FR2721751B1 - Procédé d'élaboration de micropointes à composition contrôlée sur de grandes surfaces. - Google Patents

Procédé d'élaboration de micropointes à composition contrôlée sur de grandes surfaces.

Info

Publication number
FR2721751B1
FR2721751B1 FR9407871A FR9407871A FR2721751B1 FR 2721751 B1 FR2721751 B1 FR 2721751B1 FR 9407871 A FR9407871 A FR 9407871A FR 9407871 A FR9407871 A FR 9407871A FR 2721751 B1 FR2721751 B1 FR 2721751B1
Authority
FR
France
Prior art keywords
microdots
production
large areas
over large
composition over
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9407871A
Other languages
English (en)
Other versions
FR2721751A1 (fr
Inventor
Joel Danroc
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR9407871A priority Critical patent/FR2721751B1/fr
Priority to PCT/FR1995/000849 priority patent/WO1996000450A1/fr
Publication of FR2721751A1 publication Critical patent/FR2721751A1/fr
Application granted granted Critical
Publication of FR2721751B1 publication Critical patent/FR2721751B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32211—Means for coupling power to the plasma
    • H01J37/3222—Antennas
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32321—Discharge generated by other radiation
    • H01J37/3233—Discharge generated by other radiation using charged particles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32596—Hollow cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3266—Magnetic control means
    • H01J37/32678—Electron cyclotron resonance
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • H01J37/3405—Magnetron sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/332—Coating
    • H01J2237/3322—Problems associated with coating
    • H01J2237/3327—Coating high aspect ratio workpieces

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
FR9407871A 1994-06-27 1994-06-27 Procédé d'élaboration de micropointes à composition contrôlée sur de grandes surfaces. Expired - Fee Related FR2721751B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR9407871A FR2721751B1 (fr) 1994-06-27 1994-06-27 Procédé d'élaboration de micropointes à composition contrôlée sur de grandes surfaces.
PCT/FR1995/000849 WO1996000450A1 (fr) 1994-06-27 1995-06-26 Procede d'elaboration de micropointes a composition controlee sur de grandes surfaces

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9407871A FR2721751B1 (fr) 1994-06-27 1994-06-27 Procédé d'élaboration de micropointes à composition contrôlée sur de grandes surfaces.

Publications (2)

Publication Number Publication Date
FR2721751A1 FR2721751A1 (fr) 1995-12-29
FR2721751B1 true FR2721751B1 (fr) 1996-08-02

Family

ID=9464686

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9407871A Expired - Fee Related FR2721751B1 (fr) 1994-06-27 1994-06-27 Procédé d'élaboration de micropointes à composition contrôlée sur de grandes surfaces.

Country Status (2)

Country Link
FR (1) FR2721751B1 (fr)
WO (1) WO1996000450A1 (fr)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3812559A (en) * 1970-07-13 1974-05-28 Stanford Research Inst Methods of producing field ionizer and field emission cathode structures
GB9118721D0 (en) * 1991-09-02 1991-10-16 Era Patents Ltd Production of fine points
EP0564028B1 (fr) * 1992-04-02 1997-07-16 Koninklijke Philips Electronics N.V. Procédé de fabrication d'une électrode en forme de pointe

Also Published As

Publication number Publication date
WO1996000450A1 (fr) 1996-01-04
FR2721751A1 (fr) 1995-12-29

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Legal Events

Date Code Title Description
ST Notification of lapse
ST Notification of lapse