FR2726641B1 - Procede et dispositif pour profiler des surfaces en utilisant une optique de diffraction - Google Patents

Procede et dispositif pour profiler des surfaces en utilisant une optique de diffraction

Info

Publication number
FR2726641B1
FR2726641B1 FR9513140A FR9513140A FR2726641B1 FR 2726641 B1 FR2726641 B1 FR 2726641B1 FR 9513140 A FR9513140 A FR 9513140A FR 9513140 A FR9513140 A FR 9513140A FR 2726641 B1 FR2726641 B1 FR 2726641B1
Authority
FR
France
Prior art keywords
profiling surfaces
diffraction optic
diffraction
optic
profiling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9513140A
Other languages
English (en)
Other versions
FR2726641A1 (fr
Inventor
Groot Peter De
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zygo Corp
Original Assignee
Zygo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/334,939 external-priority patent/US5526116A/en
Application filed by Zygo Corp filed Critical Zygo Corp
Publication of FR2726641A1 publication Critical patent/FR2726641A1/fr
Application granted granted Critical
Publication of FR2726641B1 publication Critical patent/FR2726641B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N13/00—Stereoscopic video systems; Multi-view video systems; Details thereof
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
FR9513140A 1994-11-07 1995-11-07 Procede et dispositif pour profiler des surfaces en utilisant une optique de diffraction Expired - Fee Related FR2726641B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/334,939 US5526116A (en) 1994-11-07 1994-11-07 Method and apparatus for profiling surfaces using diffractive optics which impinges the beams at two different incident angles
US08/365,589 US5671050A (en) 1994-11-07 1994-12-28 Method and apparatus for profiling surfaces using diffracative optics

Publications (2)

Publication Number Publication Date
FR2726641A1 FR2726641A1 (fr) 1996-05-10
FR2726641B1 true FR2726641B1 (fr) 1998-09-11

Family

ID=26989463

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9513140A Expired - Fee Related FR2726641B1 (fr) 1994-11-07 1995-11-07 Procede et dispositif pour profiler des surfaces en utilisant une optique de diffraction

Country Status (6)

Country Link
US (1) US5671050A (fr)
JP (1) JP3568297B2 (fr)
KR (1) KR100398666B1 (fr)
CN (1) CN1060267C (fr)
DE (1) DE19541312A1 (fr)
FR (1) FR2726641B1 (fr)

