FR2762240B1 - METHOD AND DEVICE FOR CLEANING ELECTRONIC COMPONENTS BY MEDIUM OR HIGH FREQUENCY - Google Patents

METHOD AND DEVICE FOR CLEANING ELECTRONIC COMPONENTS BY MEDIUM OR HIGH FREQUENCY

Info

Publication number
FR2762240B1
FR2762240B1 FR9705035A FR9705035A FR2762240B1 FR 2762240 B1 FR2762240 B1 FR 2762240B1 FR 9705035 A FR9705035 A FR 9705035A FR 9705035 A FR9705035 A FR 9705035A FR 2762240 B1 FR2762240 B1 FR 2762240B1
Authority
FR
France
Prior art keywords
medium
high frequency
electronic components
cleaning electronic
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9705035A
Other languages
French (fr)
Other versions
FR2762240A1 (en
Inventor
George Lucien Michel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to FR9705035A priority Critical patent/FR2762240B1/en
Publication of FR2762240A1 publication Critical patent/FR2762240A1/en
Application granted granted Critical
Publication of FR2762240B1 publication Critical patent/FR2762240B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
FR9705035A 1997-04-18 1997-04-18 METHOD AND DEVICE FOR CLEANING ELECTRONIC COMPONENTS BY MEDIUM OR HIGH FREQUENCY Expired - Fee Related FR2762240B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR9705035A FR2762240B1 (en) 1997-04-18 1997-04-18 METHOD AND DEVICE FOR CLEANING ELECTRONIC COMPONENTS BY MEDIUM OR HIGH FREQUENCY

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9705035A FR2762240B1 (en) 1997-04-18 1997-04-18 METHOD AND DEVICE FOR CLEANING ELECTRONIC COMPONENTS BY MEDIUM OR HIGH FREQUENCY

Publications (2)

Publication Number Publication Date
FR2762240A1 FR2762240A1 (en) 1998-10-23
FR2762240B1 true FR2762240B1 (en) 1999-07-09

Family

ID=9506241

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9705035A Expired - Fee Related FR2762240B1 (en) 1997-04-18 1997-04-18 METHOD AND DEVICE FOR CLEANING ELECTRONIC COMPONENTS BY MEDIUM OR HIGH FREQUENCY

Country Status (1)

Country Link
FR (1) FR2762240B1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6314974B1 (en) * 1999-06-28 2001-11-13 Fairchild Semiconductor Corporation Potted transducer array with matching network in a multiple pass configuration
US7040330B2 (en) * 2003-02-20 2006-05-09 Lam Research Corporation Method and apparatus for megasonic cleaning of patterned substrates
EP1652224A2 (en) 2003-07-31 2006-05-03 FSI International, Inc. Controlled growth of highly uniform, oxide layers, especially ultrathin layers
TW200515475A (en) * 2003-09-11 2005-05-01 Fsi Int Inc Acoustic diffusers for acoustic field uniformity
TWI393595B (en) * 2006-03-17 2013-04-21 Michale Goodson J Megasonic processing apparatus with frequencey sweeping of thickness mode transducers
US8327861B2 (en) 2006-12-19 2012-12-11 Lam Research Corporation Megasonic precision cleaning of semiconductor process equipment components and parts

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3151846A (en) * 1962-09-21 1964-10-06 Peter D George Vibratory device for cleaning dentures and the like
US3329408A (en) * 1965-03-29 1967-07-04 Branson Instr Transducer mounting arrangement
US3432148A (en) * 1967-08-21 1969-03-11 Paul P Krolik Vibratory devices for cleaning dentures or the like
GB2097890B (en) * 1981-05-01 1985-06-12 Boulton Ltd William Ultrasonic cleaning
GB2129130B (en) * 1982-09-13 1986-02-05 Atomic Energy Authority Uk Fluid temperature change detector
FR2580198B1 (en) * 1985-04-16 1988-09-09 Omega Formation DEVICE FOR CLEANING MECHANICAL PARTS BY ULTRASOUND
US5037481B1 (en) * 1987-04-29 1993-05-11 Verteq, Inc. Megasonic cleaning method
US4804007A (en) * 1987-04-29 1989-02-14 Verteq, Inc. Cleaning apparatus
DE4122561A1 (en) * 1991-07-08 1993-01-14 Holle Hans Joachim Filter for ultrasonic cleaning bath - has filter cleaned by oscillating nozzle and canals inserted in some of its perforations to prevent return flow of particles.
KR940019363A (en) * 1993-02-22 1994-09-14 요시히데 시바노 Oscillator Oscillation Method in Ultrasonic Cleaning
DE4343799A1 (en) * 1993-12-22 1995-06-29 Erich Dipl Ing Becker Washing, cleaning and drying textiles

Also Published As

Publication number Publication date
FR2762240A1 (en) 1998-10-23

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Legal Events

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ST Notification of lapse