FR2738343A1 - Optical microstratigraphy equipment - Google Patents
Optical microstratigraphy equipment Download PDFInfo
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- FR2738343A1 FR2738343A1 FR9510401A FR9510401A FR2738343A1 FR 2738343 A1 FR2738343 A1 FR 2738343A1 FR 9510401 A FR9510401 A FR 9510401A FR 9510401 A FR9510401 A FR 9510401A FR 2738343 A1 FR2738343 A1 FR 2738343A1
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- 230000003287 optical effect Effects 0.000 title claims abstract description 22
- 239000013307 optical fiber Substances 0.000 claims abstract description 19
- 239000000523 sample Substances 0.000 claims abstract description 15
- 238000012545 processing Methods 0.000 claims abstract description 5
- 230000004907 flux Effects 0.000 claims description 12
- 239000000835 fiber Substances 0.000 claims description 10
- 238000001514 detection method Methods 0.000 claims description 6
- 238000005516 engineering process Methods 0.000 claims description 4
- 230000008878 coupling Effects 0.000 claims description 3
- 238000010168 coupling process Methods 0.000 claims description 3
- 238000005859 coupling reaction Methods 0.000 claims description 3
- 230000004807 localization Effects 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 3
- 230000003595 spectral effect Effects 0.000 claims description 3
- 238000013519 translation Methods 0.000 claims description 3
- 230000032258 transport Effects 0.000 claims description 3
- 239000006185 dispersion Substances 0.000 claims description 2
- 230000005693 optoelectronics Effects 0.000 claims description 2
- 230000014616 translation Effects 0.000 claims 2
- 238000005259 measurement Methods 0.000 description 13
- 238000012512 characterization method Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000010183 spectrum analysis Methods 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000001314 profilometry Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 210000003850 cellular structure Anatomy 0.000 description 1
- 238000010226 confocal imaging Methods 0.000 description 1
- 210000004087 cornea Anatomy 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 210000003128 head Anatomy 0.000 description 1
- 238000000338 in vitro Methods 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 210000001525 retina Anatomy 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0052—Optical details of the image generation
- G02B21/0064—Optical details of the image generation multi-spectral or wavelength-selective arrangements, e.g. wavelength fan-out, chromatic profiling
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
- G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Optics & Photonics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Description
La présente invention concerne un dispositif de microstratigraphie optique fonctionnant sur le principe de l'imagerie confocale à profondeur de champ étendue codée chromatiquement, permettant la détection et la localisation simultanées et en un instantané d'une ou de plusieurs interfaces située(s) à l'intérieur d'un objet et caractérisée(s) par son (leurs) saut(s) d'indice de réfraction complexe(s) respectifs(s).The present invention relates to an optical microstratigraphy device operating on the principle of confocal imaging with extended depth of field chromatically coded, allowing the simultaneous detection and localization of one or more interfaces located at the same time. interior of an object and characterized by its jump (s) in the respective complex refractive index (s).
Le dispositif optoélectronique comprend quatre éléments * Une sonde optique dont le chromatisme axial connu code l'espace de mesure selon un
segment de droite correspondant à sa profondeur de champ.The optoelectronic device comprises four elements * An optical probe whose known axial chromatism codes the measurement space according to a
line segment corresponding to its depth of field.
* Un boîtier commun à l'éclairage et à la détection comprenant
. une source lumineuse polychromatique à spectre continu,
. un dispositif d'analyse spectrale du flux réfléchi/rétrodiffùs par la(les) interfaces
située(s) dans la profondeur de champ du codage,
.un détecteur photoélectrique linéaire multiéléments permettant la détermination
simultanée des positions des interfaces, chacune étant caractérisée par la longueur
d'onde centrale du pic qui lui est associé sur le signal analogique issu du détecteur.* A common lighting and detection box including
. a polychromatic continuous spectrum light source,
. a spectral analysis device for the flux reflected / backscattered by the interface (s)
located in the depth of field of the coding,
a linear multi-element photoelectric detector allowing the determination
simultaneous positions of the interfaces, each characterized by the length
central wave of the peak associated with it on the analog signal from the detector.