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US6072581A (en) * 1998-10-30 2000-06-06 Zygo Corporation Geometrically-desensitized interferometer incorporating an optical assembly with high stray-beam management capability
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DE19919096A1 (de) * 1999-04-27 2000-11-02 Zeiss Carl Jena Gmbh Durchlicht-Beleuchtungseinrichtung für Mikroskope
US6226092B1 (en) 1999-05-27 2001-05-01 Zygo Corporation Full-field geometrically desensitized interferometer using refractive optics
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US6369888B1 (en) * 1999-11-17 2002-04-09 Applied Materials, Inc. Method and apparatus for article inspection including speckle reduction
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WO2001094881A1 (fr) * 2000-06-02 2001-12-13 Gsi Lumonics Corporation Systeme de fabrication de substrats paralleles plans avec des trajets optiques uniformes
US6819438B2 (en) * 2000-06-02 2004-11-16 Gsi Lumonics Corporation Technique for fabricating high quality optical components
US6708132B1 (en) 2000-06-02 2004-03-16 Interscience, Inc. Microsystems integrated testing and characterization system and method
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US6473185B2 (en) 2001-03-07 2002-10-29 Plx, Inc. Alignment free interferometer and alignment free method of profiling object surfaces
JP2002296020A (ja) * 2001-03-30 2002-10-09 Nidek Co Ltd 表面形状測定装置
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IL144805A (en) 2001-08-08 2006-08-01 Nova Measuring Instr Ltd Method and system for measuring the topograpy of a sample
US6842271B2 (en) 2001-11-27 2005-01-11 Robert Bosch Gmbh Rain sensor, in particular for a motor vehicle
US7030995B2 (en) * 2001-12-10 2006-04-18 Zygo Corporation Apparatus and method for mechanical phase shifting interferometry
KR100465784B1 (ko) * 2002-05-03 2005-01-13 한국과학기술원 경사단면 광섬유 광원을 이용한 점회절 간섭계 및 측정방법
US20040054494A1 (en) * 2002-09-12 2004-03-18 El-Khashab Ayman M. Flow control method for maximizing resource utilization of a remote system
EP1537532A2 (fr) * 2002-09-12 2005-06-08 Nline Corporation Systeme et procede permettant de detecter des differences entre images complexes
US20040130762A1 (en) * 2002-09-12 2004-07-08 Thomas Clarence E. Optical acquisition systems for direct-to-digital holography and holovision
DE10303364A1 (de) * 2003-01-29 2004-08-05 Hentze-Lissotschenko Patentverwaltungs Gmbh & Co.Kg Vorrichtung zur Bestimmung des Höhenprofils eines Objekts
US7019840B2 (en) * 2003-06-17 2006-03-28 Seagate Technology Llc Dual-beam interferometer for ultra-smooth surface topographical measurements
US7187437B2 (en) * 2003-09-10 2007-03-06 Shearographics, Llc Plurality of light sources for inspection apparatus and method
US6934018B2 (en) * 2003-09-10 2005-08-23 Shearographics, Llc Tire inspection apparatus and method
US7436504B2 (en) * 2003-09-10 2008-10-14 Shear Graphics, Llc Non-destructive testing and imaging
KR100622243B1 (ko) * 2004-02-17 2006-09-14 오므론 가부시키가이샤 광학식 측정 장치 및 광학식 측정 방법
US7483152B2 (en) * 2004-03-03 2009-01-27 Baker Hughes Incorporated High resolution statistical analysis of localized corrosion by direct measurement
US20050275850A1 (en) * 2004-05-28 2005-12-15 Timbre Technologies, Inc. Shape roughness measurement in optical metrology
FR2897426B1 (fr) * 2006-02-16 2012-07-27 Onera (Off Nat Aerospatiale) Procede d'analyse de surface d'onde par interferometrie multilaterale a difference de frequences
US7428060B2 (en) * 2006-03-24 2008-09-23 Timbre Technologies, Inc. Optimization of diffraction order selection for two-dimensional structures
US7388675B2 (en) * 2006-04-03 2008-06-17 Valley Design Corporation Interferometers for the measurement of large diameter thin wafers
US7846391B2 (en) 2006-05-22 2010-12-07 Lumencor, Inc. Bioanalytical instrumentation using a light source subsystem
US8179578B2 (en) 2006-07-18 2012-05-15 Celloptic, Inc. System, apparatus and method for extracting three-dimensional information of an object from received electromagnetic radiation
DE102006035022A1 (de) * 2006-07-28 2008-01-31 Carl Zeiss Smt Ag Verfahren zum Herstellen einer optischen Komponente, Interferometeranordnung und Beugungsgitter
US7709811B2 (en) 2007-07-03 2010-05-04 Conner Arlie R Light emitting diode illumination system
US8098375B2 (en) 2007-08-06 2012-01-17 Lumencor, Inc. Light emitting diode illumination system
US8120781B2 (en) 2008-11-26 2012-02-21 Zygo Corporation Interferometric systems and methods featuring spectral analysis of unevenly sampled data
US8242462B2 (en) 2009-01-23 2012-08-14 Lumencor, Inc. Lighting design of high quality biomedical devices
US8107084B2 (en) * 2009-01-30 2012-01-31 Zygo Corporation Interference microscope with scan motion detection using fringe motion in monitor patterns
CN102278952B (zh) * 2010-09-14 2012-09-05 北京航空航天大学 一种光滑反射表面的合成孔径数字全息三维显微观测装置
US8466436B2 (en) 2011-01-14 2013-06-18 Lumencor, Inc. System and method for metered dosage illumination in a bioanalysis or other system
US8389957B2 (en) 2011-01-14 2013-03-05 Lumencor, Inc. System and method for metered dosage illumination in a bioanalysis or other system
US8967846B2 (en) 2012-01-20 2015-03-03 Lumencor, Inc. Solid state continuous white light source
US9217561B2 (en) 2012-06-15 2015-12-22 Lumencor, Inc. Solid state light source for photocuring
US20170188010A1 (en) * 2015-12-29 2017-06-29 Canon Kabushiki Kaisha Reconstruction of local curvature and surface shape for specular objects
DE102016103295A1 (de) * 2016-02-24 2017-08-24 Martin Berz Dreidimensionales Interferometer und Verfahren zur Bestimmung einer Phase eines elektrischen Feldes
CN105675617B (zh) * 2016-04-06 2020-05-01 东旭科技集团有限公司 用于测量平板玻璃表面颗粒度的方法及设备
DE102019212520A1 (de) * 2019-08-21 2021-02-25 Carl Zeiss Smt Gmbh Diffraktives optisches Element für ein Prüfinterferometer

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US3958884A (en) * 1974-04-24 1976-05-25 Vickers Limited Interferometric apparatus
US4340306A (en) * 1980-02-04 1982-07-20 Balasubramanian N Optical system for surface topography measurement
DE3173451D1 (en) * 1981-09-17 1986-02-20 Ibm Deutschland Method for interferometric surface topography
JPH0642448B2 (ja) * 1987-09-30 1994-06-01 株式会社東芝 位置合わせ方法
DE4006365A1 (de) * 1990-03-01 1991-10-17 Heidenhain Gmbh Dr Johannes Positionsmesseinrichtung
IL100655A (en) * 1991-02-08 1994-11-28 Hughes Aircraft Co Profile gauge for interferometric laser
JP3315805B2 (ja) * 1993-03-31 2002-08-19 旭光学工業株式会社 像面測定装置
US6154278A (en) * 1993-06-10 2000-11-28 Matsushita Electric Industrial Co., Ltd. Optical encoder for optically measuring displacement of moving body
JPH07190722A (ja) * 1993-12-27 1995-07-28 Canon Inc 位置ずれ検出方法及びそれを用いた位置ずれ検出装置
JPH07130022A (ja) * 1993-11-08 1995-05-19 Matsushita Electric Ind Co Ltd 光ヘッド装置および光学素子

Also Published As

Publication number Publication date
DE19541312A1 (de) 1996-05-30
FR2726641A1 (fr) 1996-05-10
KR100398666B1 (ko) 2003-12-11
JPH08226806A (ja) 1996-09-03
CN1060267C (zh) 2001-01-03
US5671050A (en) 1997-09-23
CN1133434A (zh) 1996-10-16
KR960020553A (ko) 1996-06-17
JP3568297B2 (ja) 2004-09-22

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Effective date: 20070731