FR2698377B1 - Pilotage d'une machine de nitruration ionique par mesure spectroscopique. - Google Patents
Pilotage d'une machine de nitruration ionique par mesure spectroscopique.Info
- Publication number
- FR2698377B1 FR2698377B1 FR9214284A FR9214284A FR2698377B1 FR 2698377 B1 FR2698377 B1 FR 2698377B1 FR 9214284 A FR9214284 A FR 9214284A FR 9214284 A FR9214284 A FR 9214284A FR 2698377 B1 FR2698377 B1 FR 2698377B1
- Authority
- FR
- France
- Prior art keywords
- control
- spectroscopic measurement
- ion nitriding
- nitriding machine
- machine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32917—Plasma diagnostics
- H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
- Plasma Technology (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9214284A FR2698377B1 (fr) | 1992-11-25 | 1992-11-25 | Pilotage d'une machine de nitruration ionique par mesure spectroscopique. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9214284A FR2698377B1 (fr) | 1992-11-25 | 1992-11-25 | Pilotage d'une machine de nitruration ionique par mesure spectroscopique. |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2698377A1 FR2698377A1 (fr) | 1994-05-27 |
FR2698377B1 true FR2698377B1 (fr) | 1995-03-03 |
Family
ID=9435969
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR9214284A Expired - Fee Related FR2698377B1 (fr) | 1992-11-25 | 1992-11-25 | Pilotage d'une machine de nitruration ionique par mesure spectroscopique. |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2698377B1 (fr) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2886315B1 (fr) | 2005-05-31 | 2007-11-23 | Univ Lille Sciences Tech | Procede de controle des processus de nitruration assistee par plasma et systeme mettant en oeuvre ledit procede |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2100023B (en) * | 1981-06-05 | 1985-01-09 | Aizenshtein Anatoly Gdalievich | Method of control of chemico-thermal treatment of workpieces in glow discharge and a device for carrying out the same |
JPH0610356B2 (ja) * | 1988-02-18 | 1994-02-09 | 松下電器産業株式会社 | プラズマ処理装置およびプラズマ温度測定方法 |
-
1992
- 1992-11-25 FR FR9214284A patent/FR2698377B1/fr not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
FR2698377A1 (fr) | 1994-05-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
FI923072A (fi) | Maongstegsbindemedel foer anvaendning i elstomerbelaeggningar, mastixbelaeggningar, dikt- och taetningsmedel | |
IS4208A (is) | 3-(tetrazólýl-benzyl)amínó-piperadidín afleiður | |
NO976044D0 (no) | Meioseregulerende forbindelser | |
YU34393A (sh) | Novi 7 beta-supstituisani-4-aza-5alfa-holestanoni kao inhibitori 5alfa-reduktaze | |
NO894080D0 (no) | Beleggsammensetninger. | |
NO950146D0 (no) | Anordning for regulering av varmekjeler | |
DE59202250D1 (de) | Präzisionswaage. | |
FI910572A (fi) | Regnmaetare med anordning som paovisar tilltaeppning. | |
FR2614223B1 (fr) | Dispositif d'usinage par etincelage controlant la precision de l'usinage. | |
FR2696559B1 (fr) | Regulateur de position pneumatique. | |
FI931451A0 (fi) | 7-oxo-7h-pyrido(1,2,3-de)(1,4)bensoxazin-6-karboxylsyror och -estrar | |
FR2698377B1 (fr) | Pilotage d'une machine de nitruration ionique par mesure spectroscopique. | |
DE59300204D1 (de) | Präzisionswaage. | |
NO923639D0 (no) | Maaleapparat for belegg | |
BR9202124A (pt) | Conjunto regulador de cambagem | |
ATE220674T1 (de) | 12h-dibenzo(d,g)(1,3)dioxocin derivate | |
FR2558959B1 (fr) | Appareil de controle de surfaces d'objets | |
NO920096D0 (no) | Reguleringsfoeler for kjoeling av stoepemaskin | |
NO910746D0 (no) | Apparatur for maaling av muskelarbeid. | |
DE58901178D1 (de) | Hydroxylaminderivate. | |
ITTV920042A0 (it) | Struttura di dispositivo per la taratura di macchine duplicatrici | |
FR2694539B1 (fr) | Perfectionnement de boîte du type dit "mono-cuvette". | |
DE69301003D1 (de) | Hydroxylaminderivate | |
RU1810763C (ru) | Дозатор | |
FI910136A0 (fi) | Foerfarande foer framstaellning av ett staolband med en tjocklek under 10 mm. |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse | ||
ST | Notification of lapse |