FR2723196B1 - MICROMETRIC ACTUATOR - Google Patents

MICROMETRIC ACTUATOR

Info

Publication number
FR2723196B1
FR2723196B1 FR9409414A FR9409414A FR2723196B1 FR 2723196 B1 FR2723196 B1 FR 2723196B1 FR 9409414 A FR9409414 A FR 9409414A FR 9409414 A FR9409414 A FR 9409414A FR 2723196 B1 FR2723196 B1 FR 2723196B1
Authority
FR
France
Prior art keywords
micrometric
actuator
micrometric actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9409414A
Other languages
French (fr)
Other versions
FR2723196A1 (en
Inventor
Andre Stimpfling
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Institut Franco Allemand de Recherches de Saint Louis ISL
Original Assignee
Institut Franco Allemand de Recherches de Saint Louis ISL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Institut Franco Allemand de Recherches de Saint Louis ISL filed Critical Institut Franco Allemand de Recherches de Saint Louis ISL
Priority to FR9409414A priority Critical patent/FR2723196B1/en
Priority to DE1995126252 priority patent/DE19526252A1/en
Publication of FR2723196A1 publication Critical patent/FR2723196A1/en
Application granted granted Critical
Publication of FR2723196B1 publication Critical patent/FR2723196B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H02N2/023—Inchworm motors
FR9409414A 1994-07-29 1994-07-29 MICROMETRIC ACTUATOR Expired - Fee Related FR2723196B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR9409414A FR2723196B1 (en) 1994-07-29 1994-07-29 MICROMETRIC ACTUATOR
DE1995126252 DE19526252A1 (en) 1994-07-29 1995-07-19 Piezo-electric micrometric actuator.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9409414A FR2723196B1 (en) 1994-07-29 1994-07-29 MICROMETRIC ACTUATOR

Publications (2)

Publication Number Publication Date
FR2723196A1 FR2723196A1 (en) 1996-02-02
FR2723196B1 true FR2723196B1 (en) 1996-10-04

Family

ID=9465886

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9409414A Expired - Fee Related FR2723196B1 (en) 1994-07-29 1994-07-29 MICROMETRIC ACTUATOR

Country Status (2)

Country Link
DE (1) DE19526252A1 (en)
FR (1) FR2723196B1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004051962B4 (en) * 2004-10-26 2007-08-09 Technische Universität Ilmenau Device for the interferometric measurement of the spatial coordinates of an object

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3902084A (en) * 1974-05-30 1975-08-26 Burleigh Instr Piezoelectric electromechanical translation apparatus
US4664487A (en) * 1985-09-30 1987-05-12 Rockwell International Corporation Laser mirror positioning apparatus
IL87312A (en) * 1988-08-02 1992-02-16 Zvi Orbach Electromechanical translation apparatus of the inchworm linear motor type
AT396179B (en) * 1989-06-07 1993-06-25 Tabarelli Werner INTERFEROMETER ARRANGEMENT

Also Published As

Publication number Publication date
DE19526252A1 (en) 1996-03-07
FR2723196A1 (en) 1996-02-02

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Legal Events

Date Code Title Description
ST Notification of lapse