* Un système intégré à entrées/sorties sur fibres optiques de type coupleur ou circulateur
optique, permettant de relier la sonde au boîtier commun à l'éclairage et à la détection, et
de réaliser la séparation entre les flux lumineux de codage (de la source vers la sonde) et
de mesure (de la sonde vers l'analyseur spectral).* An integrated system with inputs / outputs on optical fibers of the coupler or circulator type
optical, allowing the probe to be connected to the common box for lighting and detection, and
to separate the coding light fluxes (from the source to the probe) and
measurement (from the probe to the spectral analyzer).
* Des moyens électroniques et informatiques permettant d'enregistrer, traiter et visualiser
les signaux acquis et d'en extraire en temps réel les informations recherchées telles que les
positions respectives de toutes les interfaces observées, les écarts d'indice de réfraction et
l'ensemble des caractérisations optiques qui en découlent.* Electronic and computer means for recording, processing and viewing
the signals acquired and extract from them in real time the information sought such as the
respective positions of all observed interfaces, differences in refractive index and
all the optical characterizations which result therefrom.
Certains travaux, récemment publiés sous forme de Brevets et/ou d'articles dans des revues spécialisées, sont parfaitement connus de l'homme de l'art et briévement examinés ci-aprês. Certain works, recently published in the form of Patents and / or articles in specialized journals, are perfectly known to those skilled in the art and briefly examined below.
Ces travaux peuvent être classés en deux grandes familles en distinguant: ~D'une part les dispositifs utilisant l'association du chromatisme axial d'objectifs à un
système optique de type confocal, comme les brevets EP 0142464 ou EP 0327425, ou la
publication de H.J.TIZIANI (APPLIED OPTICS Vol 33 N"10, avril 1994).These works can be classified into two main families, distinguishing: ~ On the one hand, devices using the association of axial chromaticism of objectives with a
confocal type optical system, such as patents EP 0142464 or EP 0327425, or the
publication of HJTIZIANI (APPLIED OPTICS Vol 33 N "10, April 1994).
- D'autre part les dispositifs permettant de déporter au moyen de fibres optiques un ou
plusieurs éléments d'un systéme optique de type confocal, comme dans les publications de
T.DABBS (APPLED OPTICS, Vol3 1 N"6, Février 1992), qui déporte la source laser et
le détecteur au moyen de fibres optiques, ou A.F.GMITRO (OPTICS LETTERS, Volt8
N"8, Avril 1993) qui déporte la zone d'observation d'un microscope confocal à balayage
au moyen d'un faisceau ordonné de fibres optiques, ou encore T.DABBS (APPLIED
OPTICS, Vol3 1 N"16, Juin1992) qui utilise un coupleur monomode pour le déport de la
tête de mesure d'un microscope confocal laser.- On the other hand, the devices making it possible to deport by means of optical fibers one or
several elements of a confocal type optical system, as in the publications of
T. DABBS (APPLED OPTICS, Vol3 1 N "6, February 1992), which deports the laser source and
the detector by means of optical fibers, or AFGMITRO (OPTICS LETTERS, Volt8
No. 8, April 1993) which deported the observation area from a confocal scanning microscope
by means of an ordered bundle of optical fibers, or also T.DABBS (APPLIED
OPTICS, Vol3 1 N "16, June 1992) which uses a single mode coupler for the offset of the
measuring head of a confocal laser microscope.
Dans les références de la première famille, les auteurs décrivent divers procédés de profilométrie de surface utilisant l'aberration chromatique axiale pour coder l'espace d'observation en imagerie confocale dans lesquels l'analyse soit spectrale, soit colorimétrique, permet de déterminer la longueur d'onde dominante du flux rétrodifflisé par l'objet, et donc l'altitude z de la surface. In the references of the first family, the authors describe various surface profilometry methods using axial chromatic aberration to code the observation space in confocal imagery in which the analysis, either spectral or colorimetric, makes it possible to determine the length dominant wave of the flux backscattered by the object, and therefore the altitude z of the surface.
