FR2611304B1 - DEPTH DEPENDENT PARTICLE IMPLANTATION DEVICE IN A TARGET - Google Patents

DEPTH DEPENDENT PARTICLE IMPLANTATION DEVICE IN A TARGET

Info

Publication number
FR2611304B1
FR2611304B1 FR8716972A FR8716972A FR2611304B1 FR 2611304 B1 FR2611304 B1 FR 2611304B1 FR 8716972 A FR8716972 A FR 8716972A FR 8716972 A FR8716972 A FR 8716972A FR 2611304 B1 FR2611304 B1 FR 2611304B1
Authority
FR
France
Prior art keywords
target
implantation device
depth dependent
particle implantation
dependent particle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR8716972A
Other languages
French (fr)
Other versions
FR2611304A1 (en
Inventor
Anton Dr Moslang
Dietmar Dr Kaletta
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Forschungszentrum Karlsruhe GmbH
Original Assignee
Kernforschungszentrum Karlsruhe GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kernforschungszentrum Karlsruhe GmbH filed Critical Kernforschungszentrum Karlsruhe GmbH
Publication of FR2611304A1 publication Critical patent/FR2611304A1/en
Application granted granted Critical
Publication of FR2611304B1 publication Critical patent/FR2611304B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/10—Scattering devices; Absorbing devices; Ionising radiation filters

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Particle Accelerators (AREA)
FR8716972A 1987-02-19 1987-12-07 DEPTH DEPENDENT PARTICLE IMPLANTATION DEVICE IN A TARGET Expired - Fee Related FR2611304B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19873705295 DE3705295A1 (en) 1987-02-19 1987-02-19 DEVICE FOR DEPTH-DEPENDENT IMPLANTATION OF PARTICLES IN A TARGET

Publications (2)

Publication Number Publication Date
FR2611304A1 FR2611304A1 (en) 1988-08-26
FR2611304B1 true FR2611304B1 (en) 1990-11-23

Family

ID=6321330

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8716972A Expired - Fee Related FR2611304B1 (en) 1987-02-19 1987-12-07 DEPTH DEPENDENT PARTICLE IMPLANTATION DEVICE IN A TARGET

Country Status (3)

Country Link
DE (1) DE3705295A1 (en)
FR (1) FR2611304B1 (en)
GB (1) GB2202420B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2676584B1 (en) * 1991-05-14 1994-01-07 General Electric Cgr Sa FACE-PROFILE TYPE ATTENUATOR FILTER FOR X-RAY APPARATUS.
GB2328162A (en) * 1997-08-15 1999-02-17 Shaun Connor Rake attachment for golf clubs
GB2384675B (en) * 2002-01-28 2006-01-11 James Macdonald Farley Francis Energy degrader for particle beams
DE10323654A1 (en) * 2003-05-26 2004-12-30 GSI Gesellschaft für Schwerionenforschung mbH Energy filtering device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR816845A (en) * 1936-01-27 1937-08-18 Device for protecting the patient against injuries caused by chi rays
NL8003336A (en) * 1979-06-12 1980-12-16 Dearnaley G METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE.

Also Published As

Publication number Publication date
GB2202420B (en) 1991-02-13
DE3705295A1 (en) 1988-09-01
FR2611304A1 (en) 1988-08-26
DE3705295C2 (en) 1992-03-26
GB2202420A (en) 1988-09-21
GB8725159D0 (en) 1987-12-02

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Legal Events

Date Code Title Description
ST Notification of lapse