FR2653545B1 - Perfectionnements apportes aux dispositifs permettant d'ajuster la temperature d'un element par soufflage d'un gaz a la temperature souhaitee. - Google Patents
Perfectionnements apportes aux dispositifs permettant d'ajuster la temperature d'un element par soufflage d'un gaz a la temperature souhaitee.Info
- Publication number
- FR2653545B1 FR2653545B1 FR8913922A FR8913922A FR2653545B1 FR 2653545 B1 FR2653545 B1 FR 2653545B1 FR 8913922 A FR8913922 A FR 8913922A FR 8913922 A FR8913922 A FR 8913922A FR 2653545 B1 FR2653545 B1 FR 2653545B1
- Authority
- FR
- France
- Prior art keywords
- temperature
- blowing
- relating
- adjusting
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/345—Arrangements for heating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Devices For Use In Laboratory Experiments (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8913922A FR2653545B1 (fr) | 1989-10-24 | 1989-10-24 | Perfectionnements apportes aux dispositifs permettant d'ajuster la temperature d'un element par soufflage d'un gaz a la temperature souhaitee. |
| PCT/FR1990/000766 WO1991006974A1 (fr) | 1989-10-24 | 1990-10-24 | Perfectionnements apportes aux dispostifs permettant d'ajuster la temperature d'un element par soufflage d'un gaz a la temperature souhaitee |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8913922A FR2653545B1 (fr) | 1989-10-24 | 1989-10-24 | Perfectionnements apportes aux dispositifs permettant d'ajuster la temperature d'un element par soufflage d'un gaz a la temperature souhaitee. |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2653545A1 FR2653545A1 (fr) | 1991-04-26 |
| FR2653545B1 true FR2653545B1 (fr) | 1992-02-14 |
Family
ID=9386721
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR8913922A Expired - Fee Related FR2653545B1 (fr) | 1989-10-24 | 1989-10-24 | Perfectionnements apportes aux dispositifs permettant d'ajuster la temperature d'un element par soufflage d'un gaz a la temperature souhaitee. |
Country Status (2)
| Country | Link |
|---|---|
| FR (1) | FR2653545B1 (fr) |
| WO (1) | WO1991006974A1 (fr) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59121920A (ja) * | 1982-12-28 | 1984-07-14 | Toshiba Corp | 面状対流型ヒ−タ |
-
1989
- 1989-10-24 FR FR8913922A patent/FR2653545B1/fr not_active Expired - Fee Related
-
1990
- 1990-10-24 WO PCT/FR1990/000766 patent/WO1991006974A1/fr unknown
Also Published As
| Publication number | Publication date |
|---|---|
| WO1991006974A1 (fr) | 1991-05-16 |
| FR2653545A1 (fr) | 1991-04-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| TP | Transmission of property | ||
| ST | Notification of lapse |