FR2760889B1 - DEVICE AND METHOD FOR MODULATING AN X-RAY BEAM - Google Patents

DEVICE AND METHOD FOR MODULATING AN X-RAY BEAM

Info

Publication number
FR2760889B1
FR2760889B1 FR9703031A FR9703031A FR2760889B1 FR 2760889 B1 FR2760889 B1 FR 2760889B1 FR 9703031 A FR9703031 A FR 9703031A FR 9703031 A FR9703031 A FR 9703031A FR 2760889 B1 FR2760889 B1 FR 2760889B1
Authority
FR
France
Prior art keywords
modulating
ray beam
ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9703031A
Other languages
French (fr)
Other versions
FR2760889A1 (en
Inventor
Dimitry Roshchupkin
Michel Brunel
Tachoueres Remi Tucoulou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR9703031A priority Critical patent/FR2760889B1/en
Publication of FR2760889A1 publication Critical patent/FR2760889A1/en
Application granted granted Critical
Publication of FR2760889B1 publication Critical patent/FR2760889B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
    • G21K1/062—Devices having a multilayer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
FR9703031A 1997-03-13 1997-03-13 DEVICE AND METHOD FOR MODULATING AN X-RAY BEAM Expired - Fee Related FR2760889B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR9703031A FR2760889B1 (en) 1997-03-13 1997-03-13 DEVICE AND METHOD FOR MODULATING AN X-RAY BEAM

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9703031A FR2760889B1 (en) 1997-03-13 1997-03-13 DEVICE AND METHOD FOR MODULATING AN X-RAY BEAM

Publications (2)

Publication Number Publication Date
FR2760889A1 FR2760889A1 (en) 1998-09-18
FR2760889B1 true FR2760889B1 (en) 1999-07-30

Family

ID=9504734

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9703031A Expired - Fee Related FR2760889B1 (en) 1997-03-13 1997-03-13 DEVICE AND METHOD FOR MODULATING AN X-RAY BEAM

Country Status (1)

Country Link
FR (1) FR2760889B1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1395857A2 (en) * 2001-06-01 2004-03-10 Xenocs Method for controlled modification of the reflective qualities of a multi-layer
RU2501000C1 (en) * 2012-06-06 2013-12-10 Федеральное государственное бюджетное учреждение науки Институт проблем технологии микроэлектроники и особочистых материалов Российской академии наук (ИПТМ РАН) High-frequency acousto-optical x-ray modulator

Also Published As

Publication number Publication date
FR2760889A1 (en) 1998-09-18

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Legal Events

Date Code Title Description
ST Notification of lapse