FR2682400A1 - Materiau multicouche, procedes de fabrication de ce materiau multicouche et de l'une des couches de ce materiau et revetement anti-erosion et anti-abrasion comprenant ce materiau multicouche. - Google Patents

Materiau multicouche, procedes de fabrication de ce materiau multicouche et de l'une des couches de ce materiau et revetement anti-erosion et anti-abrasion comprenant ce materiau multicouche. Download PDF

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Publication number
FR2682400A1
FR2682400A1 FR9112616A FR9112616A FR2682400A1 FR 2682400 A1 FR2682400 A1 FR 2682400A1 FR 9112616 A FR9112616 A FR 9112616A FR 9112616 A FR9112616 A FR 9112616A FR 2682400 A1 FR2682400 A1 FR 2682400A1
Authority
FR
France
Prior art keywords
multilayer material
tungsten
material according
manufacturing
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR9112616A
Other languages
English (en)
French (fr)
Other versions
FR2682400B1 (US20100268047A1-20101021-C00003.png
Inventor
Pauleau Yves
Paidassi Serge
Ernoult Jacques
Brun Michel
Monge-Cadet Pierre
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Safran Helicopter Engines SAS
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Turbomeca SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA, Turbomeca SA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR9112616A priority Critical patent/FR2682400A1/fr
Priority to PCT/FR1992/000969 priority patent/WO1993008316A1/fr
Priority to EP92923834A priority patent/EP0562108B1/fr
Priority to DE69216218T priority patent/DE69216218T2/de
Priority to US08/075,519 priority patent/US5547767A/en
Publication of FR2682400A1 publication Critical patent/FR2682400A1/fr
Application granted granted Critical
Publication of FR2682400B1 publication Critical patent/FR2682400B1/fr
Priority to US08/634,899 priority patent/US5702829A/en
Granted legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C23C14/0073—Reactive sputtering by exposing the substrates to reactive gases intermittently
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/18—Metallic material, boron or silicon on other inorganic substrates
    • C23C14/185—Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/20—Metallic material, boron or silicon on organic substrates
    • C23C14/205—Metallic material, boron or silicon on organic substrates by cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/02—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR9112616A 1991-10-14 1991-10-14 Materiau multicouche, procedes de fabrication de ce materiau multicouche et de l'une des couches de ce materiau et revetement anti-erosion et anti-abrasion comprenant ce materiau multicouche. Granted FR2682400A1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR9112616A FR2682400A1 (fr) 1991-10-14 1991-10-14 Materiau multicouche, procedes de fabrication de ce materiau multicouche et de l'une des couches de ce materiau et revetement anti-erosion et anti-abrasion comprenant ce materiau multicouche.
PCT/FR1992/000969 WO1993008316A1 (fr) 1991-10-14 1992-10-14 Materiau multicouche pour revetement anti-erosion et anti-abrasion
EP92923834A EP0562108B1 (fr) 1991-10-14 1992-10-14 Materiau multicouche pour revetement anti-erosion et anti-abrasion
DE69216218T DE69216218T2 (de) 1991-10-14 1992-10-14 Erosionsbeständiges und abrasionsbeständiges Mehrschichtenmaterial
US08/075,519 US5547767A (en) 1991-10-14 1992-10-14 Multilayer material, anti-erosion and anti-abrasion coating incorporating said multilayer material and process for producing said multilayer material
US08/634,899 US5702829A (en) 1991-10-14 1996-04-26 Multilayer material, anti-erosion and anti-abrasion coating incorporating said multilayer material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9112616A FR2682400A1 (fr) 1991-10-14 1991-10-14 Materiau multicouche, procedes de fabrication de ce materiau multicouche et de l'une des couches de ce materiau et revetement anti-erosion et anti-abrasion comprenant ce materiau multicouche.