Notre invention differe notablement de ces dispositifs en ce qu'elle permet la détection simultanée de toutes les interfaces caractérisées par une variation d'indice de réfraction rencontrées sur le trajet du pinceau lumineux polychromatique de codage, et qui donnent naissance soit à une réflexion spéculaire dans le cas d'un dioptre idéal, soit à une rétrodiffusion pour un milieu diffusant.Our invention differs notably from these devices in that it allows the simultaneous detection of all interfaces characterized by a variation in refractive index encountered on the path of the polychromatic coding light brush, and which give rise either to a specular reflection in the case of an ideal diopter, that is to say a backscatter for a diffusing medium.
De plus l'utilisation d'un coupleur achromatique à fibres optiques permet de réaliser à l'aide d'un seul composant les fonctions de déport de la sonde de mesure et la séparation des flux lumineux aller et retour.In addition, the use of an achromatic fiber optic coupler makes it possible to carry out, using a single component, the offset functions of the measurement probe and the separation of the outward and return light fluxes.
Dans les références de la deuxième famille, aucun dispositif ne met en oeuvre l'association du codage chromatique de l'espace de mesure à l'aide d'un objectif à chromatisme axial contrôlé et du déport par fibre d'un systéme confocal.In the references of the second family, no device implements the association of the chromatic coding of the measurement space using a lens with controlled axial chromatism and the offset by fiber of a confocal system.
1:1 en résulte qu'aucun de ces équipements n'est capable de mesurer simultanément plusieurs interfaces, comme c'est le cas pour notre invention. 1: 1 results in that none of this equipment is capable of simultaneously measuring several interfaces, as is the case for our invention.
L'examen des brevets et publications antérieurs conforte donc le caractère innovant de l'invention, qui présente à la fois une structure originale et des domaines d'application nouveaux, jusqu'ici inaccessibles.Examination of previous patents and publications therefore confirms the innovative nature of the invention, which presents both an original structure and new fields of application, hitherto inaccessible.
La configuration optogéométrique du dispositif de microstratigraphie optique objet de la présente invention offre par ailleurs les avantages significatifs suivants: le coeur de l'extrémité de la fibre optique atteignant la sonde joue à la fois le rôle de trou
source et de trou de filtrage spatial du dispositif confocal , ils sont ainsi toujours
parfaitement conjugués, ce qui garantit une stabilité et une robustesse accrues, - le coupleur à fibres optiques qui est un composant monolithique et donc robuste, remplace
les moyens conventionnels de séparation de faisceaux tels que les lames ou cubes semi
réfléchissants travaillant en trajet collimaté en entrée/sortie d'optiques de focalisation sur
les différentes extrémités de fibres optiques, - l'analyse spectrale exhaustive du flux lumineux à l'aide d'un spectrographe comprenant un
capteur linéaire multiéléments donne accès à la détection simultanée de plusieurs
interfaces (variation d'indice de réfraction) situées dans la profondeur de champ du codage
chromatique, contrairement à tous les dispositifs cités précédemment qui se limitent
strictement à une profilométrie de surfaces.The optogeometric configuration of the optical microstratigraphy device which is the subject of the present invention also offers the following significant advantages: the core of the end of the optical fiber reaching the probe plays both the role of a hole
source and spatial filtering hole of the confocal device, so they're always
perfectly combined, which guarantees increased stability and robustness, - the fiber optic coupler which is a monolithic component and therefore robust, replaces
conventional means of separation of beams such as blades or semi cubes
reflectors working in collimated path in input / output of focusing optics on
the different ends of optical fibers, - the exhaustive spectral analysis of the light flux using a spectrograph comprising a
linear multi-element sensor gives access to the simultaneous detection of several
interfaces (variation in refractive index) located in the depth of field of the coding
chromatic, unlike all the devices mentioned above which are limited
strictly to a surface profilometry.
