FR2637428B1 - FORBIDDEN ELECTRODE FOR SURFACE WAVE DEVICE AND METHOD FOR THE PRODUCTION THEREOF - Google Patents
FORBIDDEN ELECTRODE FOR SURFACE WAVE DEVICE AND METHOD FOR THE PRODUCTION THEREOFInfo
- Publication number
- FR2637428B1 FR2637428B1 FR898912773A FR8912773A FR2637428B1 FR 2637428 B1 FR2637428 B1 FR 2637428B1 FR 898912773 A FR898912773 A FR 898912773A FR 8912773 A FR8912773 A FR 8912773A FR 2637428 B1 FR2637428 B1 FR 2637428B1
- Authority
- FR
- France
- Prior art keywords
- forbidden
- electrode
- production
- wave device
- surface wave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Acoustics & Sound (AREA)
- General Physics & Mathematics (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
- Photovoltaic Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63244272A JPH0294807A (en) | 1988-09-30 | 1988-09-30 | Manufacture of surface acoustic wave device |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2637428A1 FR2637428A1 (en) | 1990-04-06 |
FR2637428B1 true FR2637428B1 (en) | 1992-08-28 |
Family
ID=17116281
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR898912773A Expired - Fee Related FR2637428B1 (en) | 1988-09-30 | 1989-09-29 | FORBIDDEN ELECTRODE FOR SURFACE WAVE DEVICE AND METHOD FOR THE PRODUCTION THEREOF |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPH0294807A (en) |
DE (1) | DE3932451A1 (en) |
FR (1) | FR2637428B1 (en) |
GB (1) | GB2223329B (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04200007A (en) * | 1990-11-29 | 1992-07-21 | Nikko Kyodo Co Ltd | Method for forming metallic electrode |
US6625855B1 (en) | 1999-10-06 | 2003-09-30 | Murata Manufacturing Co., Ltd. | Method for producing surface acoustic wave device |
CN109842393A (en) * | 2018-12-25 | 2019-06-04 | 泉州三安半导体科技有限公司 | The method of exposure effect and the manufacturing method of interdigital transducer are improved in interdigital transducer manufacturing process |
CN111327284A (en) * | 2020-02-18 | 2020-06-23 | 厦门市三安集成电路有限公司 | Preparation method of interdigital electrode |
CN112741640B (en) * | 2020-12-10 | 2022-11-04 | 中国科学院深圳先进技术研究院 | Real-time ultrasonic stimulation electric signal recording chip and preparation method thereof |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3639185A (en) * | 1969-06-30 | 1972-02-01 | Ibm | Novel etchant and process for etching thin metal films |
US3944421A (en) * | 1973-10-03 | 1976-03-16 | Horizons Incorporated, A Division Of Horizons Research Incorporated | Process for simultaneous development and etch of photoresist and substrate |
US3944420A (en) * | 1974-05-22 | 1976-03-16 | Rca Corporation | Generation of permanent phase holograms and relief patterns in durable media by chemical etching |
JPS5134651A (en) * | 1974-09-19 | 1976-03-24 | Toko Inc | HYOMENHAFUIRUTAOYOBISONOSEIZOHOHO |
JPS57136321A (en) * | 1981-02-18 | 1982-08-23 | Hitachi Ltd | Manufacture of resist stencil mask for lift-off |
JPS59121987A (en) * | 1982-12-28 | 1984-07-14 | Toshiba Corp | Manufacture of device using lithium borate crystal |
JPH0716141B2 (en) * | 1984-06-05 | 1995-02-22 | 株式会社東芝 | Surface acoustic wave device |
JPS60259012A (en) * | 1984-06-05 | 1985-12-21 | Toshiba Corp | Surface acoustic wave device |
JPS63240507A (en) * | 1987-03-27 | 1988-10-06 | Nippon Mining Co Ltd | Production of device |
-
1988
- 1988-09-30 JP JP63244272A patent/JPH0294807A/en active Granted
-
1989
- 1989-09-20 GB GB8921245A patent/GB2223329B/en not_active Expired - Fee Related
- 1989-09-28 DE DE3932451A patent/DE3932451A1/en not_active Withdrawn
- 1989-09-29 FR FR898912773A patent/FR2637428B1/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
GB2223329B (en) | 1993-03-24 |
DE3932451A1 (en) | 1990-05-10 |
GB2223329A (en) | 1990-04-04 |
FR2637428A1 (en) | 1990-04-06 |
JPH0294807A (en) | 1990-04-05 |
GB8921245D0 (en) | 1989-11-08 |
JPH0524684B2 (en) | 1993-04-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |