FR2626261B1 - APPARATUS FOR LIFTING SILICON WAFERS, ESPECIALLY - Google Patents

APPARATUS FOR LIFTING SILICON WAFERS, ESPECIALLY

Info

Publication number
FR2626261B1
FR2626261B1 FR8801261A FR8801261A FR2626261B1 FR 2626261 B1 FR2626261 B1 FR 2626261B1 FR 8801261 A FR8801261 A FR 8801261A FR 8801261 A FR8801261 A FR 8801261A FR 2626261 B1 FR2626261 B1 FR 2626261B1
Authority
FR
France
Prior art keywords
silicon wafers
lifting silicon
lifting
wafers
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR8801261A
Other languages
French (fr)
Other versions
FR2626261A1 (en
Inventor
Bernard Poli
Gerard Chincholle
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Recif SA
Original Assignee
Recif SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Recif SA filed Critical Recif SA
Priority to FR8801261A priority Critical patent/FR2626261B1/en
Priority to KR1019890000779A priority patent/KR890012369A/en
Priority to JP1016056A priority patent/JPH01280331A/en
Publication of FR2626261A1 publication Critical patent/FR2626261A1/en
Application granted granted Critical
Publication of FR2626261B1 publication Critical patent/FR2626261B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67326—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67271—Sorting devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
FR8801261A 1988-01-26 1988-01-26 APPARATUS FOR LIFTING SILICON WAFERS, ESPECIALLY Expired - Fee Related FR2626261B1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR8801261A FR2626261B1 (en) 1988-01-26 1988-01-26 APPARATUS FOR LIFTING SILICON WAFERS, ESPECIALLY
KR1019890000779A KR890012369A (en) 1988-01-26 1989-01-25 Silicon Wafer Lifter
JP1016056A JPH01280331A (en) 1988-01-26 1989-01-25 Silicon wafer lifter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8801261A FR2626261B1 (en) 1988-01-26 1988-01-26 APPARATUS FOR LIFTING SILICON WAFERS, ESPECIALLY

Publications (2)

Publication Number Publication Date
FR2626261A1 FR2626261A1 (en) 1989-07-28
FR2626261B1 true FR2626261B1 (en) 1992-08-14

Family

ID=9362909

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8801261A Expired - Fee Related FR2626261B1 (en) 1988-01-26 1988-01-26 APPARATUS FOR LIFTING SILICON WAFERS, ESPECIALLY

Country Status (3)

Country Link
JP (1) JPH01280331A (en)
KR (1) KR890012369A (en)
FR (1) FR2626261B1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9257319B2 (en) 2011-06-03 2016-02-09 Tel Nexx, Inc. Parallel single substrate processing system with alignment features on a process section frame

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2888409B2 (en) * 1993-12-14 1999-05-10 信越半導体株式会社 Wafer cleaning tank
JPH10223585A (en) 1997-02-04 1998-08-21 Canon Inc Device and method for treating wafer and manufacture of soi wafer
US6391067B2 (en) * 1997-02-04 2002-05-21 Canon Kabushiki Kaisha Wafer processing apparatus and method, wafer convey robot, semiconductor substrate fabrication method, and semiconductor fabrication apparatus
SG63810A1 (en) * 1997-02-21 1999-03-30 Canon Kk Wafer processing apparatus wafer processing method and semiconductor substrate fabrication method
US6767840B1 (en) 1997-02-21 2004-07-27 Canon Kabushiki Kaisha Wafer processing apparatus, wafer processing method, and semiconductor substrate fabrication method
JPH11121585A (en) * 1997-10-17 1999-04-30 Olympus Optical Co Ltd Wafer carrier
US6055694A (en) * 1998-11-30 2000-05-02 Tsk America, Inc. Wafer scrubbing machine

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4436474A (en) * 1982-01-04 1984-03-13 Western Electric Co., Inc. Selecting articles from an array thereof
US4701096A (en) * 1986-03-05 1987-10-20 Btu Engineering Corporation Wafer handling station

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9257319B2 (en) 2011-06-03 2016-02-09 Tel Nexx, Inc. Parallel single substrate processing system with alignment features on a process section frame
US9293356B2 (en) 2011-06-03 2016-03-22 Tel Nexx, Inc. Parallel single substrate processing system
US9449862B2 (en) 2011-06-03 2016-09-20 Tel Nexx, Inc. Parallel single substrate processing system
US9508582B2 (en) 2011-06-03 2016-11-29 Tel Nexx, Inc. Parallel single substrate marangoni module

Also Published As

Publication number Publication date
JPH01280331A (en) 1989-11-10
FR2626261A1 (en) 1989-07-28
KR890012369A (en) 1989-08-26

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Legal Events

Date Code Title Description
ST Notification of lapse