (en) * | 1986-10-31 | 1988-08-16 | Stemcor Corporation | Method of making improved photovoltaic heterojunction structures |
US4735662A (en) * | 1987-01-06 | 1988-04-05 | The Standard Oil Company | Stable ohmic contacts to thin films of p-type tellurium-containing II-VI semiconductors |
US4824520A (en) * | 1987-03-19 | 1989-04-25 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Liquid encapsulated crystal growth |
US4885619A (en) * | 1987-08-24 | 1989-12-05 | Santa Barbara Research Center | HgCdTe MIS device having a CdTe heterojunction |
US4783594A (en) * | 1987-11-20 | 1988-11-08 | Santa Barbara Research Center | Reticular detector array |
US4970567A (en) * | 1987-11-23 | 1990-11-13 | Santa Barbara Research Center | Method and apparatus for detecting infrared radiation |
US4956304A (en) * | 1988-04-07 | 1990-09-11 | Santa Barbara Research Center | Buried junction infrared photodetector process |
US5063166A (en) * | 1988-04-29 | 1991-11-05 | Sri International | Method of forming a low dislocation density semiconductor device |
US5068695A (en) * | 1988-04-29 | 1991-11-26 | Sri International | Low dislocation density semiconductor device |
US4916088A (en) * | 1988-04-29 | 1990-04-10 | Sri International | Method of making a low dislocation density semiconductor device |
US4862236A (en) * | 1988-08-02 | 1989-08-29 | Rockwell International Corporation | HgMnCdTe avalanche photodiode |
US4952811A (en) * | 1989-06-21 | 1990-08-28 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Field induced gap infrared detector |
US5037621A (en) * | 1989-11-09 | 1991-08-06 | The United States Of America As Represented By The Secretary Of The Army | System for the in-situ visualization of a solid liquid interface during crystal growth |
US5113076A (en) * | 1989-12-19 | 1992-05-12 | Santa Barbara Research Center | Two terminal multi-band infrared radiation detector |
JPH03237762A (ja) * | 1990-02-15 | 1991-10-23 | Nippon Steel Corp | テルル化水銀カドミウム薄膜形成方法及び赤外線検出装置 |
JPH04246860A (ja) * | 1991-02-01 | 1992-09-02 | Fujitsu Ltd | 光電変換装置 |
US5264699A (en) * | 1991-02-20 | 1993-11-23 | Amber Engineering, Inc. | Infrared detector hybrid array with improved thermal cycle reliability and method for making same |
US5308980A (en) * | 1991-02-20 | 1994-05-03 | Amber Engineering, Inc. | Thermal mismatch accommodated infrared detector hybrid array |
JP3263964B2 (ja) * | 1992-01-31 | 2002-03-11 | 富士通株式会社 | 半導体装置形成用結晶とその製造方法 |
EP0635892B1 (fr) * | 1992-07-21 | 2002-06-26 | Raytheon Company | Photodétecteur en HgCdTe stable au recuit et procédé pour sa fabrication |
US5296384A (en) * | 1992-07-21 | 1994-03-22 | Santa Barbara Research Center | Bake-stable HgCdTe photodetector and method for fabricating same |
US5306386A (en) * | 1993-04-06 | 1994-04-26 | Hughes Aircraft Company | Arsenic passivation for epitaxial deposition of ternary chalcogenide semiconductor films onto silicon substrates |
US5454002A (en) * | 1994-04-28 | 1995-09-26 | The Board Of Regents Of The University Of Oklahoma | High temperature semiconductor diode laser |
US5483088A (en) * | 1994-08-12 | 1996-01-09 | S.R.I. International | Compounds and infrared devices including In1-x Tlx Q, where Q is As1-y Py and 0≦y≦1 |
JP2570646B2 (ja) * | 1994-12-13 | 1997-01-08 | 日本電気株式会社 | Siベ−ス半導体結晶基板及びその製造方法 |
US5959299A (en) * | 1996-04-04 | 1999-09-28 | Raytheon Company | Uncooled infrared sensors for the detection and identification of chemical products of combustion |
-
1997
- 1997-06-26 US US08/882,881 patent/US5998235A/en not_active Expired - Lifetime
-
1998
- 1998-03-20 FR FR9803477A patent/FR2765400B1/fr not_active Expired - Lifetime
- 1998-06-23 GB GB9813545A patent/GB2326762B/en not_active Expired - Lifetime
- 1998-06-25 NO NO982962A patent/NO982962L/no not_active Application Discontinuation
- 1998-06-25 IL IL12510898A patent/IL125108A/en not_active IP Right Cessation
- 1998-06-26 JP JP10195154A patent/JPH1126781A/ja active Pending
-
1999
- 1999-03-01 US US09/259,877 patent/US6208005B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
GB2326762B (en) | 2003-01-22 |
GB2326762A (en) | 1998-12-30 |
FR2765400A1 (fr) | 1998-12-31 |
GB9813545D0 (en) | 1998-08-19 |
US6208005B1 (en) | 2001-03-27 |
IL125108A0 (en) | 1999-01-26 |
IL125108A (en) | 2001-04-30 |
NO982962L (no) | 1998-12-28 |
JPH1126781A (ja) | 1999-01-29 |
NO982962D0 (no) | 1998-06-25 |
US5998235A (en) | 1999-12-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
TP | Transmission of property |
Owner name: XYLON LLC, US Effective date: 20110907 |
|
PLFP | Fee payment |
Year of fee payment: 19 |
|
PLFP | Fee payment |
Year of fee payment: 20 |