Publications (2)

Publication Number Publication Date
FR2682400A1 true FR2682400A1 (fr) 1993-04-16
FR2682400B1 FR2682400B1 (US20100268047A1-20101021-C00003.png) 1995-03-03

Family

ID=9417872

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9112616A Granted FR2682400A1 (fr) 1991-10-14 1991-10-14 Materiau multicouche, procedes de fabrication de ce materiau multicouche et de l'une des couches de ce materiau et revetement anti-erosion et anti-abrasion comprenant ce materiau multicouche.

Country Status (1)

Country Link
FR (1) FR2682400A1 (US20100268047A1-20101021-C00003.png)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4343041A1 (de) * 1993-12-16 1995-06-22 Fraunhofer Ges Forschung Korrosionsgeschütztes Metall
FR2764310A1 (fr) * 1997-06-10 1998-12-11 Commissariat Energie Atomique Materiau multicouches a revetement anti-erosion, anti-abrasion, et anti-usure sur substrat en aluminium, en magnesium ou en leurs alliages
DE10005614A1 (de) * 2000-02-09 2001-08-16 Hauzer Techno Coating Europ B Verfahren zur Herstellung von Beschichtungen sowie Gegenstand

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5321902A (en) * 1976-08-11 1978-02-28 Fujitsu Ltd Formation of carbonized protective film for magnetic recording medium
EP0106638A1 (en) * 1982-10-12 1984-04-25 National Research Development Corporation Method and apparatus for growing material in a glow discharge
JPS60221565A (ja) * 1984-04-19 1985-11-06 Matsushita Electric Ind Co Ltd ダイヤモンド部品およびその製造方法
EP0186266A1 (en) * 1984-11-19 1986-07-02 Avco Corporation Erosion-resistant coating system

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5321902A (en) * 1976-08-11 1978-02-28 Fujitsu Ltd Formation of carbonized protective film for magnetic recording medium
EP0106638A1 (en) * 1982-10-12 1984-04-25 National Research Development Corporation Method and apparatus for growing material in a glow discharge
JPS60221565A (ja) * 1984-04-19 1985-11-06 Matsushita Electric Ind Co Ltd ダイヤモンド部品およびその製造方法
EP0186266A1 (en) * 1984-11-19 1986-07-02 Avco Corporation Erosion-resistant coating system

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
J. OF VACUUM SCIENCE AND TECHNOLOGY, A vol. 6, no. 3, 1 Mai 1988, NEW YORK pages 1646 - 1649; H.Y.YANG ET AL.: 'investigation of cosputtered W-C thin films as diffusion barriers' *
PATENT ABSTRACTS OF JAPAN vol. 10, no. 90 (C-337)(2147) 8 Avril 1986 & JP-A-60 221 565 ( MATSUSHITA DENKI SANGYO KK ) 6 Novembre 1985 *
PATENT ABSTRACTS OF JAPAN vol. 2, no. 56 (E)(1489) 24 Avril 1978 & JP-A-53 021 902 ( FUJITSU KK ) 28 Février 1978 *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4343041A1 (de) * 1993-12-16 1995-06-22 Fraunhofer Ges Forschung Korrosionsgeschütztes Metall
FR2764310A1 (fr) * 1997-06-10 1998-12-11 Commissariat Energie Atomique Materiau multicouches a revetement anti-erosion, anti-abrasion, et anti-usure sur substrat en aluminium, en magnesium ou en leurs alliages
US6159618A (en) * 1997-06-10 2000-12-12 Commissariat A L'energie Atomique Multi-layer material with an anti-erosion, anti-abrasion, and anti-wear coating on a substrate made of aluminum, magnesium or their alloys
DE10005614A1 (de) * 2000-02-09 2001-08-16 Hauzer Techno Coating Europ B Verfahren zur Herstellung von Beschichtungen sowie Gegenstand
US6599400B2 (en) 2000-02-09 2003-07-29 Hauzer Techno Coating Europe Bv Method for the manufacture of coatings and an article

Also Published As

Publication number Publication date
FR2682400B1 (US20100268047A1-20101021-C00003.png) 1995-03-03

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