FR2705416B1 - Anti-vibration installation with magnetic vibrators of active support. - Google Patents

Anti-vibration installation with magnetic vibrators of active support.

Info

Publication number
FR2705416B1
FR2705416B1 FR9306055A FR9306055A FR2705416B1 FR 2705416 B1 FR2705416 B1 FR 2705416B1 FR 9306055 A FR9306055 A FR 9306055A FR 9306055 A FR9306055 A FR 9306055A FR 2705416 B1 FR2705416 B1 FR 2705416B1
Authority
FR
France
Prior art keywords
active support
vibration installation
magnetic vibrators
vibrators
magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9306055A
Other languages
French (fr)
Other versions
FR2705416A1 (en
Inventor
Barat Didier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hutchinson SA
Original Assignee
Hutchinson SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hutchinson SA filed Critical Hutchinson SA
Priority to FR9306055A priority Critical patent/FR2705416B1/en
Publication of FR2705416A1 publication Critical patent/FR2705416A1/en
Application granted granted Critical
Publication of FR2705416B1 publication Critical patent/FR2705416B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/03Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using magnetic or electromagnetic means
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F7/00Vibration-dampers; Shock-absorbers
    • F16F7/10Vibration-dampers; Shock-absorbers using inertia effect
    • F16F7/1005Vibration-dampers; Shock-absorbers using inertia effect characterised by active control of the mass
    • F16F7/1011Vibration-dampers; Shock-absorbers using inertia effect characterised by active control of the mass by electromagnetic means
FR9306055A 1993-05-19 1993-05-19 Anti-vibration installation with magnetic vibrators of active support. Expired - Fee Related FR2705416B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR9306055A FR2705416B1 (en) 1993-05-19 1993-05-19 Anti-vibration installation with magnetic vibrators of active support.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9306055A FR2705416B1 (en) 1993-05-19 1993-05-19 Anti-vibration installation with magnetic vibrators of active support.

Publications (2)

Publication Number Publication Date
FR2705416A1 FR2705416A1 (en) 1994-11-25
FR2705416B1 true FR2705416B1 (en) 1995-07-28

Family

ID=9447294

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9306055A Expired - Fee Related FR2705416B1 (en) 1993-05-19 1993-05-19 Anti-vibration installation with magnetic vibrators of active support.

Country Status (1)

Country Link
FR (1) FR2705416B1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0786057B1 (en) * 1994-10-12 1999-12-29 Lord Corporation ACTIVE SYSTEMS AND DEVICES INCLUDING ACTIVE VIBRATION ABSORBERS (AVAs)
JPH1038020A (en) * 1996-07-26 1998-02-13 Tokai Rubber Ind Ltd Vibration damping device
US5884736A (en) * 1997-03-31 1999-03-23 Virginia Tech Intellectual Properties, Inc. Active dual reaction mass absorber for vibration control
DE19725770C2 (en) * 1997-06-18 1999-04-22 Deutsch Zentr Luft & Raumfahrt Use of a device for damping vibrations of an elastic system, with a vibration damper
ITBO20010105A1 (en) * 2001-02-27 2002-08-27 Technogym Srl APPARATUS FOR PHYSICAL EXERCISE WITH MAGNETIC INTERACTION BETWEEN CONSTITUTIVE PARTS
WO2017148650A1 (en) 2016-03-03 2017-09-08 Asml Netherlands B.V. Vibration isolator, lithographic apparatus and device manufacturing method

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0718466B2 (en) * 1987-02-09 1995-03-06 瑛二 安達 Vibration damping method and apparatus for vibrating body mounting apparatus
JPS63306183A (en) * 1987-06-03 1988-12-14 株式会社日立製作所 Vibration control equipment
DE4021035A1 (en) * 1990-07-02 1992-01-16 Metzeler Gimetall Ag ELASTIC MOTOR MOUNT
FR2675559B1 (en) * 1991-04-16 1993-08-27 Mecanique Magnetique Sa HYBRID VIBRATION DAMPER WITH ACTIVE MAGNETIC VIBRATOR.
DE4138405C1 (en) * 1991-11-22 1993-02-25 Fa. Carl Freudenberg, 6940 Weinheim, De

Also Published As

Publication number Publication date
FR2705416A1 (en) 1994-11-25

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Legal Events

Date Code Title Description
ST Notification of lapse