FR2609251B3 - Procede et dispositif d'evaporation par cellule haute temperature a bombardement electronique - Google Patents

Procede et dispositif d'evaporation par cellule haute temperature a bombardement electronique

Info

Publication number
FR2609251B3
FR2609251B3 FR8700058A FR8700058A FR2609251B3 FR 2609251 B3 FR2609251 B3 FR 2609251B3 FR 8700058 A FR8700058 A FR 8700058A FR 8700058 A FR8700058 A FR 8700058A FR 2609251 B3 FR2609251 B3 FR 2609251B3
Authority
FR
France
Prior art keywords
high temperature
evaporation method
temperature cell
cell evaporation
bombarding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8700058A
Other languages
English (en)
Other versions
FR2609251A1 (fr
Inventor
Dominique Bolmont
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ALSACE, University of
Original Assignee
ALSACE, University of
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ALSACE, University of filed Critical ALSACE, University of
Priority to FR8700058A priority Critical patent/FR2609251B3/fr
Publication of FR2609251A1 publication Critical patent/FR2609251A1/fr
Application granted granted Critical
Publication of FR2609251B3 publication Critical patent/FR2609251B3/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
    • C30B23/02—Epitaxial-layer growth
    • C30B23/06—Heating of the deposition chamber, the substrate or the materials to be evaporated
    • C30B23/066—Heating of the material to be evaporated
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D1/00—Evaporating
    • B01D1/0011—Heating features
    • B01D1/0017—Use of electrical or wave energy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/081—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing particle radiation or gamma-radiation
    • B01J19/085—Electron beams only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • General Health & Medical Sciences (AREA)
  • Physical Vapour Deposition (AREA)
FR8700058A 1987-01-07 1987-01-07 Procede et dispositif d'evaporation par cellule haute temperature a bombardement electronique Expired FR2609251B3 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR8700058A FR2609251B3 (fr) 1987-01-07 1987-01-07 Procede et dispositif d'evaporation par cellule haute temperature a bombardement electronique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8700058A FR2609251B3 (fr) 1987-01-07 1987-01-07 Procede et dispositif d'evaporation par cellule haute temperature a bombardement electronique

Publications (2)

Publication Number Publication Date
FR2609251A1 FR2609251A1 (fr) 1988-07-08
FR2609251B3 true FR2609251B3 (fr) 1989-05-05

Family

ID=9346708

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8700058A Expired FR2609251B3 (fr) 1987-01-07 1987-01-07 Procede et dispositif d'evaporation par cellule haute temperature a bombardement electronique

Country Status (1)

Country Link
FR (1) FR2609251B3 (fr)

Also Published As

Publication number Publication date
FR2609251A1 (fr) 1988-07-08

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Legal Events

Date Code Title Description
ST Notification of lapse