En effet, pour chaque interface située dans la profondeur de champ de l'objectif à
chromatisme axial, on observe un pic sur le capteur linéaire multiéléments dont:
. la forme est définie par les caractéristiques optogéométriques de la sonde de mesure,
. la longueur d'onde centrale est représentative de la position de cette interface,
. l'amplitude est représentative de la variation d'indice rencontrée, c'est-à-dire de l'albédo
local.Indeed, for each interface located in the depth of field of the objective to
axial chromatism, there is a peak on the linear multi-element sensor of which:
. the shape is defined by the optogeometric characteristics of the measurement probe,
. the central wavelength is representative of the position of this interface,
. the amplitude is representative of the variation in index encountered, i.e. the albedo
local.
De plus, les mesures de position des interfaces rencontrées sont ici, contrairement à la grande majorité des systèmes de proximétrie optique, très peu sensibles à la structure colorimétrique et photométrique des objets examinés. Une variation locale de couleur ou de réflectivité provoque bien sur une variation de la hauteur du pic associé sur le détecteur, mais sa longueur d'onde centrale reste quasiment constante, fournissant ainsi une mesure de distance indépendante de la hauteur de ce pic. In addition, the position measurements of the interfaces encountered are here, unlike the vast majority of optical proximity systems, very little sensitive to the colorimetric and photometric structure of the objects examined. A local variation in color or reflectivity of course causes a variation in the height of the associated peak on the detector, but its central wavelength remains almost constant, thus providing a distance measurement independent of the height of this peak.
En particulier, cette indépendance de la mesure à l'intensité du flux rétrodiffusé rend le capteur insensible aux propriétés optiques de la fibre servant au transport de ce flux, qui peut donc être de longueur, de composition (matériau et technologie), de diamètre (monomode ou multimodes) quelconques. De même les atténuations provoquées par les modifications de courbure le long du trajet de la fibre ou la présence de connecteurs sont sans effet sur la mesure.In particular, this independence of the measurement at the intensity of the backscattered flux makes the sensor insensitive to the optical properties of the fiber used for the transport of this flux, which can therefore be of length, composition (material and technology), diameter ( any mode or multimode). Similarly, the attenuations caused by changes in curvature along the path of the fiber or the presence of connectors have no effect on the measurement.
Les domaines d'application de ce nouveau procédé sont très variés ainsi que le montre la liste non exhaustive et non limitative suivante . Mesure d'épaisseur d'objets transparents ou translucides, caractérisation de films fins, . Localisation de bulles, d'inclusions ou de défauts à l'intérieur de milieux partiellement
transparents, . Caractérisation de ces inclusions ou de ces défauts par mesure des indices de réfraction, .Analyse de structures multicouches dans l'industrie (plastiques, semi-conducteurs,
traitements de surface), . Biologie (structures cellulaires multicouches telles que cornée ou rétine in vitro)
Dans le cas où la sonde est en poste fixe au-dessus de l'objet sous examen, le dispositif permet d'étudier l'évolution temporelle de la structure interne de cet objet.The fields of application of this new process are very varied as shown by the following non-exhaustive and non-limiting list. Thickness measurement of transparent or translucent objects, characterization of thin films,. Localization of bubbles, inclusions or defects inside media partially
transparencies,. Characterization of these inclusions or these defects by measuring refractive indices, .Analysis of multilayer structures in industry (plastics, semiconductors,
surface treatments),. Biology (multilayer cellular structures such as cornea or retina in vitro)
In the case where the probe is in a fixed position above the object under examination, the device makes it possible to study the temporal evolution of the internal structure of this object.
Lorsque le dispositif est relié à un système automatisé de translation/rotation de la sonde et d'acquisition des mesures, il est possible de procéder à la cartographie volumique des structures internes de l'objet.When the device is connected to an automated system for translating / rotating the probe and acquiring measurements, it is possible to carry out volume mapping of the internal structures of the object.
