FR2678061A1 - Procede et dispositif pour la mesure de couches minces. - Google Patents

Procede et dispositif pour la mesure de couches minces. Download PDF

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Publication number
FR2678061A1
FR2678061A1 FR9107720A FR9107720A FR2678061A1 FR 2678061 A1 FR2678061 A1 FR 2678061A1 FR 9107720 A FR9107720 A FR 9107720A FR 9107720 A FR9107720 A FR 9107720A FR 2678061 A1 FR2678061 A1 FR 2678061A1
Authority
FR
France
Prior art keywords
coil
character
devices
measured
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR9107720A
Other languages
English (en)
French (fr)
Other versions
FR2678061B1 (US20100012521A1-20100121-C00001.png
Inventor
Fischer Helmut
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fischer Co Inst Elektro GmbH
Original Assignee
Fischer Co Inst Elektro GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fischer Co Inst Elektro GmbH filed Critical Fischer Co Inst Elektro GmbH
Publication of FR2678061A1 publication Critical patent/FR2678061A1/fr
Application granted granted Critical
Publication of FR2678061B1 publication Critical patent/FR2678061B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
    • G01B7/105—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance for measuring thickness of coating

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
FR9107720A 1991-06-25 1991-06-24 Procede et dispositif pour la mesure de couches minces. Granted FR2678061A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB9113639A GB2257520B (en) 1991-06-25 1991-06-25 Method and probe for measuring the thickness of a thin layer

Publications (2)

Publication Number Publication Date
FR2678061A1 true FR2678061A1 (fr) 1992-12-24
FR2678061B1 FR2678061B1 (US20100012521A1-20100121-C00001.png) 1997-02-07

Family

ID=10697246

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9107720A Granted FR2678061A1 (fr) 1991-06-25 1991-06-24 Procede et dispositif pour la mesure de couches minces.

Country Status (2)

Country Link
FR (1) FR2678061A1 (US20100012521A1-20100121-C00001.png)
GB (1) GB2257520B (US20100012521A1-20100121-C00001.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2806790A1 (fr) * 2000-03-24 2001-09-28 Helmut Fischer Gmbh & Co Procede et dispositif de mesure non destructive de l'epaisseur de couches fines

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2306009B (en) * 1995-10-05 1999-06-16 Elcometer Instr Ltd A coating thickness measuring probe
GB9605843D0 (en) * 1996-03-20 1996-05-22 Ormiston Peter T A device for measuring the thickness of a coating
DE19820546C1 (de) * 1998-05-08 1999-11-04 Bosch Gmbh Robert Verfahren zur Eliminierung von Meßfehlern bei der Bestimmung einer Dicke einer Schicht aus elektrisch leitendem Material

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3407352A (en) * 1965-06-07 1968-10-22 Western Electric Co Method of and apparatus for monitoring the thickness of a non-conductive coating on a conductive base
US3441840A (en) * 1967-03-31 1969-04-29 Martin Marietta Corp Electronic thickness meter having direct readout of coating thickness
US3986105A (en) * 1974-03-02 1976-10-12 Elektro-Physik, Hans Nix & Dr. -Ing. E. Steingroever Kg Dual purpose electromagnetic thickness gauge
DE3437253A1 (de) * 1983-08-31 1986-04-17 Helmut Fischer GmbH & Co Institut für Elektronik und Meßtechnik, 7032 Sindelfingen Elektromagnetische mess-sonde
US4791367A (en) * 1987-07-15 1988-12-13 Impact Systems, Inc. Contacting thickness gauge for moving sheet material

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2345848C3 (de) * 1973-09-12 1986-06-19 ELEKTRO-PHYSIK Hans Nix & Dr.-Ing. E. Steingroever GmbH & Co KG, 5000 Köln Elektromagnetischer Schichtdickenmesser
US3878457A (en) * 1973-11-16 1975-04-15 Wayne E Rodgers Thin film thickness measuring apparatus using an unbalanced inductive bridge
GB2145827B (en) * 1983-08-31 1987-04-08 Fischer Gmbh & Co Inst Fur Ele Electromagnetic measuring probe
GB2165648B (en) * 1984-10-11 1988-06-15 Fischer Gmbh & Co Inst Fur Ele Electro-magnetic measuring probe
US4747310A (en) * 1986-08-12 1988-05-31 Grumman Aerospace Corporation Probe for composite analyzer tester

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3407352A (en) * 1965-06-07 1968-10-22 Western Electric Co Method of and apparatus for monitoring the thickness of a non-conductive coating on a conductive base
US3441840A (en) * 1967-03-31 1969-04-29 Martin Marietta Corp Electronic thickness meter having direct readout of coating thickness
US3986105A (en) * 1974-03-02 1976-10-12 Elektro-Physik, Hans Nix & Dr. -Ing. E. Steingroever Kg Dual purpose electromagnetic thickness gauge
DE3437253A1 (de) * 1983-08-31 1986-04-17 Helmut Fischer GmbH & Co Institut für Elektronik und Meßtechnik, 7032 Sindelfingen Elektromagnetische mess-sonde
US4791367A (en) * 1987-07-15 1988-12-13 Impact Systems, Inc. Contacting thickness gauge for moving sheet material

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2806790A1 (fr) * 2000-03-24 2001-09-28 Helmut Fischer Gmbh & Co Procede et dispositif de mesure non destructive de l'epaisseur de couches fines

Also Published As

Publication number Publication date
FR2678061B1 (US20100012521A1-20100121-C00001.png) 1997-02-07
GB2257520B (en) 1995-05-10
GB2257520A (en) 1993-01-13
GB9113639D0 (en) 1991-08-14

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