FR2698377B1 - Pilotage d'une machine de nitruration ionique par mesure spectroscopique. - Google Patents

Pilotage d'une machine de nitruration ionique par mesure spectroscopique.

Info

Publication number
FR2698377B1
FR2698377B1 FR9214284A FR9214284A FR2698377B1 FR 2698377 B1 FR2698377 B1 FR 2698377B1 FR 9214284 A FR9214284 A FR 9214284A FR 9214284 A FR9214284 A FR 9214284A FR 2698377 B1 FR2698377 B1 FR 2698377B1
Authority
FR
France
Prior art keywords
control
spectroscopic measurement
ion nitriding
nitriding machine
machine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9214284A
Other languages
English (en)
Other versions
FR2698377A1 (fr
Inventor
Antoine Marzinotto Andre
Henri Held Bernard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MARZINOTTO ANDRE
Original Assignee
MARZINOTTO ANDRE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MARZINOTTO ANDRE filed Critical MARZINOTTO ANDRE
Priority to FR9214284A priority Critical patent/FR2698377B1/fr
Publication of FR2698377A1 publication Critical patent/FR2698377A1/fr
Application granted granted Critical
Publication of FR2698377B1 publication Critical patent/FR2698377B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Plasma Technology (AREA)
FR9214284A 1992-11-25 1992-11-25 Pilotage d'une machine de nitruration ionique par mesure spectroscopique. Expired - Fee Related FR2698377B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR9214284A FR2698377B1 (fr) 1992-11-25 1992-11-25 Pilotage d'une machine de nitruration ionique par mesure spectroscopique.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9214284A FR2698377B1 (fr) 1992-11-25 1992-11-25 Pilotage d'une machine de nitruration ionique par mesure spectroscopique.

Publications (2)

Publication Number Publication Date
FR2698377A1 FR2698377A1 (fr) 1994-05-27
FR2698377B1 true FR2698377B1 (fr) 1995-03-03

Family

ID=9435969

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9214284A Expired - Fee Related FR2698377B1 (fr) 1992-11-25 1992-11-25 Pilotage d'une machine de nitruration ionique par mesure spectroscopique.

Country Status (1)

Country Link
FR (1) FR2698377B1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2886315B1 (fr) 2005-05-31 2007-11-23 Univ Lille Sciences Tech Procede de controle des processus de nitruration assistee par plasma et systeme mettant en oeuvre ledit procede

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2100023B (en) * 1981-06-05 1985-01-09 Aizenshtein Anatoly Gdalievich Method of control of chemico-thermal treatment of workpieces in glow discharge and a device for carrying out the same
JPH0610356B2 (ja) * 1988-02-18 1994-02-09 松下電器産業株式会社 プラズマ処理装置およびプラズマ温度測定方法

Also Published As

Publication number Publication date
FR2698377A1 (fr) 1994-05-27

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