Des modes de réalisation préférés du dispositif de microstratigraphie optique objet de la présente invention sont décrits ci-après à titre d'exemple, en référence à la figure annexée ciaprès dans laquelle est représenté un mode de réalisation du dispositif selon l'invention qui fonctionne de la façon décrite ci-après: * La source lumineuse (10) polychromatique et à spectre continu éclaire, au moyen d'une
optique de focalisation (11), l'extrémité d'entrée (12) d'une fibre optique (13).Preferred embodiments of the optical microstratigraphy device object of the present invention are described below by way of example, with reference to the appended figure below in which is shown an embodiment of the device according to the invention which operates as described below: * The polychromatic and continuous spectrum light source (10) illuminates by means of a
focusing optic (11), the input end (12) of an optical fiber (13).
* Cette fibre optique (13) transporte le flux lumineux collecté jusqu'au port d'entrée (14)
d'un coupleur à fibres optiques polychromatique (17), lequel dirige ledit flux via son port
de sortie (16) et une seconde fibre optique (18) vers la sonde de mesure (21) et ce de
façon sélective en évitant tout couplage indésirable vers son second port de sortie (15).* This optical fiber (13) transports the collected light flux to the input port (14)
a polychromatic optical fiber coupler (17), which directs said flow via its port
output (16) and a second optical fiber (18) to the measurement probe (21) and this
selectively avoiding unwanted coupling to its second output port (15).
* Le coeur de l'extrémité de sortie de la seconde fibre optique (18) agissant comme un
sténopé (19) joue le rôle de source lumineuse quasi-ponctuelle pour la sonde confocale à
champ étendu (21).* The core of the output end of the second optical fiber (18) acting as a
pinhole (19) acts as a quasi-point light source for the confocal probe to
extended field (21).
* La source (21) comporte un objectif de projection (20) présentant un chromatisme axial
connu et formant un ensemble d'images monochromatiques du sténopé (19) définissant
ainsi un segment de droite d'observation AB (22) dans l'espace objet, chaque image du
sténopé (19) étant définie par sa longueur d'onde et sa distance de focalisation par
rapport à l'objectif de projection (20).* The source (21) comprises a projection objective (20) having an axial chromatism
known and forming a set of monochromatic pinhole images (19) defining
thus an observation line segment AB (22) in object space, each image of the
pinhole (19) being defined by its wavelength and its focusing distance by
relative to the projection objective (20).
* Le même objectif de projection (20), fonctionnant selon le principe optique du retour
inverse de la lumière, collecte les pinceaux rétrodifflisés par la droite d'observation AB
(22) dans l'objet pour former, sur l'extrémité (19) de la fibre optique (18) qui joue
maintenant le rôle de trou de filtrage spatial de la sonde optique confocale, une image
polychromatique unique dont les longueurs d'ondes qui la composent sont celles
correspondant aux positions selon z des interfaces.* The same projection objective (20), operating on the optical principle of the return
reverse of the light, collects the brushes backscattered by the observation line AB
(22) in the object to form, on the end (19) of the optical fiber (18) which plays
now the role of spatial filtering hole of the confocal optical probe, an image
polychromatic unique whose wavelengths that compose it are those
corresponding to the positions along z of the interfaces.
* Le flux lumineux polychromatique ainsi recueilli est transporté par la fibre optique (18)
jusqu'au port (16) du coupleur à fibre (17), lequel dirige ledit flux via son port de sortie
(15) et une troisième fibre (23) vers un spectrographe (25) et ce de façon sélective en
évitant tout couplage indésirable vers son port d'entrée (14).* The polychromatic light flux thus collected is transported by optical fiber (18)
to the port (16) of the fiber coupler (17), which directs said flow via its output port
(15) and a third fiber (23) to a spectrograph (25) and this selectively by
avoiding any unwanted coupling to its input port (14).
* Le spectrographe (25), dont l'entrée est le coeur de l'extrémité de sortie (24) de le fibre
optique (23), comporte un sous-ensemble de dispersion chromatique angulaire (26) et un
détecteur photoélectrique linéaire multiéléments (27) qui fournit, à l'aide de son
électronique de pilotage et de traitement (28), une image instantanée des interfaces
rencontrées le long du segment de droite d'observation AB (22).* The spectrograph (25), the inlet of which is the heart of the outlet end (24) of the fiber
optical (23), comprises an angular chromatic dispersion sub-assembly (26) and a
linear multi-element photoelectric detector (27) which provides, using its
control and processing electronics (28), a snapshot of the interfaces
encountered along the observation line segment AB (22).
* Des moyens électroniques et informatiques (29) permettent d'enregistrer, traiter et
visualiser les signaux acquis, et d'en déduire, si nécessaire en temps réel, les informations
recherchées sur l'objet examiné, telles que la position des interfaces, les écarts d'indices
de réfraction, et toutes les propriétés optiques ou physiques qui en découlent.* Electronic and computer means (29) make it possible to record, process and
visualize the acquired signals, and deduce, if necessary in real time, the information
searched for on the object examined, such as the position of the interfaces, the index differences
of refraction, and all the optical or physical properties which result therefrom.
* Des moyens mécaniques (30) de translation/rotation multi-axes, équipés des moyens
électromécaniques et informatiques (31) de pilotage, contrôle-commande et
automatisation des déplacements, permettent d'orienter la sonde optique (21) selon toute
direction de l'espace de mesure, manuellement et/ou automatiquement, afin de pouvoir
travailler sur toutes formes d'objets.* Mechanical means (30) of multi-axis translation / rotation, equipped with the means
electromechanical and computer (31) piloting, control-command and
movement automation, allow to orient the optical probe (21) according to any
direction of the measurement space, manually and / or automatically, in order to be able to
work on all forms of objects.
Selon des modes préférés de réalisation, l'optique à chromatisme axial contrôlé peut être du type optique réfractive (association de lentilles de forme et composition adéquates), ou du type diffractive (lentille holographique), ou formée d'une combinaison des deux technologies.According to preferred embodiments, the optics with controlled axial chromatism can be of the refractive optical type (association of lenses of suitable shape and composition), or of the diffractive type (holographic lens), or formed of a combination of the two technologies.
Selon des modes préférés de réalisation, et selon les gammes de longueurs d'onde envisagées, le dispositif d'analyse spectrale peut utiliser un prisme ou un réseau comme élément dispersif, ou une combinaison des deux technologies. According to preferred embodiments, and according to the wavelength ranges envisaged, the spectral analysis device can use a prism or an array as a dispersing element, or a combination of the two technologies.
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR9510401A FR2738343B1 (en) | 1995-08-30 | 1995-08-30 | OPTICAL MICROSTRATIGRAPHY DEVICE |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR9510401A FR2738343B1 (en) | 1995-08-30 | 1995-08-30 | OPTICAL MICROSTRATIGRAPHY DEVICE |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2738343A1 true FR2738343A1 (en) | 1997-03-07 |
| FR2738343B1 FR2738343B1 (en) | 1997-10-24 |
Family
ID=9482284
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR9510401A Expired - Fee Related FR2738343B1 (en) | 1995-08-30 | 1995-08-30 | OPTICAL MICROSTRATIGRAPHY DEVICE |
Country Status (1)
| Country | Link |
|---|---|
| FR (1) | FR2738343B1 (en) |
Cited By (43)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1057063A1 (en) * | 1998-02-26 | 2000-12-06 | The General Hospital Corporation | Confocal microscopy with multi-spectral encoding |
| FR2824903A1 (en) * | 2001-05-21 | 2002-11-22 | Sciences Tech Ind De La Lumier | Non-contact method for measuring the dimensions of an object using an optical confocal imaging system with a chromatic retarder, so that axial chromatism can be adjusted to suit the required measurement range |
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